Chapter 6 - Functional Checklist
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MNL000300.doc
Revision 1
09/16/2016
SourceSystem TE11
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14
Gas service to CGA and DISS fitting cross‐reference
Appendix A
Gas
Gas abbreviation
CGA fitting
DISS fitting
AMMONIA
NH3
660
720
ARGON
AR
580
718
ARSINE
ASH3
350
632
BORON TRICHLORIDE
BCL3
660
634
BORON TRIFLUORIDE
B11F3
330
642
CARBON DIOXIDE
CO2
320
716
CHLORINE
CL2
660
634/724
DIBORANE MIXES
B2H6
350
632
DICHLOROSILANE
DCS
678
636
DISILANE
SI2H6
350
632
HALOCARBON‐116
C2F6
660
716
HALOCARBON‐12
CCL2F2
660
716
HALOCARBON‐14
CF4
580
716
HALOCARBON‐23
CHF3
660
716
HELIUM
HE
580
718
HYDROGEN
H2
350
724
HYDROGEN
BROMIDE
HBR
330
634
HYDROGEN
CHLORIDE
HCL
330
634
HYDROGEN SULFIDE
H2S
330
722
NITROGEN
N2
580
718
NITROGEN
TRIFLUORIDE
NF3
330
640
NITROUS OXIDE
N20
326
712
OXYGEN
O2
540
714
PERFLUOROPROPANE
C3F8
660
716
PHOSPHINE
PH3
350
632
SILANE
SIH4
350
632