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Appendix G: Using a Cascade Microtech PA200 Prober 

Model 4200A-SCS Parameter Analyzer Reference Manual 

 

G-14 

4200A-901-01 Rev. C / February 2017 

 

2.  From the ProberBench NT window, select the 

WaferMap

 file. 

Figure 649: ProberBench NT window 

 

 

3.  From the WaferMap window, select and open the appropriate file. 

 

Load, align, and contact the wafer 

Using the ProberBench NT computer: 

1.  From the WaferMap Chuck menu, select 

Load Position

. This brings the chuck to the front of the 

prober. 

Figure 650: Chuck menu 

 

 

Summary of Contents for 4200A-SCS

Page 1: ...Reference Manual 4200A 901 01 Rev C February 2017 P4200A 901 01C 4200A 901 01C Model 4200A SCS Parameter Analyzer www tek com keithley...

Page 2: ...d All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments Other brand names are trademarks or registered trademarks of their respective holders Actuate C...

Page 3: ......

Page 4: ...s may be connected to mains These instruments will be marked as category II or higher Unless explicitly allowed in the specifications operating manual and instrument labels do not connect any instrume...

Page 5: ...ead the associated information very carefully before performing the indicated procedure The CAUTION heading in the user documentation explains hazards that could damage the instrument Such damage may...

Page 6: ...ew 2 13 Test equipment connections 2 17 Recommended connecting cables 2 18 Test fixture and device under test DUT connections 2 18 Prober connections 2 20 Configuring safety interlock operation 2 20 C...

Page 7: ...g 3 23 Local and remote sensing 3 27 Sink overview 3 30 Source measure considerations 3 31 Sweep concepts 3 34 Operation mode timing diagrams 3 36 Multi frequency capacitance voltage unit 4 1 Introduc...

Page 8: ...73 MOSFET Project mosfet 4 80 Nanowire tests 4 86 Diode Project diode project 4 88 Solar Cell Project solarcell 4 93 Demo project default 4 100 Carbon Nanotube Transistor Characterization Project cnt...

Page 9: ...s 5 46 Basic troubleshooting procedure 5 48 Step 1 Verify prober connections from the PMU or RPM to the DUT 5 48 Step 2 Verify the pulse shape 5 49 Step 3 Is the pulse level correct for each channel 5...

Page 10: ...s 6 142 Configure a complex test 6 143 Test and terminal settings 6 143 Step or sweep multiple device terminals in the same test 6 144 Configure actions 6 146 Configure sites 6 147 Configure subsite c...

Page 11: ...45 SUMMV Formulator function 6 246 Line Fits 6 247 EXPFIT Formulator function 6 247 EXPFITA Formulator function 6 248 EXPFITB Formulator function 6 249 LINFIT Formulator function 6 250 LINFITSLP Formu...

Page 12: ...t function 6 291 SIN Calc worksheet function 6 292 SINH Calc worksheet function 6 292 SQRT Calc worksheet function 6 293 STDEVP Calc worksheet function 6 293 SUM Calc worksheet function 6 294 SUMSQ Ca...

Page 13: ...6 334 3 terminal NPN BJT tests 6 334 Resistor tests 6 335 Diode tests 6 335 Capacitor tests 6 335 Testing flash memory 6 336 Flash connection guidelines 6 337 Programming and erasing flash memory 6 3...

Page 14: ...brace area 8 3 Understanding the Tab area 8 3 Understanding the status bar 8 8 Understanding the menus 8 9 Develop and use user libraries 8 13 Copy user libraries and modules from a 4200 SCS 8 13 Enab...

Page 15: ...9 12 GPIB command reference 9 13 System mode commands 9 13 User mode commands US 9 39 Commands common to system and user modes 9 43 4200A command set only commands 9 48 Ethernet command reference 9 4...

Page 16: ...full arb 10 9 Custom Arb file operation Select and configure waveforms 10 10 Custom Arb file operation Copy waveforms into Sequencer 10 11 Custom Arb file operation Load waveform and turn on output 1...

Page 17: ...12 8 Multiple SMU stability considerations 12 9 Eliminating oscillations 12 10 Low current measurements 12 11 Leakage currents 12 11 Generated currents 12 12 Voltage burden 12 14 Noise and source impe...

Page 18: ...elete 13 30 kspdefint 13 31 ksprcv 13 32 kspsnd 13 32 PostDataDouble 13 33 PostDataInt 13 34 PostDataString 13 35 rdelay 13 35 rtfary 13 36 savgX 13 36 scnmeas 13 38 searchX 13 38 setmode 13 42 sintgX...

Page 19: ...ges 13 113 pulse_remove 13 115 pulse_sample_rate 13 116 pulse_source_timing 13 116 pulse_step_linear 13 118 pulse_sweep_linear 13 120 pulse_train 13 123 rpm_config 13 124 seg_arb_sequence 13 125 seg_a...

Page 20: ...182 setmode 4210 CVU 13 182 smeasf 13 184 smeasfRT 13 185 smeast 13 186 smeastRT 13 187 smeasv 13 188 smeasvRT 13 189 smeasz 13 189 smeaszRT 13 191 sweepf 13 192 sweepv 13 193 Programming examples 13...

Page 21: ...switch cards to mainframe slots A 28 Step 7 Set matrix card properties A 29 Step 8 Save configuration A 30 Step 9 Close KCon and open Clarius A 30 Switch matrix control example A 30 Set up and run a s...

Page 22: ...ters D 24 Optimal C V measurement parameters D 24 Determining the optimal delay time D 26 Correcting residual errors D 28 ki82ulib user library D 29 Abortmodule82 D 29 CableCompensate82 user module D...

Page 23: ...PrInit F 11 PrChuck F 12 PrSSMovNxt F 13 PrMovNxt F 14 Tutorial Control a probe station F 15 Test system connections F 16 KCon setup F 16 Test flow F 17 Using a Cascade Microtech PA200 Prober G 1 Casc...

Page 24: ...rober I 1 Using a manual or fake prober software I 1 Manual prober overview I 1 Fake prober overview I 2 Modifying the prober configuration file I 3 Probesites Clarius project example I 4 Use KCon to...

Page 25: ...CM500 K 12 Use KCon to add a prober K 12 Clarius project example K 13 Probesites Clarius project example K 16 Probesubsites Clarius project example K 18 Commands and error symbols K 19 Wafer level re...

Page 26: ...urnished with embedded measurement expertise and hundreds of ready to use application tests Clarius enables you to dig deeper into your research with speed and confidence The following topics introduc...

Page 27: ...ons for a test are provided by up to eight source measure units SMUs Test capabilities are extended by support of a variety of external components Pulse source and measure tests can be provided by the...

Page 28: ...amplifiers are ordered the 4200A SCS will be shipped from the factory with the preamplifiers installed on the rear panel of the mainframe The preamplifiers can be removed from the rear panel and mount...

Page 29: ...rol Interface KXCI KXCI allows you to use an external computer to remotely control 4200A SCS SMUs over the GPIB bus or ethernet Keithley Pulse Application KPulse A non programming alternative to confi...

Page 30: ...signal limits The 4200A SCS is provided with an interlock circuit that must be positively activated in order for the high voltage output to be enabled The interlock helps facilitate safe operation of...

Page 31: ...fects caused by electrostatic interference parasitic capacitance system leakage currents and so forth If the device is to be shielded but not guarded connect the DUT shield to COMMON see the next figu...

Page 32: ...Model 4200A SCS Parameter Analyzer Reference Manual Section 2 Connections and configuration 4200A 901 01 Rev C February 2017 2 3 Figure 3 Device shielding basic circuit Figure 4 Device guarding...

Page 33: ...induced leakage currents Avoid stresses in cables Do not allow large portions to hang under their own weight Place on a table or flat surface if possible Avoid tight bends in the cables Refer to Maint...

Page 34: ...ext figure shows typical SMU connections using local sensing Use a triaxial cable such as the 4200 MTRX X to make your connections as follows Connect SMU FORCE center conductor of FORCE terminal to DU...

