Chapter 8 - Operating Procedures
___________________________________________________________________________________________________________
MNL000302.doc
Revision 2
01/04/2019
SourceSystemTE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
8
-
19
Do not open the process cylinder at this
time. The post purge procedure must be
completed first.
8.3.2.4 Full Process Cylinder Purge (After Installation)
1.
On the Main Menu for the side you are changing window, highlight “—START—POST
PURGE”.
2.
Follow any steps that may be prompted on the screen.
The following valves will sequence on the display during the high pressure purge cycles.
V1L, V4L will open to pressurize the pigtail.
A leak check will be preformed.
The high pressure tubing will then be evacuated and "flush" purged
by opening V1, V4, V5 and V7.
The tubing will then be pressurized with purge gas by opening V1, V4,
and V1 and then evacuated using V1, V5 and V7. This sequence of
evacuation and pressurization will be repeated until the configured
number of cycles is completed.
At the end of the Post purge sequence V 6 will open to allow evacuation
of the lines between PCV1 and V3. After this the status bar will display
POST PURGE COMPLETE.
8.3.2.5 Process Gas Flow
1.
On the Main Menu =screen, highlight"‐‐ START‐‐ PROCESS GAS".
2.
Follow the steps prompted on the screen.
3.
Process gas is now flowing to the process equipment.