Chapter 3 - Tubing Connections
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MNL000297.doc
Revision 2
09/16/2016
Source System TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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3
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3.1
Tubing Interconnections
Process outlet
:
1/4" (6.4 mm) diameter,
0.035" (0.9 mm) wall thickness
Optional coax
1/2" (12.7 mm) diameter,
0.049" (1.2 mm) wall thickness
Optional process outlet
3/8” (9.5 mm) diameter
0.035” (0.9 mm) wall thickness
Optional coax
5/8” (15.8 mm) diameter
0.049” (1.2 mm) wall thickness
Venturi inlet
:
1/4" (6.4 mm) diameter,
0.035" (0.9 mm) wall thickness
Purge inlet:
1/4" (6.4 mm) diameter,
0.035" (0.9 mm) wall thickness
Vent outlet:
3/8" (9.5 mm) diameter,
0.035" (0.9 mm) wall thickness
Optional vent:
1/4" (6.4 mm) diameter,
0.035" (0.9 mm) wall thickness
Specific piping connections for this system can be found on the Installation Drawing (INS). An INS
drawing is provided only when it is specifically requested by the customer. Please contact your
Versum Materials, Inc. commercial representative for assistance.