Page 35: ...for SMUs The next figures show the basic device connections to the 4200A SCS rear panel independent of the device mounting test fixtures and probers Figure 8 Two terminal device connections to SMUs an...

Page 36: ...method used depends on the mounting method rear panel or remote See Preamplifier mounting on page 3 16 for details Turn off the system and disconnect the power cord before connecting or disconnecting...

Page 37: ...al As a result all SMU measurements are made relative to GNDU SENSE which by default is connected to COMMON Although the ground unit is intended for circuit COMMON connections when using multiple SMUs...

Page 38: ...ns The next figure shows a typical remote sense connection scheme using two SMUs two DUTs and the ground unit Make connections as follows Connect the SMU FORCE and SENSE signals to the two DUT HI term...

Page 39: ...ense connection scheme using two preamplifiers two DUTs and the ground unit Make connections as follows Connect the two preamplifier FORCE signals to the two DUT HI terminals Connect both DUT LO termi...

Page 40: ...to the two DUT HI terminals Connect both DUT LO terminals together and connect the GNDU SENSE and FORCE signals to the common DUT LO connection point Using the ground unit with more than two SMUs The...

Page 41: ...MON is not hardwired to any of the DUT terminals Therefore the SMUs must be able to internally connect circuit COMMON to their FORCE signal when the test requires a DUT terminal to be connected to COM...

Page 42: ...configuration The basic SMU circuit configuration is shown in the next figure The SMU is essentially a voltage or current source in series with a current meter connected in parallel with a voltage met...

Page 43: ...ic information about these terminals is summarized below Asserting the interlock allows the SMU and preamplifier terminals to become hazardous exposing the user to possible electrical shock that could...

Page 44: ...r used to apply the SMU SENSE LO signal to the DUT in a full Kelvin remote sense application The center pin is SENSE LO The inner shield is SENSE GUARD The outer shield is circuit COMMON Nominal inter...

Page 45: ...ocally FORCE terminal The FORCE terminal is a miniature triaxial connector used to apply the SMU FORCE signal to the DUT when a preamplifier is not being used The center pin is FORCE The inner shield...

Page 46: ...1 Rev C February 2017 2 17 Figure 23 Basic SMU and preamplifier source measure configuration Test equipment connections The various forms of test equipment that can be used with the 4200A SCS include...

Page 47: ...est fixture DIP triaxial cables LR 8028 Component test fixture optimized for device testing up to 200 V 1 A Mini jumpers Asserting the interlock allows the SMU and preamplifier terminals to become haz...

Page 48: ...ng with less than 20 V follow these standard industry practices Use a metal test fixture Connect the metal fixture to COMMON Mount the DUT on high resistivity terminals for example Teflon Guarding wil...

Page 49: ...be higher when the exterior enclosure of the test fixture is closed Connect the exterior enclosure to COMMON or safety ground using 16 AWG wire or greater Ensure that the wiring FORCE GUARD and SENSE...

Page 50: ...t electrical shock that could cause injury or death never make or break connections to the 4200A SCS while the instrument is powered on Turn off the equipment from the front panel or disconnect the ma...

Page 51: ...us is running Refer to Clarius on page 6 2 for more information about Clarius When operating as a controller the 4200A SCS reserves primary address 0 making that address unavailable to GPIB subordinat...

Page 52: ...for continuous pulse output or set to output a finite number of pulses burst or trig burst triggering modes The pulse amplitude can be set from 100 mV to 40 V The pulse period can be set from 20 ns t...

Page 53: ...ch channel of a pulse card can be configured for standard pulse output The next figure shows an example of standard pulse output A pulse card is a dual channel pulse generator Each channel can output...

Page 54: ...itch matrices the 4200A CVIV Multi Switch external GPIB instruments and probe stations you must configure the system so that Clarius and KXCI can use these resources Also if you need remote operation...

Page 55: ......

Page 56: ...measure unit SMU with 4200 PA overview on page 3 11 Details how the 4200 PA extends 4200 SMU and 4210 SMU dynamic range and describes basic circuit configurations operating boundaries connectors and m...

Page 57: ...erview Basic SMU circuit configuration The basic SMU circuit configuration is shown in the next figure The SMU is essentially a voltage or current source in series with a current meter connected in pa...

Page 58: ...When a SMU is acting as a current source the voltage is clamped at the compliance value conversely the current is clamped at the compliance value when the SMU is acting as a voltage source When a SMU...

Page 59: ...A Voltage sourced by the instrument 10 V DUT resistance 10 With a source voltage of 10 V and a DUT resistance of 10 the current through the DUT should be 10 V 10 1 A However because compliance is set...

Page 60: ...The actual maximum output magnitudes of the 4200 SMU are 105 mA 21 V and 10 5 mA 210 V Note that the boundaries are not drawn to scale Figure 31 4200 SMU and 4200 PA operating boundaries 4210 SMU sour...

Page 61: ...operation is covered operation in the other three quadrants is similar As shown in the next figure the 4200 SMU can output up to 105 mA at 21 V or 10 5 mA at 210 V The 4210 SMU can output up to 1 05 A...

Page 62: ...tion The following figure shows what happens if the resistance of the load is increased to 8 k The DUT load line for 8 k intersects the 40 V voltage compliance limit line placing the SMU in compliance...

Page 63: ...mum source value possible for the selected voltage source range For example the voltage source limit line is at 21 V for the 20 V source range The current compliance limit line represents the actual c...

Page 64: ...liance limit line which places the SMU in compliance In compliance the SMU cannot source its programmed voltage 50 V For the 8 k DUT the SMU will only output 40 V at the 5 mA limit Notice that as resi...

Page 65: ...terminals are shown in the next figure Basic information about these terminals is summarized below Refer to the Basic source measure connections on page 2 1 topic for additional information regarding...

Page 66: ...is a miniature triaxial connector used to apply the SMU SENSE LO signal to the DUT in a full kelvin remote sense application The center pin is SENSE LO the inner shield is SENSE GUARD and the outer s...

Page 67: ...asic SMU and preamplifier source measure configuration Compliance limit for a SMU with a 4200 PA A current limit can be programmed for a SMU with a 4200 PA when it is sourcing voltage However a voltag...

Page 68: ...operating boundaries in the next figure the 100 mA 20 V and 10 mA 200 V magnitudes are nominal values The actual maximum output magnitudes of the 4200 SMU and 4200 PA are 105 mA 21 V and 10 5 mA 210 V...

Page 69: ...make sure to use devices and cables that have ratings for the sourced voltages Otherwise they will not properly insulate the external connections to the instrument and pose a shock hazard SMU and prea...

Page 70: ...it SENSE signal is connected to a DUT all SMU preamplifier measurements will be made relative to this DUT connection The SENSE terminal does not need to be connected to the DUT for the SMU to operate...

Page 71: ...ty As shipped any 4200 PA units ordered with the 4200A SCS are factory mounted on the rear panel Do not remove the preamplifiers from the 4200A SCS unless they are to be mounted at a remote site The p...

Page 72: ...r panel A mounting bracket provides extra support for all the preamplifiers as shown in the next figure If you remove the preamplifiers to mount them at a remote site ensure that you install the screw...

Page 73: ...s must be able to internally connect circuit COMMON to their FORCE signal when the test requires a DUT terminal to be connected to COMMON The next figure shows typical SMU connections using three SMUs...

Page 74: ...ics describe Basic circuit configurations Connectors Basic characteristics The ground unit shown in the next figure provides convenient access to circuit COMMON which is the measurement ground signal...

Page 75: ...connected to a DUT all measurements will be made relative to this DUT connection Figure 51 Ground unit connections Ground unit DUT connections The next figure shows the connections necessary to use th...

Page 76: ...ge between circuit COMMON and chassis ground is 32 VDC FORCE terminal The FORCE terminal is a standard triaxial connector used as a return path for the SMU or preamplifier FORCE current The center pin...

