Chapter 3 - Tubing Connections
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MNL000297.doc
Revision 2
09/16/2016
Source System TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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3.6.1 Z-purge Procedure
The Z purge pressure is controlled by a needle valve at rear of controller. After opening the controller
in a suspected hazardous area it is necessary to use the following procedure to re-establish the Z-purge
before operating the controller:
1.
Close the controller front and tighten both latches completely.
2.
Open the needle valve 4 to 5 turns (counter-clockwise). Allow the controller to purge for 20
minutes.
3.
Adjust needle valve to satisfy the “Z-Purge” alarm (approximately 2 total turns open).
Flow requirements to operate the solenoid valves are very small, less than 1 LPM (2 CFH). If Type Z
purge is required, a flow rate of 3-10 LPM (6-21 CFH) will be needed, depending on the tightness of
the individual controller and the installation.
Figure 3.5:
Rear View of GASGUARD® TE11 Controller