Chapter 10 - Maintenance
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MNL000304.doc
Revision 2
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
10
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7
All others: Every 4 years or
as dictated by local code
(whichever comes first)
Purifiers
Replace as recommended.
See Engineering
Specification 4WEQ-9509
Vacuum Venturi
Verify vacuum readings.
Every cylinder change
Exhaust Ventilation
Inlet Filter
Check for clogging.
Monthly
Replace or clean as required.
As necessary
Analog Exhaust
Monitor (i.e., Setra)
Verify zero.
Yearly
Exhaust Switch
Replace as recommended.
See Section 10.3
Exhaust Switch
Pitot Tube
Visually inspect for damage.
Yearly
Pneumatic
Bulkhead
Visually inspect for fatigue, cracking, or other damage.
Yearly
Pneumatic Tubing
Examine for cracking or signs of wear. Replace as
required or recommended.
Indoor: Yearly
Outdoor: Every 6 months
UV/IR Detector
Clean housing glass. Verify that the detector is aimed in
the proper direction.
Indoor: Every 6 months
Outdoor: Monthly
* Test UV/IR detector.
Yearly
UV Source for auto
self-check
Replace as recommended.
See Section 10.3
Temperature
Switch
* Test temperature switch.
Every 2 years
Scales
Verify zero or calibrate to known weight.
Yearly or at every cylinder
change if cylinder life
exceeds 1 year.
Sprinklers
Inspect for corrosion or damage. Verify that wax coating
is intact. Verify that discharge path to cylinder is clear.
Yearly
VCR Gaskets
Replace each time a connection is broken. Do not reuse.
As required
Cylinder Heaters
(TCU, Temperature
Control Units)
Test over-temperature interlocks.
2 years
Power Supply
Replace as recommended.
See Section 10.3
Verify power supply voltage is between 5.1 and 5.2 VCD.
Adjust as necessary following proper Versum Materials,
Inc. operational procedures.
Yearly
Instrument Air
Pressure
Transmitter
Check that pressure transmitter is in working condition.
Yearly
TFT Touch Screen
Check for readability and brightness. Adjust contrast as
Yearly