Page 77: ...COMMON Normally a link is connected between ground unit COMMON and chassis ground but it may be necessary to remove the link to avoid measurement problems caused by ground loops or electrical interfer...

Page 78: ...vides a buffered voltage that is at the same level as the FORCE or SENSE HI voltage GUARD for both SOURCE and SENSE are the same signal that is referenced in FORCE In the absence of a driven guard lea...

Page 79: ...25 Figure 56 GUARD connections Guarding concepts Guarding is especially important with high impedance circuits Consider the comparison of the unguarded and guarded circuits shown in the next figures...

Page 80: ...connected to a guard plate or shield that surrounds the DUT The center conductor of the cable is used for FORCE or SENSE the inner shield is used for GUARD and the outer shield is COMMON To provide pr...

Page 81: ...ing the low current or high resistance measurement of the DUT Figure 59 Test fixture unguarded In the following figure the driven GUARD is connected to the metal guard plate for the insulators Since t...

Page 82: ...ted to the DUT SMU FORCE and Ground Unit FORCE COMMON as shown in the following figure Figure 61 Local sensing With remote sensing both SENSE terminals are connected to the DUT along with both FORCE t...

Page 83: ...across the device VDUT The SMU then measures the voltage across the DUT VM through the same set of test leads If you are measuring low impedance DUTs the local sensing method may give inaccurate resu...

Page 84: ...flow through these sense cables it is usually negligible typically pA or less and can generally be ignored Since the voltage drop across the sense cables is negligible the voltage actually measured by...

Page 85: ...U that is sourcing 12 V is connected to the first SMU programmed for 10 V sink operation for the first SMU will occur in the second quadrant source V and measure I When using the I Source as a sink al...

Page 86: ...ext figure Actual boundaries are 210 V at 105 mA or 21 V at 1 05 A Figure 66 4210 SMU and 4200 PA operating boundaries Source measure considerations When configured to source current I Source the SMU...

Page 87: ...ation Source V measure I or V When configured to source voltage V Source as shown in the next figure the SMU functions as a low impedance voltage source with current limit capability and can measure c...

Page 88: ...e voltage compliance higher than the measured voltage For measure I set the current compliance higher than the measured current In the following figure the SMU is configured to measure voltage only by...

Page 89: ...y phase of the SDM cycle which is programmed by software allows the source and external circuitry to settle before the measurement is performed Although the source itself settles quite quickly provide...

Page 90: ...n a log scale with a specified number of steps per decade The custom sweep lets you construct your own sweep by specifying the number of measure points and the source level at each point An SDM cycle...

Page 91: ...e Manual 3 36 4200A 901 01 Rev C February 2017 Operation mode timing diagrams The following figure shows source measure timing for a test system using three SMUs It shows basic timing between the thre...

Page 92: ...Us in the test system are synchronized Therefore the Measure Time MT for the SMU requiring the longest measure time is the same for all SMUs in the test system Sampling Mode timing diagram The followi...

Page 93: ......

Page 94: ...0 V Measurement overview The 4210 CVU makes AC impedance measurements ZDUT of the device under test DUT by sourcing an AC test voltage across the device and measuring the resulting AC current and AC v...

Page 95: ...he time domain of the AC current and AC voltage must be processed into the frequency domain to produce the phasor form of the DUT impedance The capacitive impedance and conductance are calculated base...

Page 96: ...vailable to measure current are 1 A 30 A or 1 mA With autorange selected range selection is done automatically DC bias function and sweep characteristics The AC test signal can be biased with a static...

Page 97: ...7 for details on the bias and sweep functions Force measure timing Timing diagrams for the force measure process for bias and sweep functions are shown in the next two topics Bias function timing You...

Page 98: ...you have the 4210 CVU Prober Kit you also have four 3 m SMA cables Connection notes Use only the supplied red SMA cables for connections to the 4210 CVU Do not use a mix of cable lengths on different...

Page 99: ...following figure Use the supplied torque wrench to tighten the SMA connections to 8 in lb Figure 81 Measurement circuit simplified The next figure shows typical connections to a DUT installed in a tes...

Page 100: ...guard disconnected In most applications the 7078 TRX BNC is the preferred adaptor Figure 83 Typical connections to a probe card The shields of the SMA cables must be connected together and extended a...

Page 101: ...t includes two types of BNC to triaxial adapters that connect directly to the rows of the matrix The 7078 TRX BNC has the guard connected to the inner shield of the adapter The 7078 TRX GND has the gu...

Page 102: ...onnections for remote 4 wire sensing Figure 85 Test connections for a switch matrix remote 4 wire sensing The 7078 TRX BNC adapters must be used in order to extend SMA shielding through the matrix car...

Page 103: ...e available to any project that uses a CVU Update connection compensation any time the connection setup is changed or disturbed Changes in temperature or humidity do not affect connection compensation...

Page 104: ...s and other hardware connections connected to the device under test in the test circuit The probes must be lifted up or the device must be removed from the test fixture To generate open connection com...

Page 105: ...A cables part number CA 446 that are supplied with the 4200 CVU Prober Kit You can also use this setting if you are using a switching matrix Custom Cable length coefficients are measured by the user u...

Page 106: ...A known short is connected to the CVU terminals through all the cables adaptors and probes that may be in the test circuit You can make a short at the wafer level by shorting all probes together To g...

Page 107: ...cables part number CA 446 that are supplied with the 4200 CVU Prober Kit You can also use this setting if you are using a switching matrix Custom Cable length coefficients are measured by the user us...

Page 108: ...est connections for a switch matrix on page 4 7 2 In Clarius select Tools The Clarius Tools dialog box opens Figure 92 Clarius Tools dialog box 3 Select CVU Connection Compensation Figure 93 CVU Conne...

Page 109: ...Next to Measure Load enter the value of the load in ohms 9 Select Measure Load 10 Follow the instructions 11 Select OK Compensation data You can view the compensation data Clarius lists R and jX compe...

Page 110: ...on values can be gathered using the CVU Connection Compensation option in Tools or through actions and user modules To enable compensation 1 Select the test from the project tree 2 Select Configure 3...

Page 111: ...are The cable lengths on the CVU terminals are not the same HPOT or LPOT terminals were disconnected Excessive noise on the LPOT terminal High frequency sources Physical cable lengths do not match the...

Page 112: ...you want to test 5 Select Run The results for the selected parameters are displayed at the top of the dialog box Confidence Check Confidence Check is a diagnostic tool that allows you to check the int...

Page 113: ...For the short check close the matrix switches to connect the CVU to the DUT or short For the open check also close the matrix switches but lift the probes or disconnect the DUT 2 In Clarius select To...

Page 114: ...described in Typical 4210 CVU test connections to a DUT on page 4 6 In this test you sweep the DC bias from 5 V to 5 V in 0 2 V steps with a 1 MHz capacitance measurement made at each step Select a p...

Page 115: ...el 4200A SCS Parameter Analyzer Reference Manual 4 22 4200A 901 01 Rev C February 2017 6 Select Create You are prompted to replace the existing project 7 Select Yes The project is displayed in the pro...

Page 116: ...cap test which measures the capacitance as a function of a linear voltage sweep of a capacitor Configure the cv cap test 1 In the project tree select the cv cap test 2 Select Configure The key parame...

Page 117: ...in the figure below 3 To export the data select Save Data 4 To save the information in the Run sheet select Save Sheet The information is saved in a Microsoft Excel spreadsheet format 5 To save the i...

Page 118: ...ollowing Terminal Settings for CVH1 Operation Mode Voltage Bias Presoak 5 V DC Bias 1 V Frequency 100 kHz Parameters Cp Gp Compensation as needed When this test is run the following force measure sequ...

Page 119: ...e built in system delay and sweep delay the 4210 CVU makes a measurement The AC test signal is applied before the start of the measurement AC drive is turned off after the measurement is made 4 Steps...

Page 120: ...unit 4200A 901 01 Rev C February 2017 4 27 Figure 106 CVU voltage sweep output CVU using voltage list sweep This figure shows an example of the Advanced Terminal Settings dialog box when CVU Voltage L...

