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MNL000297.doc
Revision 2
09/16/2016
Source System TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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3
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1
Chapter 3
Tubing Connections
Section 1
Tubing Interconnections
Section 2
Process Line Connection
Section 3
Vent Line
Section 4
Venturi Line
Section 5
Purge Line
Section 6
Pneumatic Supply
Section 7
Enclosure Exhaust System Requirements
Section 8
Weld Shield Gas, Purge Gas Connection (Optional)
Section 9
Helium Leak Test Port (Optional)
Section 10
Hazardous Gas Leak Detection System
(Customer Requirement)
Section 11
Restrictive Flow Orifice (RFO) for Cylinder Valve
(Customer Requirement)
Section 12
Purifier Installation & Conditioning