Appendix L: Wafer-level reliability testing
Model 4200A-SCS Parameter Analyzer Reference Manual
L-16
4200A-901-01 Rev. C / February 2017
J-ramp test: qbd_rmpj User Module
The J-ramp test uses the
qbd_rmpj
user module of the
wlrlib
user library.
Usage
status
= qbd_rmpj(int
hi_pin
, int
lo_pin1
, int
lo_pin2
, int
lo_pin3
, char *
HiSMUId
,
char *
LoSMUId1
, char *
LoSMUId2
, char *
LoSMUId3
, double
v_use
, double
I_init
,
double
I_start
, double
F
, int
t_step
, double
exit_volt_mult
, double
I_max
,
double
q_max
, double
area
, double *
V_stress
, int
V_size
, double *
I_stress
, int
I_size
, double *
T_stress
, int
T_size
, double *
q_stress
, int
q_size
, double
*
Q_bd
, double *
q_bd
, double *
v_bd
, double *
I_bd
, double *
t_bd
, int
*
failure_mode
, int *
test_status
);
Input variables
status
Returned values are placed in the Analyze sheet
hi_pin
High pin (usually the gate pin) (-1 to 72); enter -1 to not connect
lo_pin1
lo_pin2
lo_pin3
Usually for source drain and substrate connection; depending on device structure,
some of those pins are optional; enter -1 to not connect
HiSMUId
ID string of the SMU outputting the stress
LoSMUId1
LoSMUId2
LoSMUId3
ID string of the SMU connected to ground terminal; these three IDs can be same
v_use
Oxide voltage (V) under normal operating conditions; typically the power supply
voltage of the process; this voltage is used to measure pre- and post-voltage ramp
oxide current (Ref. JESD35-A)
I_init
Oxide breakdown failure current when biased at
v_use
; typical value is 10
μA/cm
2
and may change depending on oxide area; see
Details
I_start
Starting current (A) for current ramp; typical value is
I_init
(Ref. JESD35-A)
F
Current multiplier between two successive current steps (Ref. JESD35-A)
t_step
Current ramp step time (s) (Ref. JESD35-A)
exit_volt_mult
Multiplier factor of successive voltage measurements; when the next measured
voltage is below this factor multiplying the previous measured voltage, oxide is
considered to be at breakdown and the test will exit; typical value 0.85
I_max
Maximum ramp current (A) (Ref. JESD35-A)
q_max
Maximum accumulated oxide charge per oxide area; used to terminate a test where
breakdown occurs but was not detected during the test (C/cm
2
) (Ref. JESD35-A)
area
Area of oxide structure (cm
2
)
V_size
Size of data array; maximum 65535
I_size
Size of data array; maximum 65535
T_size
Size of data array; maximum 65535
q_size
Size of data array; maximum 65535
