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MNL000239.doc
Revision 3
01/07/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page C
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4
Revision Control Summary
Chapter
Revision
File Name
Introduction
Rev-2
MNL000296.doc
Updated company name and logo
Chapter 1 – Safety Warnings
Rev-2
MNL000294.doc
Updated company name and logo
Chapter 2 – Dimensions and Mounting
Rev-2
MNL000295.doc
Updated company name and logo
Chapter 3 – Tubing Connections
Rev-2
MNL000297.doc
Updated company name and logo
Chapter 4 – Electrical Connections
Rev-2
MNL000298.doc
Updated company name and logo
Chapter 5 – Helium Leak Check
Rev-2
MNL000299.doc
Updated company name and logo
Chapter 6 – Functional Checklist
Rev-2
MNL000300.doc
Updated company name and logo
Chapter 7 – System Description
Rev-2
MNL000301.doc
Updated controller screen picture, figure 7.4
Chapter 8 – Operating Procedures
Rev-2
MNL000302.doc
Updated controller screen picture, figure 8.1
Chapter 9 – Troubleshooting
Rev-2
MNL000303.doc
Updated company name and logo