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MNL000239.doc
Revision 3
01/07/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page C
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7
Chapter 3
Tubing Connections
3.1
Tubing Interconnections ................................................. 3-3
3.2
Process Line Connection ................................................ 3-4
3.3
Vent Line ......................................................................... 3-6
3.4
Venturi Line .................................................................... 3-7
3.5
Purge Line ....................................................................... 3-7
3.6
Pneumatic Supply ............................................................ 3-8
3.6.1
Z-Purge Procedure .......................................................... 3-9
3.7
Enclosure Exhaust System Requirements ....................... 3-10
3.8
Sprinkler Installation ....................................................... 3-13
3.9
Helium Leak Test Port .................................................... 3-14
3.10
Hazardous Gas Leak Detection System (Customer
Requirement) ................................................................... 3-14
3.11
Restrictive Flow Orifice (RFO) for Cylinder Valve
(Customer Requirement) ................................................. 3-15
Chapter 4
Electrical Connections
4.1
Grounding Method ......................................................... 4-1
4.2
Power Supply Connection .............................................. 4-2
4.3
Field Connections ............................................................ 4-4
4.4
External I/O Communication .......................................... 4-6
4.4.1
Available External I/O Communications ........................ 4-8
Chapter 5
Helium Leak Check
Chapter 6
Source System Functional Checklist
6.1
Source system Utility Checklist ........................................ 6-3
6.2
Source System Field Start-up Checklist .......................... 6-5
Chapter 7
System Description
7.1
Gas Cabinet .................................................................... 7-2
7.2
Rack System ................................................................... 7-4
7.3
Auto Switchover System ................................................. 7-5
7.4
Hazardous Gas Panel ....................................................... 7-6
7.5
Inert Gas Purge Panel ...................................................... 7-6
7.6
Panel Schematic and Component Descriptions ............... 7-7
7.7
GASGUARD
® TE11 Controller .......................................... 7‐12
7.7.1
Controller Components ....................................................... 7‐13
7.8
Main Menu Options ............................................................ 7‐15
7.8.1
Source Mode Menu Options ............................................... 7‐15
7.8.2
Active Alarms ....................................................................... 7‐18
7.8.3
Configuration Menu ............................................................ 7‐18
7.9
High Pressure Leak Test (HPLT) ........................................... 7‐18
7.9.1
Definitions ........................................................................... 7‐18
7.9.2
Valve and Transducer Numbers and Nomenclature ........... 7‐19