Chapter 4 - Electrical Connections
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MNL000298.doc
Revision 2
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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4.4.1 Available External I/O Communications
Digital Outputs
Response
Gas unavailable
Notify process tool that gas is unavailable
Digital Inputs
Response
Process tool down
Prevent GASGUARD® System from flowing
Process gas
Process gas leak
Shut down GASGUARD® System
Remote Shutdown
Shut down GASGUARD® System
Vent system unavailable
Prevents purge modes from starting
Emergency Stop
Hardwired Shutdown of GASGUARD®
System; local reset required
Master Solenoid Permissive
Hardwired permissive for Master Solenoid;
allows remote inhibit of master solenoid
Supervised Inputs
Response
Remote Shutdown
Shut Down GASGUARD® System
The GASGUARD® System is equipped with a
“vent unavailable” feature which prevents
process gas from being vented from the panel if
the scrubber system is not operating. Use of this
feature requires the installation of a hardwire
between the controller and the scrubber. Failure
to utilize this feature may result in the discharge
of process gas to a non-function vent system.