Chapter 3 - Tubing Connections
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MNL000297.doc
Revision 2
09/16/2016
Source System TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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3.7
Enclosure Exhaust System Requirements
1.
In order to meet SEMI S2 criteria in HPM (Hazardous Production Material) gas service, the
enclosure should control emissions into the room to less than 25% TLV (Threshold Limit
Value) of the HPM gas in the event of an internal leak.
2.
In order to meet UFC (Uniform Fire Code) criteria (U.S.A. only) in HPM gas service, air
velocity across the opened access hatch must meet the following velocity requirements to
minimize potential operator exposure to hazardous gas: 200 feet per minute average, with 150
feet per minute minimum at any point (61 meters per minute average, with 46 meters per
minute minimum).
3.
In order to meet UFC criteria (U.S.A. only) in Silane gas service, air velocity across all
unwedded fittings and connections must meet the following velocity requirements to minimize
potential pocketing of Silane gas: 200 feet per minute (61 meters per minute).
The values listed in the tables below should
serve as a guideline for reference only.
Cabinet ventilation systems must:
(1) Be designed, installed, and balanced to
suit individual facility requirements.
(2) Comply with applicable local, state, and
federal codes.
This exhaust system must be independent of
any general plant exhaust system and must
be designed for the types of gases being
used. Ensure only compatible gases are fed
into each exhaust system. Be certain the
exhaust system power and shut down
interlocks comply with UFC and NFPA code
requirements (U.S.A. only).