Chapter 10 - Maintenance
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MNL000304.doc
Revision 2
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
10
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6
Cabinets and
Frames
Sweep enclosures and racks. Clean all external surfaces
with a clean damp cloth. Clean the interior cabinet
enclosures and rack frames.
Caution:
Use a damp cloth
only on the outside of the controller. Do not clean
controller interior. Especially in hazardous areas, DO
NOT rub the surface of the screen with a dry cloth. This
could generate an electrostatic charge. When cleaning the
controller face, take measures to prevent an electrostatic
discharge such as earth band, ionic shower, etc.
Caution:
Do not use pressurized water to clean inside or outside of
source systems as serious damage could occur to the
electronic components.
Every 3 months unless the
equipment is located in a
cleanroom environment.
Cleanroom units should be
cleaned as necessary.
Cabinet
Door/Window
Verify that self-closing mechanism functions properly.
Inspect hinges and gaskets for damage or excessive wear.
Look for aging, cracks, and peeling of the gaskets. Also
check the surface onto which the gaskets seal. Look for
oxidation, corrosion, and foreign material that would
prevent proper sealing.
Yearly
Cylinder Restraints Visually inspect for wear. Verify cylinder is properly
secured.
Every cylinder change or
every year (whichever comes
first)
Pressure Monitors
(Transducer,
Switch,
Transmitter,
Gauge)
Check pressure readings against the cylinder change
checklist pressure readings. If process gas pressure must
be adjusted, monitor the delivery pressure for a smooth
increase or decrease.
Every cylinder change
Verify zero.
Yearly
*Function Test Pressure Switches for safety critical
alarms. Where applicable, verify:
High pressure cylinder shutdown
High pressure delivery shutdown
Co-axial high/low pressure shutdown
Low pressure excess flow alarm
Every 2 years
Regulator
Check downstream pressure.
Daily
Toxics, Corrosives and Pyrophorics only: Visually
examine exterior of the regulator and connections for
signs of external leakage.
Annually
Excess Flow
Switch
* Test Excess Flow Switch.
Every 2 years
Safety Relief
Valves
* Test safety relief valves (or replace with new) to ensure
they relieve at manufacturer's specified pressure setting.
Replace any defective safety relief valves. Caution: Shut
down piping circuit and remove SRV before performing
test. Never intentionally overpressurize the system
components.
Corrosives: Every 3 years or
as dictated by local code
(whichever comes first)