Chapter 3 - Tubing Connections
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MNL000297.doc
Revision 2
09/16/2016
Source System TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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3
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12
Table 2
Exhaust Recommendations for
GASGUARD®
Equipment Containing
Gases with a TLV > 0.20 ppm
(25% TLV
>
0.050 ppm)
Access Port Closed
Access Port Open
Maximum
ERC
[1]
Exhaust
Flow
Static
Pressure
Velocity
Pressure
Exhaust
Flow
Velocity
Pressure
Average
Duct
Velocity
Minimum
Face
Velocity
Average
Face
Velocity
Baffle
ppm
scfm
inches
H2O
inches
H2O
scfm
inches
H2O
fpm
fpm
fpm
No ESI
[2]
0.029
75
‐0.5
0.05
318
0.255
1622
180
220
None
ESI
< 0.029
75
‐1.5
0.15
237
0.775
1210
210
236
33%
Notes
:
[
1] ERC (Expected Release Concentration) values are taken from actual test data.
[
[2] ESI (Exhaust Stack Insert) may have been specified by the customer to enhance the readability
of the exhaust pressure
Monitor. Refer to the system’s Specification Sheet to determine if this option is used.
[3] These exhaust flow values are applicable to all GASGUARD® standard flow enclosures.
[4] All standard GAGGUARD® enclosures are sized for a 6 inch outer diameter (OD) duct connection to the vent stack. Refer to the
system’s Specification Sheet to determine the type of enclosure.
[5] “Access Hatch Closed” values have been measured, or calculated at the exhaust stack duct.
[6] The actual values presented in "Access Port Open" are taken from experimental results. Balancing to Tables 2 and
3 will meet or exceed UFC 80 face velocity requirements.
Table 3
Exhaust Recommendations for
GASGUARD®
Equipment Containing
Gases with a TLV between 0.050 and 0.20 ppm
(25% TLV: 0.0125 ‐ 0.050 ppm) [Includes the
following pure (100%) gases: Chlorine Trifluoride, Diborane, Arsine]
Access Port Closed
Access Port Open
Maximum
ERC
[1]
Exhaust
Flow
Static
Pressure
Velocity
Pressure
Exhaust
Flow
Velocity
Pressure
Average
Duct
Velocity
Minimum
Face
Velocity
Average
Face
Velocity
Baffle
ppm
scfm
inches
H2O
inches
H2O
scfm
inches
H2O
fpm
fpm
fpm
No ESI
[2]
0.007
120
‐0.5
0.01
272
0.14
1392
240
266
33%
No ESI
< 0.007
120
‐1
0.05
349
0.26
1783
200
248
None
ESI
< 0.007
120
‐1
0.2
214
0.55
1095
180
216
33%