Chapter 6 - Functional Checklist
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MNL000300.doc
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09/16/2016
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Confidential and Proprietary Data
Page
6
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15
SILICON
TETRACHLORIDE
SICL4
636
SILICON
TETRAFLUORIDE
SIF4
330
642
SULFUR
HEXAFLUORIDE
SF6
580
716
TUNGSTEN
HEXAFLUORIDE
WF6
670
638