Page 121: ...point in the sweep to allow the device to charge up to equilibrium before measurements begin 2 The DC bias goes to the first sweep point voltage 3 After the built in system delay and sweep delay the...

Page 122: ...ce goes to the Presoak voltage of 5 V for the hold time 2 The DC bias goes to 1 V for the system delay and sweep delay times and remains on during the frequency sweep 3 The CVU makes a measurement for...

Page 123: ...e following source measure sequence occurs 1 The DC source goes to the presoak voltage of 1 V 2 After the hold time DC bias goes to 0 V 3 After the system delay and the sweep delay the 4210 CVU makes...

Page 124: ...als Settings pane then select Advanced By default AC source voltage is applied to the CVH1 terminal and the current measurement is made at the CVL1 terminal Also by default the DC source voltage bias...

Page 125: ...sources AC drive voltage to the CVH1 terminal and sources DC bias voltage to the CVL1 terminal AC current is measured at CVL1 Figure 115 ACV source applied to CVH1 and DC bias applied to CVL1 The fol...

Page 126: ...age 4 64 Determines generation velocity and lifetime testing Zerbst plot of MOS capacitors Performs both C V and C t sweeps and then generates a Zerbst plot which is the generation rate plotted as a f...

Page 127: ...iciency The SMU also makes a reverse biased I V measurement and performs C V and C f sweeps default on page 4 100 Summarizes the C V tests that have been added to the default project C V testing for a...

Page 128: ...Rows G and H with the 7072 cap iv cv matrix project summary This project tests a capacitor by measuring leakage current using a 4200 SMU and capacitance using the 4210 CVU These tests generate graphs...

Page 129: ...the 4210 CVU Be sure that all used SMA cables are the same length Use triaxial cables to connect the matrix cards columns 1 and 2 to the capacitor or prober card Use the supplied triaxial cables to co...

Page 130: ...of time Force measure and timing settings The parameter settings for the two SMUs are SMU1 is configured to bias 5 V and perform 60 current measurements at 100 ms intervals SMU2 is configured as a Com...

Page 131: ...191 AVG_CAP Formulator calculation result STD_DEV Formulator calculation result AB Terminal A to Terminal B BJT Capacitance Tests cvu bjt The internal capacitance measurements on bipolar junction Tra...

Page 132: ...0 the emitter terminal is guarded by connecting it to the outer shield of the SMA cables Refer to Typical 4210 CVU test connections to a DUT on page 4 6 for connection details Use only the supplied re...

Page 133: ...the capacitance as a function of time between the collector and base terminals of a BJT at 0 V The results C versus t are then plotted on a graph This test also calculates the average capacitance and...

Page 134: ...easurement status on page 6 191 STD_DEV Calculated value the standard deviation of the capacitance measurements AVG_CAP Calculated value the average capacitance in farads F c be0 test This test measur...

Page 135: ...BJT Capacitance collector base c cb0 This test measures the capacitance as a function of time between the collector and base terminals of a BJT at 0 V The results C versus t are then plotted on a grap...

Page 136: ...Zener diode using the CVU SMU and 4205 RBT remote bias tee MOS Capacitor High Voltage C V Sweep hvcv moscap Enables a high voltage C V sweep on a MOS capacitor using the CVU SMU and the 4205 RBT remo...

Page 137: ...xample of the construction of a MOS capacitor is shown in the next figure As shown the MOS capacitor is an oxide placed between a semiconductor and a metal gate The semiconductor and the metal gate ar...

Page 138: ...ion occurs at positive polarities The inversion region occurs at negative polarities Accumulation region For a p type MOS capacitor the accumulation region of the C V curve is observed when negative v...

Page 139: ...carriers toward the gate Again because the oxide is a good insulator these minority carriers accumulate at the substrate to oxide well to oxide interface The accumulated minority carrier layer is call...

Page 140: ...ections to the 4210 CVU Be sure that all SMA cables are the same length After making or changing connections be sure to use the Confidence Check diagnostic tool and do connection compensation tests Re...

Page 141: ...MAX DEPTHM 2 DEBYEM SQRT LN ABS N90W NI 0 95 MAX DEPTHM 2 Formula BEST_LO Formula name BEST_LO Units None Description Index from DEPTHM array that is three Debye lengths from the surface Formulator e...

Page 142: ...COX Formula name COX COX Units F Description Oxide capacitance usually set to maximum capacitance in accumulation Formulator entry COX MAX MAVG CADJ 10 1E 15 Formula DEBYEM Formula name DEBYEM Units m...

Page 143: ...AXINVSQR Units 1 F2 Description Finds row position of maximum point on 1 C2 curve Formulator entry MAXINVSQR MAXPOS INVCSQR Formula N90W Formula name N90W Units None Description Doping density at 90 o...

Page 144: ...SQR DELTA DCV_GB Simplified equation Formula NSLOPE Formula name NSLOPE Units None Description Finds slope of 1 C2 curve Formulator entry NSLOPE LINFITSLP DCV_GB INVCSQR VFBPOS MAXINVSQR Formula NSUB...

Page 145: ...fied equation Formula RS Formula name RS RS Units Description Series resistance calculated from capacitance Formulator entry RS AT MAVG GP_GB 5 2 PI F_GB MAVG CP_GB 5 MAXPOS MAVG CP_GB 5 2 1 AT MAVG G...

Page 146: ...la VFBPOS Formula name VFBPOS Units None Description Finds row position of flatband voltage Formulator entry VFBPOS FINDD DCV_GB VFB 2 Formula VTH Formula name VTH VTH Units V Description Threshold vo...

Page 147: ...sweep test This test makes a capacitance measurement at each step of a user configured linear voltage sweep Using the acquired C V data the Formulator calculates parameters including oxide capacitance...

Page 148: ...cates donors The substrate doping concentration is extracted from the slope of the 1 C2 curve and is displayed on the graph The doping concentration is the result of the NSUB Formulator calculation In...

Page 149: ...is called DEPTHM in the Formulator is computed from the high frequency capacitance and the oxide capacitance at each measured value of the gate voltage from Nicollian and Brews p 186 see References on...

Page 150: ...rt a measured C V curve Without series compensation capacitance can be lower than normal and C V curves can be distorted Tests for this project compensate for series resistance using the simplified 3...

Page 151: ...p Gp In this project these formulas have been added into the Clarius Formulator so the capacitance and conductance can be automatically compensated for the series resistance Extracting MOS device para...

Page 152: ...alue of the flatband capacitance CFB is calculated using equations below Once the value of CFB is known the value of VFB can be obtained from the C V curve data by interpolating between the closest ga...

Page 153: ...urned on the channel formed corresponds to strong generation of inversion charges It is these inversion charges that conduct current When a source and drain are added to a MOS capacitor to form a MOSF...

Page 154: ...ame for B is PHIB k Boltzmann s constant 1 3807 x 10 23 J K T Test temperature K q electron charge 1 60219 x 10 19 coulombs NBULK bulk doping cm 3 note that the Formulator name for NBULK is N90W Ni in...

Page 155: ...is 1 for p type materials and 1 for n type materials the value for DopeType is changed in the Constants area of the Formulator For example for a MOS capacitor with an aluminum gate and p type silicon...

Page 156: ...S metal semiconductor work function V QEFF effective oxide charge C COX oxide capacitance F Note that COX here is per unit of area So that Where QEFF effective oxide charge C COX oxide capacitance F W...

Page 157: ...and then biased into deep depletion While holding this bias the capacitance is measured as a function of time The results of the derived parameters COX CMIN NAVG from the C V sweep are integrated wit...

Page 158: ...he c v test are needed for the gni w wf test You must manually input the results into the Formulator for the gni w wf test When configuring the project you must input the area of the gate in units of...

Page 159: ...ES AREA 1 CP_GB 1 COX WF Simplified equation Constants Constant Default value Units Description AREA 0 010404 cm 2 Gate area of device DOPETYPE 1 none 1 P type 1 N type EBG 1 12 eV EBG Semiconductor e...

