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MNL000239.doc
Revision 3
01/07/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page C
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9
Cylinder Pressure ............................................................ 9-8
9.6.4
Low Vacuum at PT1 ....................................................... 9-8
9.6.5
Low Purge Pressure at PT1 ............................................. 9-9
9.6.6
High Pressure at Cylinder Connection
(Diss, CGA, keyed VCR, etc) ......................................... 9-9
9.6.7
Standby Leak Detected ................................................... 9-9
9.6.8
Cylinder Connection Leaking ......................................... 9-9
9.6.9
Cylinder Leaking ............................................................. 9-10
9.6.10
Low Vacuum at PT2 ....................................................... 9-10
9.6.11
Low Purge Pressure at PT2 ............................................. 9-10
9.6.12
Low Process Delivery or Very Low Process Delivery ... 9-10
9.6.13
High Process Delivery Pressure or Very High Pressure . 9-11
9.6.14
Low Purge Cylinder Pressure or Very Low Purge
Cylinder Pressure ............................................................ 9-11
9.6.15
Low Purge Delivery Pressure .......................................... 9-11
9.6.16
High Purge Delivery Pressure ......................................... 9-11
9.6.17
High Vent Pressure ......................................................... 9-12
9.6.18
Low Vacuum Generated PT5 .......................................... 9-12
9.6.19
High Purge Delivery PT8 or Very High Purge
Delivery PT8 ................................................................... 9-12
9.6.20
Low Purge Delivery Pressure .......................................... 9-13
9.6.21
High Purge Delivery Pressure ......................................... 9-13
9.6.22
Low Cylinder Weight or Very Low Cylinder Weight .... 9-13
9.7
Troubleshooting Procedures ............................................ 9-14
9.7.1
Troubleshooting Analog Inputs ....................................... 9-14
9.7.2
Troubleshooting Digital Inputs ....................................... 9-15
9.7.3
Troubleshooting Digital Outputs ..................................... 9-15
Chapter 10
Maintenance
10.1
Warranty .......................................................................... 10-1
10.2
Routine Maintenance ..................................................... 10-2
10.3
Component Expected Life ............................................... 10-8
Chapter 11
System Specific Information
11.1
System Specifications .................................................... 11-2
11.2
TE11 Recommended Spare Parts ................................... 11-3
11.2.1
TE11 Controller Recommended Spare Parts .................. 11-3
11.2.2
Source Recommended Mechanical Spare Parts .............. 11-5
11.3
Program Logic Chart ....................................................... 11-6
Appendix A
UHP Tubing and Fitting Specification Gas Equipment
................... A-1
Appendix B
Nitrogen Material Safety Data Sheet
................................................. B-1