Chapter 6 - Functional Checklist
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MNL000300.doc
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09/16/2016
SourceSystem TE11
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After all connections have been made and installation of the gas source system is complete, the
appropriate Versum Materials, Inc. Representative should be contacted to schedule the final on-site gas
source system functional check. This functional check must be made prior to start-up. The functional
check is an additional service provided for a cost. The cost of this service may have been
pre-
arranged
during the sale and scope review of the project. Contact your Versum Materials, Inc.
Representative to discuss this. The Versum Materials, Inc. Technical Representative and/or Megasys
Technician will ensure that all the mechanical and electrical components in the gas source systems are
functioning properly and all programmed sequences are operational.
A copy of the completed source system functional checklist should be supplied to Versum Materials,
Inc. for placement into the source system maintenance file. The Source System Utility Checklist is
found on the following two pages.