Page 160: ...lation by applying a negative hold voltage for a period hold time The bias voltage is then reversed to drive the capacitor into depletion While in depletion a series of capacitance measurements are ma...

Page 161: ...pth w wF You must manually input the values of COX CMIN and NAVG taken from the cv test into the Formulator in order to calculate the generation rate and depletion depth Note that a known value of NAV...

Page 162: ...th value of measured C t capacitance F COX oxide capacitance F COX is calculated with the result placed in the Analyze sheet when the C V test is run The value for this parameter must be input into t...

Page 163: ...tes how you can use a 4200A CVIV Multi Switch to automate I V and C V testing of a MOSFET When the project is run the 4200A CVIV connects four SMUs to the MOSFET The SMUs perform I V tests on the MOSF...

Page 164: ...etails Figure 128 Basic configuration to test a MIM capacitor Formulas and constants This project uses one formula with no constants NOISE Calculates the standard deviation of the capacitance measurem...

Page 165: ...These measurements are usually measured between two metal pads on the wafer The magnitude of capacitance is usually very small 1 pF This test uses a voltage sweep to measure capacitance at every step...

Page 166: ...le charge in the oxide of a MOS capacitor is the bias temperature stress BTS method Using this method the flatband voltage Vfb is used to determine the amount of charge The flatband voltage is measure...

Page 167: ...e of ions Typical temperature stress time is around five to 10 minutes The device is cooled to room temperature with the bias voltage applied Mobile charges will be trapped near the metal oxide interf...

Page 168: ...le ion charge through the following equation Where Nmi mobile ion concentration Qm mobile ion charge C q electron charge moscap mobile ion connections The next figure shows the basic test configuratio...

Page 169: ...the cv vfb1 test you must also update the AREA_GATE formula in the Formulator This formula is used in the calculation of the mobile ion charge in the subsite Calc sheet This project must be run from...

Page 170: ...then to cool down the sample After the temperature stress select OK to generate the C V sweep in the following test The bias voltage is output until you select OK cv vfb2 test This test performs a C...

Page 171: ...heet The test data is displayed in the Analyze sheet Time Timestamp for each measurement Cp_GB Measured parallel capacitance Gp_GB Measured conductance DCV_GB Forced DC bias voltage F_GB Forced test f...

Page 172: ...n the mobile ion calculation To open the Calc sheet for the subsite 1 In the project tree select mobileion 2 Select Analyze 3 Select the Calc tab Figure 132 Calc sheet for the subsite level MobileIon...

Page 173: ...nd CGS is important because it creates the charges necessary for operating the devices This gate channel capacitance depends on the applied voltage and the operating region Capacitance measurements ar...

Page 174: ...ing concentration versus depletion depth graph The doping concentration N is calculated and plotted as a function of depletion depth Depletion depth is calculated by the DEPTHM formula in the Formulat...

Page 175: ...mula AR Formula name AR aR Units None Description Intermediate parameter for calculation of corrected capacitance Formulator entry AR GP_GB GP_GB 2 2 PI F_GB CP_GB 2 RS Simplified equation Formula CAD...

Page 176: ...DEPTHM W Units m Description Depletion depth in meters Formulator entry DEPTHM 1E 2 AREA ES 1 COND POX MINPOS CADJ SUBARRAY CADJ POX MINPOS CADJ SUBARRAY CADJ MINPOS CADJ POX 1 COX_CALC Simplified equ...

Page 177: ...Description Doping density Formulator entry NDOPING ABS 2 AREA 2 Q ES DELTA COND POX MAXPOS INVCSQR SUBARRAY INVCSQR POX MINPOS CADJ SUBARRAY INVCSQR MINPOS CADJ POX DELTA DCV_GB Simplified equation...

Page 178: ...xide material F cm COX oxide capacitance F 1 x E7 units conversion from cm to nm Formula VFB Formula name VFB VFB Units V Description Flatband voltage Once CFB CFB is derived VFB is interpolated from...

Page 179: ...lt using proper techniques to reduce parasitic capacitance from affecting measurement accuracy is important These tests perform C V sweeps on a two terminal nanowire device The tests are similar but u...

Page 180: ...at 1 MHz on a nanowire device on a wafer or a discrete nanowire device It generates a C versus V graph cv sd test This test measures C V source to drain at 100 kHz on a nanowire device on a wafer or...

Page 181: ...ion is much more highly doped than the other side If this is the case the effects of the space charge region spreading into the more highly doped area can be ignored C V measurements on semiconductor...

Page 182: ...ilicon A area of junction cm2 W depletion width cm However unlike the parallel plate capacitor the depletion layer width W is not a constant but is dependent on the applied voltage From the previous e...

Page 183: ...e the same length After making or changing connections be sure to use the Confidence Check diagnostic tool and do connection compensation tests Refer to Confidence Check on page 4 19 and Connection co...

Page 184: ...fault Value Units Description AREA 0 0001 cm 2 Gate area of device ES 1 034e 12 F cm S Semiconductor permittivity cvsweep diode test This test measures the PN junction capacitance as a function of the...

Page 185: ...the x axis c 2vsv diode test Analyze sheet The test data is displayed in the Analyze sheet Cp_AC Measured parallel capacitance Gp_AC Measured conductance DCV_AC Forced DC bias voltage F_AC Forced tes...

Page 186: ...X maximum voltage VMAX short circuit current ISC open circuit voltage VOC and fill factor FF C V testing The Formulator calculates inverse capacitance INV_C and the doping density N I V testing genera...

Page 187: ...rformance See Source Measure Hardware on page 3 1 for details on 4200 SMU connections C V Testing See 4210 CVU connections on page 4 5 for details on connections Use only the supplied red 100 SMA cabl...

Page 188: ...s Formula CURR Formula name CURR Units A Description PV cell current The absolute value of the current output Formulator entry CURR ABS ANODEI Formula FF Formula name FF Units None Description Fill fa...

Page 189: ...AT ANODEI FINDD ANODEV 0 FIRSTPOS ANODEV Formula N Formula name N N a Units 1 cm3 Description Doping density Formulator entry N ABS 2 Q ES AREA 2 DIFF INV_C2 DCV_AC Simplified equation Where N a dopi...

Page 190: ...I V data where I 0 Formulator entry VOC AT ANODEV FINDU ANODEI 0 LASTPOS ANODEI Constants for the solarcell project Constant Default value Units Description AREA 8 cm 2 Gate area of device ES 1 034e...

Page 191: ...600 mV in 5 mV steps A total of 121 current measurements are made rev ivsweep Analyze sheet The test data is displayed in the Analyze sheet AnodeI Measured current AnodeV Forced voltage cvsweep solar...

Page 192: ...red conductance DCV_AC Forced DC bias voltage F_AC Forced test frequency CVU1S Status code for each measurement Rows highlighted in blue indicate a fault For details see Measurement status on page 6 1...

Page 193: ...ge The pulsed I V tests include pulsed Vds Id and pulsed Vgs Id The C V test includes a C V sweep test that measures the gate to drain capacitance as a function of the gate voltage of a CNTFET The tes...

Page 194: ...0 PGU and 4225 PMU The 4220 PGU Pulse Generator Unit and 4225 PMU Pulse Measure Unit are high speed pulse generator cards for the 4200A SCS In this section the 4220 PGU is referred to as a PGU and the...

Page 195: ...Pulse The Keithley Pulse KPulse on page 10 1 application supports the PGU The pulse source measure concepts covered in this section apply to the PGU and PMU The simplified circuits of the 4220 PGU and...

Page 196: ...des The PGU and PMU support the following pulse modes Standard pulse mode For this two level pulse mode the user defines a high and low level for the pulse output The test modes for standard pulse are...

Page 197: ...70 Waveform measurements and Waveform measurements with pre data and post data figures Waveform average A specific number of pulses are output for the burst sequence Waveform discrete measurements ar...

