Chapter 7 - System Description
_______________________________________________________________________________________________________________
MNL000301.doc
Revision 2
01/04/2019
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
7
-
21
RFO -
Restrictive Flow Orifice. Installed in a line to limit flow rate or provide surge suppression.
There is an RFO on the HPLT supply line to provide surge suppression (0.007 inch).