Chapter 5 - Helium Leak Testing
_______________________________________________________________________________________________________________
MNL000299.doc
Revision 1
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
5
-
2
All personnel
must
be trained in helium leak detector operations. Consult your leak detector
manufacturer for leak detector operations training.
The customer is responsible for ensuring that all field piping to the GASGUARD® Source System be
completely leak tight. Leak testing should be performed in accordance with the current industry
standard, SEMI (Semiconductor Equipment and Materials International) #F1-90, Specification for
Leak Integrity of Toxic Gas Piping Systems and all applicable codes. A suitable helium leak detector
is required to attain the level of sensitivity required by the above standard.
There are several methods of helium leak testing.
The TE11controller uses:
Outboard - The component is pressurized with helium and sniffed externally with the
detector.
NOTE: It is recommended that the internal GASGUARD® Source System tubing,
which was helium leak tested at the factory, be rechecked at this time to ensure no
leaks have developed during installation or shipment. Consult Versum Materials,
Inc. for proper helium leak detection procedures.
In order to adequately leak test the GASGUARD® Source System internal and external piping, the
pneumatic emergency shutoff and auto-crossover valves within the cabinet must be operated. These
valves can be manually opened and closed through "Manual Mode" operation on the front keypad of
the GASGUARD® controller. Versum Materials, Inc.
strongly recommends
that all operators
receive training by an Versum Materials, Inc. representative prior to operating the GASGUARD®
Source System in "Manual Mode". Operations training is an additional service provided for a cost.
The cost of this service may have been
pre-arranged
during the sale and scope review of the project.
Contact your Versum Materials, Inc. representative to discuss this.
To operate these valves, the Pneumatic Supply hookup (see Chapter 3 Section 6) and the Electrical
Power Supply Connection (see Chapter 4 Section 2) installation must be completed.