Chapter 1 - Safety Warnings
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MNL000294.doc
Revision 2
09/16/2016
Source System TE11
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Scrubber with a pollution abatement system sized for maximum potential upset flow of
hazardous gas.
Adequate ventilation as described in section 3.7.
If you are unsure what personal protective
equipment list to follow for the gases being
used, DO NOT continue. Failure to
understand the hazards and use the proper
personal protective equipment may cause
INJURY or DEATH. Contact Versum
Materials, Inc. for the gas category.
Personal Protective Equipment for the gas categories follows:
Personal Protective Equipment for Toxics
Toxic gas leak detection (ex. MDA)
Self contained positive pressure breathing apparatus
Long sleeved Nomex suit
Safety glasses with side shields
Leather gloves
Safety shoes
NOTE: Most highly toxics (diborane, germane phosphine) are also
flammable. Nomex suit is not required for non-flammable toxics (ex:
nitrogen dioxide, boron trifluoride). All gases in Chapter 1 Section 12
using the warning sign with POISON GAS on the left and
FLAMMABLE GAS on the right REQUIRE the Nomex suit.
Personal Protective Equipment for Corrosives
Corrosive gas leak detector (ex. MDA)
Self contained positive pressure breathing apparatus
Level C acid suit (jacket with bib overalls)
Safety glasses with side shields
Leather gloves