Chapter 1 - Safety Warnings
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MNL000294.doc
Revision 2
09/16/2016
Source System TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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Pyrophoric gases will spontaneously ignite in air
Pyrophoric gases do not need a source of ignition to burn. However, low concentrations may
accumulate without pyrophoric ignition (i.e. silane can accumulate up to a concentration of 2 molar
percent [number of moles of silane per fixed volume of air] before spontaneous ignition occurs).
Pyrophoric gases will ignite in the presence of oxygen.
Flammable mixtures can burn or explode
Fire and explosion hazards can be controlled by preventing the formation of combustible fuel-oxidant
mixtures and by eliminating sources of ignition such as sparks, open flames or other heat sources.
Flammable mixtures will burn when ignited and can explode when the concentration is above the
lower explosive limit (LEL) and below the upper explosive limit (UEL) for that specific gas. Some
flammable gases may accumulate as pockets in enclosed areas and subsequently explode if an ignition
source is present. A flammable gas also presents an asphyxiating hazard in sufficient quantities to
reduce oxygen concentration below 19.5%, however fire/explosion is typically the primary hazard.
Adequate ventilation is necessary
Adequate ventilation helps reduce the possible formation of flammable mixtures in the event of a
flammable gas leak. See tables in Chapter 3 Section 7 which list the exhaust requirements per
enclosure size for all gases.
NOTE: To avoid any possible hazardous reactions (i.e. fire, explosion,
extremely corrosive or toxic mixtures) never vent incompatible gases out the
same duct!
Continually monitor the atmosphere
Continually monitoring the atmosphere with a gas leak detector will alert the operator to a flammable
or explosive atmosphere in the area.
NOTE: The installation of a hydride detector is strongly recommended for
silane and other pyrophoric gases to detect leaks or pockets of gas that may not
spontaneously ignite!
Versum Materials, Inc. strongly recommend installation of a hydride detector to detect gas pocketing
of pyrophoric gases.