Chapter 7 - System Description
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MNL000301.doc
Revision 2
01/04/2019
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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The GASGUARD® Source Systems typically consist of a gas cabinet
(except for wall-mounted or
rack-mounted systems), a controller, a process gas panel, and an inert purge gas panel.
Some GASGUARD® systems can be configured to provide continuous gas service, without
interruption from a depleted cylinder. These systems are called auto switch-over, because process gas
is automatically switched from a panel supplying gas from a depleted cylinder, to a panel that can
supply gas from a full cylinder. The minimum hardware requirements to operate in auto switchover
mode are:
One dual controller, and
Two process gas panels sharing process outlet piping
GASGUARD® Systems are designed and built for the safe storage and handling of high purity toxic,
flammable, pyrophoric, corrosive, oxidizing, and reactive cylinder gases. GASGUARD® Systems
have been designed in accordance with the applicable requirements of the National Fire Protection
Agency (NFPA), Uniform Fire Code (UFC), Toxic Gas Ordinance (TGO), and Semiconductor and
Equipment and Materials International (SEMI).
7.1
Gas Cabinet
The function of the GASGUARD® Cabinet is to ensure a safe environment for personnel during
cylinder changes or in the unlikely event of a hazardous gas leak. The cabinet must be connected to a
properly designed exhaust system that is continuously operated in order to provide a safe environment.
The cabinet provides the secondary containment for any leak from the hazardous gas cylinder, cylinder
connection and pigtail, and the process panel. The exhaust system continuously removes any leaking
hazardous gas from the cabinet to a safe disposal system.
The GASGUARD® enclosure is constructed of 12 gage (0.004 mm) steel with fully welded seams and
protected with corrosion resistant polyurethane paint. Enclosure sizes are available to hold from one to
three cylinders. One or more exhaust stacks are provided for connection to the customer's exhaust
system.