Chapter 11 - System Specific Information
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MNL000305.doc
Revision 3
01/04/2019
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
11
-
4
Item
Category
Critical Spare
Part (Qty)
Recommended
Spare Part (Qty)
Manufacturer
VERSUM
MATERIAL
Description
12
Pneumatic
0
1
SMC
VQZ115K‐
5L1‐M5‐PR
Hardware Valve
13
Pneumatic
0
1
SMC
VQ110Y‐5L
Pneumatic Valve
14
Pneumatic
0
1
SMC
VQZ100‐FB
13 Valve Pneumatic Manifold
Base
15
Pneumatic
0
1
SMC
M‐5P
Pneumatic Manifold Plug
16
Needle Valve
0
1
SMC
AS2001F‐07‐
03
Z‐Purge meeting valve
17
Circuit board
0
1
VERSUM
MATERIALS, INC.
ATMI‐L
Gasguard TEx Left Interface
Board Circuit Diagram
18
Circuit board
0
1
VERSUM
MATERIALS, INC.
ATMI‐R
Gasguard TEx Right Interface
Board Circuit Diagram
19
Circuit board
0
1
VERSUM
MATERIALS, INC.
ATMI‐P
Gasguard TEx Lamp Board
Circuit Diagram
20
Circuit board
0
1
VERSUM
MATERIALS, INC.
ATMI‐T
Gasguard TEx Terminal Block
Board Circuit Diagram(Green
Terminal Option)
21
Circuit board
0
1
VERSUM
MATERIALS, INC.
ATMI‐D
Gasguard TEx D Connector
Interface Board Circuit
Diagram (D‐Sub Connector
Option)
22
Miscellaneous
0
1
IDEC
AVW411ERP
Push Button – Mushroom
Head ‐ Red
23
Miscellaneous
0
1
IDEC
LW1Z‐1X4
Alarm Horn
NOTE: Only spares that meet the manufacturer’s specifications should be used.