Chapter 8 - Operating Procedures
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MNL000302.doc
Revision 2
01/04/2019
SourceSystemTE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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8.3.1.1 Empty Purge Gas Cylinder Removal
1. Check and record the required information on the Process Gas Cylinder Change Checklist
(found at the end of Section 8.3) each time a cylinder is changed.
Do not proceed if there are any alarm
labels displayed on the screen, the exhaust
system is not working or pressures appear
abnormal.
2. Open access window.
3. Close purge gas cylinder valve (fully clockwise).
4. Close manual valve MV10.
5. Slowly open manual valve MV13, to vent purge gas within pigtail. Close MV13.
6. Through the access window, loosen the pigtail cylinder connection from the cylinder valve
using the proper wrench. Be sure to support the connection and pigtail tubing.
7. Close access window.
8. Don the required Personal Protective Equipment (PPE) prior to opening cabinet door.
9. Re-verify that exhaust system is working.
10. Open gas cabinet door.
11. Recheck that cylinder valve and manual valve MV10 are closed.
12. Fully remove pigtail cylinder connection from cylinder valve.
13. Install cylinder valve protection cap.
14. Install pigtail cylinder cap/plug onto pigtail connection.
15. Unbuckle cylinder strap and remove cylinder from source system.
16. Place cylinder in appropriate cart and strap in place. Place "EMPTY" tag on cylinder and
return cylinder to the appropriate cylinder storage area.