Page 198: ...per second However there is a limit to the number of samples one million that can be acquired per A D test When a test is configured to exceed that limit the sample rate is automatically lowered when...

Page 199: ...CVU capacitance voltage unit The next figure shows the modes for the RPM LED colors Note that the RPM LED shows the mode of the RPM but not the output status The output status of the 4200A SCS is ind...

Page 200: ...PM as a switch on page 5 8 for more information on switching The LEDs on the top panel see the previous figure indicate which card is connected to the output By default the RPM pulse mode is connected...

Page 201: ...RPM wiring diagram on page 5 7 figure shows the switches The next figure shows a typical test configuration for using an RPM as a switch for a PMU SMU and CVU In general one RPM per device terminal is...

Page 202: ...w of the sheet Therefore the number of samples acquired for a waveform must fit within the 4096 points The number of samples rows for a waveform that is 20 48 s wide is calculated as follows Number of...

Page 203: ...Common LO for the PMU is the outer shells of the two SMA connectors With an SMA cable connected see next figure common LO is the outside shield of the cable Figure 149 PMU common low terminals Because...

Page 204: ...ause distortions Higher capacitance in longer cables causes higher capacitive charging effects during the pulse transitions see PMU capacitive charging discharging effects on page 5 42 Only use the wh...

Page 205: ...nnel If possible do not measure from the PMU channel connected to the chuck For a two terminal device refer to Two terminal device connections on page 5 12 using figure Two terminal device connections...

Page 206: ...of a PMU as shown in the next figure In this case channel 1 will source pulse voltage and channel 2 will measure the resulting current Make sure you connect the shields of the SMA cables close to the...

Page 207: ...oth channels of a single PMU connected to a three terminal MOSFET is shown in the next figure In this example connect the gate terminal to channel 1 of the PMU and connect the drain terminal to channe...

Page 208: ...MUs are usually required The next figure shows the four PMU channels connected to a four terminal MOSFET This configuration enables you to have complete flexibility to enable pulsing and measuring at...

Page 209: ...a prober or test fixture that uses BNC connectors adapter C is not used Figure 154 Pulse card connections to triax prober or test fixture A White SMA cable 2 m 6 5 ft included with the PGU and PMU B...

Page 210: ...d channel Make sure to connect the RPM only to that PMU card and channel With system power off use the supplied RPM cable to connect a 4225 RPM to the matching RPM channel of the 4225 PMU see next fig...

Page 211: ...he Force output terminal of the RPM is connected to the DUT The Sense output terminal is not used The next figure shows local sense connections using the supplied adapter cable and adapters For the tw...

Page 212: ...200 series Model 4210 MMPC L Use this cable kit with a Lucas Signatone Wavelink series prober Model 4210 MMPC W Use this cable kit with the Wentworth prober For details on using these prober cable ki...

Page 213: ...ontrols the RPM based on the type of test pulse CV SMU RPM switching can only be controlled using the rpm_config on page 13 124 LPT function in a UTM Refer to Using the RPM as a switch on page 5 8 for...

Page 214: ...pulses or pulse voltages that will be applied to the device under test DUT When the actual test is running the actual number of pulses or pulse voltages may be different from the preview Enabling curr...

Page 215: ...st parameters In the Pulse Timing Preview there are two graphs The bottom graph labeled Entire Test shows the complete test This graph shows each sweep and step point for the entire test The graphed p...

Page 216: ...rameters Pulse Timing Preview and settings from the PMU Advanced Settings dialog box for each PMU channel in the test but only for the area specified by the cursor Figure 162 Six point pulse amplitude...

Page 217: ...oop PMU1 1 pulses the four steps of 1 V through 2 5 V in 0 5 V increments Operation modes and voltages for next figure PMU1 1 blue waveform PMU1 2 light blue waveform Operation modes Pulse Amplitude S...

Page 218: ...instead of Show All changes the preview of the waveform see next figure Each point in the step now uses three periods so there are three pulses shown in the Expanded View In the Expanded View the x a...

Page 219: ...the stepper with the number of pulses changed to three Notice that each sweep point of the displayed waveform in the figure has three pulses number of pulses set to three The light blue waveform in t...

Page 220: ...ch channel has a unique color and line width When the channels overlap narrower lines are shown on top of the wider lines To return to normal magnification double click the graph or select Refresh Mul...

Page 221: ...measure and pulse generator units Model 4200A SCS Parameter Analyzer Reference Manual 5 28 4200A 901 01 Rev C February 2017 Figure 166 Four channel sweep and step 2 pulse trains Figure 167 Zooming Exp...

Page 222: ...gure for a view of moving the lower graph using the mouse pointer Note the gaps between the pulse waveforms shown in the Expanded View zoom on page 5 27 figure gaps also exist in the next figure These...

Page 223: ...ou can correct errors caused by connections and cable length between the 4225 PMU and the device under test DUT by using connection compensation When connection compensation is enabled the default or...

Page 224: ...rting PMU Cable Compensation R Ohms PMU Cable Compensation complete value V and I measured Ohms calculated Any failures with the compensation process are reported as errors Maximum Ch x leakage curren...

Page 225: ...ox 4 Select Measure Short 5 Follow the on screen instructions or replace the DUT in the test fixture with a short The results are displayed when compensation is complete If an error occurred it is dis...

Page 226: ...u must enable connection compensation for the test To enable connection compensation 1 Select the test 2 Select Configure 3 Select the terminal to be compensated 4 In the right pane select Terminal Se...

Page 227: ...ce 50 and the other half which is the programmed pulse voltage appears across the 50 DUT For example if the pulse card is programmed to output a 5 V pulse the pulse card sources a 10 V pulse Five volt...

Page 228: ...xt figure The diagram shows that the PMU standard pulse source with measure uses a burst measure analyze reburst method This method allows for range changing threshold comparison load line effect comp...

Page 229: ...n tolerance specified or 2 maximum number of iterations is reached The maximum number of iterations must be equal for each channel in the test Coping with the load line effect There are several ways o...

Page 230: ...LLEC enabled and the green curves were generated with LLEC disabled The Vg was been increased for the green curves to provide separation between the curves Figure 174 Load line effect on FET family o...

Page 231: ...e 175 Curve showing poor LLEC compensation LPT functions used to configure LLEC The LPT functions used to configure LLEC for the PMU are pulse_load on page 13 145 Use this function to set the output i...

Page 232: ...4200A 901 01 Rev C February 2017 5 39 Enable LLEC This option is available for ITMs To enable LLEC 1 Select the pulse test 2 Select Configure 3 In the right pane select Terminal Settings 4 Select Adv...

Page 233: ...cal prober pin to pad resistance is 1 to 3 Poorer pin to pad contacts could be in the range from 10 to 15 The LLEC setting does not change the maximum output voltage or current of the PMU The V Max an...

Page 234: ...ow turns red and lists the unavailable ranges To access the PMU force measure options click FORCE MEASURE The Typical Minimum Timing Recommendations dialog box shows the recommended minimum pulse widt...

Page 235: ...d arrows seen during pulse transitions This setup shows a single channel of a PMU with the supplied 2 m 6 5 ft white SMA cable connected to the channel output Note that the other end of the SMA cable...

Page 236: ...o dV dt 0 Using channel 2 in this configuration is sometimes called low side measurement This measurement approach is useful when analysis of the current signal pulse transitions is required Figure 18...

Page 237: ...acitive charging effects during the pulse transitions see PMU capacitive charging discharging effects on page 5 42 Since the interconnect and the DUT always have some capacitance it is best to charge...

Page 238: ...rument cards see DUT resistance determines pulse voltage across DUT on page 5 61 the pulse instrument cards also have a limit for the number of large amplitude pulse transitions within a period of tim...

Page 239: ...art is the power required for the instruments while the 4200A SCS is idle turned on but not testing The second part is the power required by the instruments taking part in the test Note that medium po...

Page 240: ...2 273 508 2 This test has PowerTOTAL 500 so this test will not proceed Reduce the number of 40 V channels from five The next table shows the 4200A SCS power requirements for valid combinations for th...

