Chapter 1 - Safety Warnings
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MNL000294.doc
Revision 2
09/16/2016
Source System TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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The following label appears on cabinets. It is located on the back of the cabinet, approximately 12”
(305 mm) from the top.
The following eleven labels are specific to the gases being used. They are located on the door of the
GASGUARD® cabinet. They are identical to the labels on the process gas cylinder in the
GASGUARD® cabinet to provide verification that the correct process gas is being installed and used.
NOTE: The signs shown below are United States DOT classifications. They are not
to be used to classify gas hazards. Refer to the appropriate MSDS provided with the
system documentation.
The following label would be used with the gases listed below it:
Boron trifluoride
Phosphorous pentafluoride
Chlorine
Sulfur dioxide
Carbon tetrachloride
Sulfur tetrafluoride
Nitrogen dioxide
Tungsten hexafluoride
Nitric oxide