Chapter 7 - System Description
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01/04/2019
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7.2
Rack System
A Rack System is a free-standing open platform for inert and Silane gas handling systems. Its design
will accommodate process and purge panels, gas cylinders and a controller. No exhaust hook-up is
required.
The use of a rack system for Silane distribution is the preferred alternative to gas cabinets that
minimizes the potential for Silane pocketing and subsequent explosion.
NFPA 318 and UFC 80-1 lend insight into open rack design. In addition any local building codes need
to be followed when considering the use of a rack system.
A typical rack system is shown in Figure 7.2.
Figure 7.2:
Typical Rack System