Chapter 10 - Maintenance
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MNL000304.doc
Revision 2
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
10
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5
Preventative Maintenance – Mechanical Components
NOTE: Asterisk (*) indicates that Preventative Maintenance task requires a shutdown.
Component
Task
Minimum Frequency
Process Piping &
Components
Purge with clean, dry, inert gas to achieve Versum
Materials, Inc. recommended purity levels. Refer to
GASGUARD® Position Paper on Gas Panel Purging
3EQ95018. Minimum recommended purity level for
purge gas is 99.999% and <1ppmv H20 to maintain
mechanical integrity. A higher level of purge gas purity
may be required to meet customer process specifications.
Corrosives: Every cylinder
change and at the start of an
extended shutdown. It is
recommended that panels in
corrosive service (including
standby side) be purged at
least once every 3 months.
All other process gases:
Every cylinder change
Cylinder
Connection
Gasket/Filter
Replace gasket each time the cylinder connection is
broken. Do not reuse.
As required
Process/Purge
Pigtail
Examine cylinder connection face seal for scratches,
plugging, or corrosion. Replace the pigtail if there is
evidence of damage.
Every cylinder change
Check flex-hoses for signs of wear.
Every cylinder change or
every 3 months (whichever
comes first)
Replace as recommended.
See Section 10.3
Cylinder
Connection
Gasket/Filter
Replace gasket each time the cylinder connection is
broken. Do not reuse.
As required
Process/Purge
Panel
Visually inspect for damage, leaks, or malfunctioning
components. Check process and purge pressures for
readings that are outside of the specification range (found
in Section 11 of operating manual) or dramatic changes
from previous values. Observe the interior of the gas
cabinet for any signs of corrosion or gas leakage. Verify
that pneumatic tubing is securely connected to valve
actuators.
Every cylinder change or
Every 3 months (whichever
comes first)