Page 241: ...a reasonable pulse shape Step 1 Verify prober connections from the PMU or RPM to the DUT 1 Use cabling and connections optimized for high frequency 150 MHz 2 Connect the low side of the device under...

Page 242: ...nition dialog box By default the voltage waveforms are blue and use the left Y1 axis the current waveforms are red and use the right Y2 axis 8 Save the project 9 Run the test and view the waveform on...

Page 243: ...V curve suspect If the waveform has a good shape Step 2 Verify the pulse shape and the pulse level is correct Step 3 Is the pulse level correct for each channel but the pulse I V curve is suspect per...

Page 244: ...3 W and a voltage threshold of 12 V is shown in the Vd Id family of curves with LLEC disabled figure Note that each threshold allows the test to be bounded Also note that the thresholds do not stop t...

Page 245: ...V Note that the top curve in the red circle did not reach the 12 V setting This is because the PMU 40 V source range reached source compliance In this case the PMU is at its limit and cannot source an...

Page 246: ...esults UTM troubleshooting also involves error messages or codes Typically the user modules are written for a specific test or requirement and have minimal error checking This means that parameter val...

Page 247: ...or error messages For example if you get a message indicating forcev Cannot force when not connected you can check the Return Values in the Help pane for more troubleshooting information see next figu...

Page 248: ...e for the 4200A SCS supports many of these high speed sourcing and measurement applications Ultra fast I V tests You can use the 4225 PMU to do these types of ultra fast I V tests 1 Pulsed I V 2 Trans...

Page 249: ...value output trigger level TTL high or low and output relay state open or closed If both channels of a pulse card are being used the segment trigger levels for Channel 1 will be seen at the TRIGGER OU...

Page 250: ...n a floating condition The minimum time for a segment with a HEOR transition open to close or close to open is 25 s for the 4220 PGU and 4225 PMU Because of resources necessary to generate the Segment...

Page 251: ...two sequences with looping is illustrated in the following figure Figure 194 Definition showing two sequences with looping The graph of the measurement of a two sequence Segment Arb with looping from...

Page 252: ...e value A time interval is set to control the time spent at each point in the waveform The following figure shows an example of a user defined full arb waveform The waveform is made up of 80 voltage p...

Page 253: ...o Segment Arb waveforms on page 10 6 The ability to disconnect or float a particular device pin in the Segment Arb waveform requires an inline solid state relay The pulse card output channels each hav...

Page 254: ...proach used below relies on DC concepts and explains the settled portion of the pulse and does not require knowledge or use of RF concepts RF concepts are necessary to explain time based effects such...

Page 255: ...value for pulse load does not equal the actual DUT resistance the voltage across the DUT will not match the programmed voltage level Calculate VDUT VDUT IDUT RDUT 0 1 A 50 5 V Example 2 High resistan...

Page 256: ...xamples Only the DUT load RDUT was changed resulting in a range of VDUT from less than 1 V to nearly 10 V with corresponding changes in IDUT This variation is related to the constant pulse load 50 Rep...

Page 257: ...s in the Pulse Card High Voltage 20 V Range table for the 250 row These calculations do not incorporate any cabling or interconnect losses that may range from 1 up to 10 to 20 depending on the interco...

Page 258: ...250 8 333 0 033 1 k 9 524 0 0095 10 k 9 950 0 000995 Approximate value does not account for interconnect losses Available I and V for the high voltage 20 V range of the Keithley pulse card Maximum I...

Page 259: ...create a user test module UTM that uses the command set described in Pulse source only PG2 commands on page 13 6 This allows an external trigger LPT command pulse_trig_source to output a 2 level pulse...

Page 260: ...to Pulse generator card output trigger on page 5 68 When using the burst or trig burst trigger mode make sure to first set the pulse count before starting pulse output The pulse_burst_count on page 13...

Page 261: ...rigger can be set for positive rising edge or negative falling edge polarity Use the pulse_trig_polarity on page 13 154 function to set the polarity of output trigger Example LPT function sequence pul...

Page 262: ...gurations using pulse generator cards refer to pulse generator connections on page 5 69 To achieve optimum performance only use the cables connectors and adapters that are included with Keithley Instr...

Page 263: ...ming For spot mean measurements portions of the amplitude and base levels are specified for sampling For pre data and post data waveform measurements a percentage of the entire pulse duration is speci...

Page 264: ...rage averages the mean readings for all the pulses in the burst In the figure in Spot mean discrete readings on page 5 70 each mean reading for pulse 1 is averaged with each corresponding mean reading...

Page 265: ...e and current readings and time stamps are returned for every sample taken on the pulse The NumPulses number of pulses parameter is used to specify the number of pulses to be output and sampled Figure...

Page 266: ...amp readings enabled Figure 207 Returned data set for waveform discrete readings Waveform average readings For this data acquisition type each returned reading is a mean average of the corresponding s...

Page 267: ...mples are taken on the base level The start and stop percentage values indicate the portions of the pulse that are sampled As shown the beginning of the amplitude and base level are designated as the...

Page 268: ...n example where 10 0 1 pre data and 10 0 1 post data is taken The number of samples taken on the pulse is dependent on the size of the pulse to be sampled and the sampling rate Use the pulse_sample_ra...

Page 269: ...d the time stamps It also enables LLEC pulse_meas_wfm PMU1 1 0 1 1 1 1 Where Instr_id PMU1 chan 1 channel 1 AcquireType 0 discrete AcquireMeasV 1 enable AcquireMeasI 1 enable AcquireTimeStamp 1 enable...

Page 270: ...Clarius is the primary application of Clarius and is the primary user interface for the 4200A SCS Clarius is a versatile tool that helps you characterize individual parametric test devices or automate...

Page 271: ...movements including A single test for one device such as a transistor diode resistor capacitor A test sequence for one device Test sequences for multiple devices For example test all the devices conta...

Page 272: ...elp information available from the on screen keyboard window menu option Tool Help Topics You can also adjust the touch settings using the Pen and Touch options in the Windows Control Panel Choose the...

Page 273: ...ps all running items Save saves the project configuration Tools provides module specific tools For source measure units SMUs you can run autocalibration For capacitance voltage units CVUs you can set...

Page 274: ...sites The project tree for the default project is shown in the figure below The settings for the item you select in the project tree are displayed when you select Configure from the top bar The test d...

Page 275: ...itted refer to Submitting devices to a library on page 6 298 The Action Library contains items that support the tests and help control the project Actions can generate dialog boxes to prompt test oper...

Page 276: ...214 Test library Configure the project Select Configure for an item in the project tree to display the settings for that item Depending on the item settings are available in the center and right panes...

Page 277: ...lator and edit the formulas or create new ones The Graph Settings allow you to change the display of the data on the graph The Run History pane on the right displays the time and name of each test run...

Page 278: ...interconnections between all of the test system components that are controlled by Clarius Another Clarius software tool the Keithley External Control Interface KXCI on page 9 1 allows the 4200A SCS t...

Page 279: ...ar filters select Clear Filters at the bottom of the Filters pane To clear the search select Clear next to the Search button For example if you want to test bipolar junction transistors BJTs 1 Select...

Page 280: ...needed They can be an efficient way for you to add a test to your project You can use the basic procedure described here to find any items in the library To add a four terminal MOSFET device and test...

Page 281: ...you can promote or demote them to move them in the tree structure For example if the action is under a device you might want to move it to be at the project level To promote or demote an action right...

Page 282: ...is executed Incorrect terminal configurations can result in anomalous test results and device damage The key parameters for each terminal are displayed near the terminal The key parameters include Th...

Page 283: ...ns of parameters refer to SMU all parameters on page 6 36 CVU all parameters on page 6 55 PMU all parameters on page 6 70 To set the Key Parameters 1 Select the field that you want to change 2 If ther...

Page 284: ...ntire project make sure the project name is highlighted Running a project saves the configuration settings and the existing run history of the project In the following example when you select Run the...

