Chapter 3 - Tubing Connections
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MNL000297.doc
Revision 2
09/16/2016
Source System TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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The tables below list the exhaust requirement for the GASGUARD
®
enclosures to meet the
above code requirements.
The features described below can be used to identify the enclosure type.
The specific enclosure
type ( Standard or High Flow) can be verified on the Specification Sheet supplied with your order.
Table 1
Minimum Exhaust Requirements for
GASGUARD® High Flow Enclosures Containing Silane
ACCESS HATCH CLOSED [2]
ACCESS HATCH OPEN [3]
Enclosure
Size [1]
exhaust
flow
(cfm)
static
pressure
(in H20)
velocity
pressure
(in H20)
exhaust
flow
(m3/m)
Static
pressure
(Pa)
velocity
pressure
(Pa)
exhaust
flow
(cfm)
velocity
pressure
(in H20)
exhaust
flow
(m3/m)
velocity
pressure
(Pa)
1 CYLINDER
325
0.31
0.17
9.2
77
42
350
0.198
9.9
49
2 CYLINDER
475
0.54
0.37
13.5
134
92
490
0.390
13.9
97
Notes:
[1] All vent stack duct sizes are 6 inch (154 mm) diameter.
[2] “Access Hatch Closed” values have been measured at the exhaust stack duct and
provide a minimum air velocity of 200 feet per minute (61 meters per minute)
across cylinder connections and panel fittings.
[3] “Access Hatch Open” values have been measured while observing a minimum
velocity of 200 feet per minute (61 meters per minute) across the access
hatch opening.
[4] These recommended values assume that a 0.25 mm [0.010 inch] diameter
restrictive flow orifice (RFO) is installed in the Silane source cylinder valve per US
Code requirement.