Chapter 10 - Maintenance
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MNL000304.doc
Revision 2
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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10.3 Component Expected Life
This section provides the expected life of several system components. The listed expected life is the
length of time during which the component, with proper care and handling as outlined in Chapter 10
Section 2, is expected to function properly. At the end of the expected life, the component should be
replaced to ensure the safe and proper functioning of the system.
Mechanical Components Expected Life
Component
Expected Life / Recommended Minimum Changeout
Frequency
Cylinder Connection Gasket
Every cylinder change
Process Pigtail
Corrosives/Diborane/Pyrophorics: 3 years
SST tubing for Noncorrosives: 5 years
Flexhose for inert service: 6 years
Flexhose for flammable service: 3 years
Conical Filter (downstream of pigtail)
Corrosives/Diborane/Pyrophorics: 3 years
Noncorrosives: 5 years
Pressure Transducers
10 years
Process Regulator
Diborane: 2 years
Corrosives: 5 years
All others: 10 years
Purge Regulator
10 years
Excess Flow Switch
10 years
Valves
10 years
Purifiers
See 4WEQ-9509
Purge Pigtail
SST Tubing: 10 years
Flex-hose: 6 years
Vacuum Venturi
10 years
Exhaust Ventilation Inlet Filter
10 years
Analog Exhaust Monitor
10 years
Exhaust Switch
2 years
Pneumatic Connectors & Tubing
Outdoor: 2 years
Indoor: 10 years
UV/IR Detector
10 years
UV source for auto self-check
3 years
Temperature Switch
10 years