Chapter I - Introduction
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MNL000296.doc
Revision 2
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Note: Versum Materials, Inc. recommends that the customer develop a specific "Work Instruction"
for each gas cabinet, rack system or distribution system. The work instruction can be used as a step
through check list procedure for trained operators.
A standard industrial work instruction would include the following:
System identification number, gas service, basic description of system, etc.
Current operating data (pressure, etc.), date, time, operator.
Tools/supplies required for maintenance (PPE required for the gas, leak testing equipment,
gaskets, etc.)
Step-through procedural check list to include specific customer PPE protocol, communications
and customer leak test procedures.
Consult your local Versum Materials, Inc. technical representative if you need assistance in
preparation of standard work instruction.
Please refer to the Table of Contents of this manual for a listing of the detailed Chapters and Sections
within and what pages they can be found on.
The table below provides a quick reference as to the applicability of the manual's sections.
Manual Section
Supervisory
Maintenance
Operations
1. Safety Warnings
2: Dimensions and Mounting
3: Tubing Connections
4: Electrical Connections
5: Helium Leak Test
6: Distribution System
Functional Checklist
7: System Description
8: Operating Procedures
9: Troubleshooting
10: Maintenance
11: System Specific Information
Appendices
The information and data contained herein are proprietary to Versum Materials, Inc. and are not to be
copied, reproduced, duplicated or disclosed to others, in whole or in part, without prior written consent
of Versum Materials, Inc.
This restriction shall not apply to any safety information contained in the manual. The safety
information is intended for your use and we encourage you to copy it so that anyone using this
equipment knows how to use it safely.