Chapter 8 - Operating Procedures
___________________________________________________________________________________________________________
MNL000302.doc
Revision 2
01/04/2019
SourceSystemTE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
8
-
17
11. Open the enclosure door.
12. Loosen cylinder holding strap but do not unbuckle.
13. Install cylinder valve protection cap. If necessary, tilt cylinder toward door slightly.
14. Unbuckle cylinder strap and remove cylinder from cabinet.
15. Place cylinder in appropriate cart and strap in place. Place "EMPTY" tag on cylinder and
return cylinder to the appropriate cylinder storage area.
8.3.2.3 Full Process Gas Cylinder Installation
The required Personal Protective
Equipment (PPE) must be worn when
performing any process cylinder
procedures. Refer to Chapter 1 Section 9
of this manual for the required PPE.
1.
Verify that the cylinder contains the same gas as the label on the gas cabinet and process
panel.
Never attempt to replace a specified gas
with another gas without consulting
equipment supplier. Incompatible gases
could cause fires, explosions or extremely
corrosive or toxic compounds.
2.
Position full cylinder in gas cabinet, and strap loosely. Remove valve protection cap.