Chapter 10 - Maintenance
_______________________________________________________________________________________________________________
MNL000304.doc
Revision 2
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
10
-
3
10.2 Routine Maintenance
The following maintenance needs to be done at the indicated times.
Maintenance is only to be performed by trained
personnel who understand the hazards of the
system.
Before attempting to service the system
components, all pressure in the system should be
relieved and electrical power to the system turned
off. Close the cylinder valve(s) and then vent all
pressure in the system. Purge out all process gas
lines and seal them. The process gas cylinder
must be removed from the gas source system
following the process cylinder procedures in
Chapter 8 Section 3 of this manual. Tag out and
lock out the cylinder valve(s) (see Chapter 1
Section 11) to prevent opening while service is
being performed. Once the maintenance is
complete, helium leak test the system using a mass
spectrometer. Follow the start-up procedure, in
Chapter 8 Section 4.
Personal injury or death may result if proper
personal protective equipment (PPE) is not worn
when performing troubleshooting. See Chapter 1
Section 9 of this manual for the proper PPE.