Chapter 7 - System Description
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MNL000301.doc
Revision 2
01/04/2019
SourceSystem TE11
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7.4
Hazardous Gas Panel
The Gas Panel consists of pneumatic valves, manual valves, pressure transducers, pressure regulators,
check valves, relief valves and various safety/purity components that perform the following functions:
Regulate cylinder pressure to the process tool working pressure.
Remove hazardous material, if present, from the panel prior to changing the process
cylinder.
Provide immediate shut-off in a hazardous situation using fail-safe pneumatic valves.
Maintain process tubing purity during process cylinder change.
Pneumatic valves are used to shut off process gas flow, to control purge gas flow into the process
panel, to vent process gas and purge gas from the panel and to feed inert gas to the vacuum venturi
system. Check valves are used as backup to prevent process gas flow into the inert gas panel and to
prevent contamination of the panel from the exhaust system.
All components and tubing are type 316L stainless steel. Hastelloy C-22 trim is used in corrosive gas
regulators. All components handling the process gas or purge gas are welded into the system or use
Cajon VCR fittings or equivalent. The panels are connected to the gas cylinder by a stainless steel
pigtail and a CGA, DISS, or keyed VCR fitting, in the United States, (BS, DIN, AFNOR, INI in
Europe, JIS in Asia) that is defined specifically for each type of gas. A flow restricting orifice is
sometimes installed in the cylinder valve to minimize hazardous gas flow. Excess flow sensors may be
installed on certain systems.
7.5
Inert Gas Purge Panel
This panel controls the pressure and flow of purge gas to the hazardous gas panel during the purge
sequence and cylinder change-out procedure. The panel is constructed using similar materials and
techniques as the hazardous gas panel. In addition, a safety relief valve located on the purge panel is
used to prevent overpressure of the inert gas purge system, and the process panel.