Chapter 1 - Safety Warnings
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MNL000294.doc
Revision 2
09/16/2016
Source System TE11
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1.10.1 Toxic Gas Hazards
Many of the gases used in the GASGUARD®
system could cause personal INJURY OR
DEATH at very low concentrations.
Many of these gases provide no physical warning signs (i.e. coughing, throat irritation, burning
sensations, and shortness of breath) to alert personnel of exposure to toxic levels.
Personal protective equipment required for use with toxic gases is detailed in Chapter 1 Section 9 of
this manual.
A list of most of the toxic gases used in the GASGUARD® system follows:
Ammonia
Hydrogen fluoride
Arsine
Hydrogen sulfide
Boron trichloride
Methyl chloride
Boron trifluoride
Nitrogen dioxide
Carbon monoxide
Nitrogen trifluoride
Chlorine
Phosphine
Chlorine trifluoride Phosphine mixtures
Diborane
Phosphorous pentafluoride
Diborane mixtures
Silane
Dichlorosilane
Silicon tetrachloride
Disilane
Silicon tetrafluoride
Fluorine
Sulfur tetrafluoride
Germane
Trichlorosilane
Hydrogen bromide
Tungsten hexafluoride
Hydrogen chloride