Page 285: ...ded to the project directory defined in My Settings are available through My Projects You can use My Projects to create new projects import and export projects and to duplicate delete edit search for...

Page 286: ...4200A SCS The export includes all Run History data for each test in the project To export a project 1 In Clarius select My Projects 2 Select the project to be exported 3 Select Export The Export From...

Page 287: ...itor Preview Displays the changes you make as they will appear in the library Name Type the new name This is the name that is used in the library and the project tree Title Type the title This is used...

Page 288: ...13 for instructions on how to import the user libraries and user modules Make sure the files to be imported are not set to read only or run only Initialization steps and termination steps will be conv...

Page 289: ...t My Projects 2 Select the project to be edited 3 Select Edit The Project Information Editor opens 4 In the Basic tab complete the information as needed Refer to the table below for the options 5 Sele...

Page 290: ...new item If you want to include the help that was associated with the original object select Include Help Clear Include Help to keep the help from displaying the Help pane will be blank You cannot ch...

Page 291: ...ollowing topics describe the operation modes that are available when a SMU is selected as the instrument Some of the operation modes allow sweeping or stepping The figure below illustrates the differe...

Page 292: ...se Voltage on page 6 43 Available when Pulse Mode is selected The voltage level that the instrument sources when the pulse output is off The level that you can set depends on the present source range...

Page 293: ...teps of this size from the start level to the stop level A measurement is made at each source step including the start and stop levels Points on page 6 38 The number of data points that will be measur...

Page 294: ...t to Limited Auto This sets the minimum range that the instrument uses Measure or Report Voltage on page 6 45 Determines if voltage values are recorded in the Analyze spreadsheet Report Value Report V...

Page 295: ...Pulse Mode is selected The amount of time that the pulse is off 5 ms to 20 s Base Voltage on page 6 43 Available when Pulse Mode is selected The voltage level that the instrument sources when the pul...

Page 296: ...eep is typically unsatisfactory for such applications because the first increment can miss several of the lower decades For example the first 0 1 V step of a 101 point linear sweep from 0 001 V to 10...

Page 297: ...o 20 s Off Time on page 6 43 Available when Pulse Mode is selected The amount of time that the pulse is off 5 ms to 20 s Base Voltage on page 6 43 Available when Pulse Mode is selected The voltage lev...

Page 298: ...is value is calculated by Clarius using the information entered for the Start Stop and Step parameters Force Range Source Range on page 6 39 The SMU range that is used when forcing the voltage Complia...

Page 299: ...or the Best Fixed range On Time on page 6 43 Available when Pulse Mode is selected The amount of time that the pulse is on 5 ms to 20 s Off Time on page 6 43 Available when Pulse Mode is selected The...

Page 300: ...re than that limit Power On Delay on page 6 41 The delay between when SMUs are powered on in a test sequence Pulse Mode on page 6 41 Pulse Mode allows you to apply voltage or current to a device for b...

Page 301: ...parameters that are available for this mode are briefly described in the following table Select the links to access additional information The parameters are listed in the order in which they appear...

Page 302: ...tting determines which current values are recorded in the Analyze spreadsheet Current Column Name on page 6 44 The name of the current measurement This is the name that Clarius displays in the Analyze...

Page 303: ...page 6 43 Available when Pulse Mode is selected The amount of time that the pulse is on 5 ms to 20 s Off Time on page 6 43 Available when Pulse Mode is selected The amount of time that the pulse is o...

Page 304: ...tart and stop levels Points on page 6 38 The number of data points that will be measured This value is calculated by Clarius using the information entered for the Start Stop and Step parameters Force...

Page 305: ...plays all available parameters for the test that is selected in the project tree The descriptions of each operation mode contains a list and brief description of the parameters that are available when...

Page 306: ...ver steps the force voltage beyond the value specified by the stop parameter even if you specify a step value that is larger than the stop value Use a step value that does not result in a fractional n...

Page 307: ...d 0 0045 A Points The number of data points that will be measured This value is calculated by Clarius using the information entered for the Start Stop and Step parameters using the equation Points log...

Page 308: ...rated Force Range Source Range The SMU range that is used when forcing the voltage or current You can select Best Fixed The instrument selects a single fixed source range that will accommodate all the...

Page 309: ...iance is set to 1 V and the measurement range is 200 mV output voltage will clamp at 210 mV If you attempt to change compliance to a value that is not appropriate for the selected range compliance is...

Page 310: ...sequence refer to SMU Power On Sequence on page 6 87 Pulse Mode Pulse Mode allows you to apply voltage or current to a device for brief periods at widely spaced intervals This avoids device overheati...

Page 311: ...utput returns to the specified Base Voltage level After the off time expires the output returns to 0 V Figure 233 Pulse Mode example Voltage bias 2 V level 1 V base When a measurement is made it effec...

Page 312: ...0 s Off Time Available when Pulse Mode is selected The amount of time that the pulse is off 5 ms to 20 s Base Voltage Available when Pulse Mode is selected The voltage level that the instrument source...

Page 313: ...ssible electrical shock that could result in personal injury or death SMU and preamplifier terminals should be considered hazardous even if the outputs are programmed to be low voltage Precautions mus...

Page 314: ...trument measures voltage Voltage is recorded in the Analyze sheet and shown in the graph Voltage Range The measure range determines the full scale measurement span that is applied to the signal Theref...

Page 315: ...re Current or Report Current The Report Value setting determines which current values are recorded in the Analyze spreadsheet You can select Programmed Requested current values are recorded For exampl...

Page 316: ...s the DC bias information in the Analyze sheet where this data is reported You can change the name of the column by typing a new value Freq Column Name on page 6 59 Available if you select Report Test...

Page 317: ...tart and stop voltages and the voltage size between each step An example is shown in the next figure Figure 236 Example linear sweep The voltage sweep generates parametric curve data that is recorded...

Page 318: ...en the test executes A column of the Analyze spreadsheet displays this information Hover over a cell to review the information Compensation Open on page 6 59 Use the CVU connection compensation value...

Page 319: ...a presoak voltage of 30 V to 30 V List Values on page 6 38 Select Enter Values to open a dialog box in which you can enter the voltage level for each step of the sweep in the rows You can enter any va...

Page 320: ...n compensation on page 4 10 for additional information AC Source V on page 6 60 Selects the terminal to use to source AC drive voltage AC Measure I Range on page 6 60 The measure range determines the...

Page 321: ...nection compensation value that was generated for open connection compensation Refer to Connection compensation on page 4 10 for information on generating and using compensation values Compensation Sh...

Page 322: ...lue is 0 5 The CVU sweeps through the frequency points 800 kHz 900 kHz 1 MHz 2 MHz and 3 MHz for DC biases 1 V 0 5 V 0 V 0 5 V and 1 V When this test is run the following sequence occurs 1 The DC sour...

Page 323: ...e name that is used for parameter 1 in the Analyze sheet Param2 Column Name on page 6 58 The name that is used for parameter 2 in the Analyze sheet Report Test Conditions on page 6 58 Select this opti...

Page 324: ...ly calculates the maximum capacitance value based on the parameter settings in the Advanced settings dialog box DC Gnd operation mode CVU Select the DC Gnd operation mode for the CVU CVU all terminal...

Page 325: ...a new location in the list Note that you cannot have blank rows in between values You can use the Ctrl key plus mouse selections to pick selected rows then use the buttons to copy cut or delete those...

Page 326: ...l sweep Figure 239 Single and dual sweep examples linear voltage sweep 0 V to 4 V in 1 V steps DC Bias The DC bias range accepts a value between 30 V to 30 V Frequency Select the frequency from the li...

Page 327: ...t is left blank Clarius uses the previous value If you change the name it is updated when the test is run The results from earlier tests that are available through Run History are not changed to the n...

Page 328: ...ping a new value This cannot be left blank If it is left blank Clarius uses the previous value If you change the name it is updated when the test is run The results from earlier tests that are availab...

Page 329: ...use to source AC drive voltage AC Measure I Range The measure range determines the full scale measurement span that is applied to the signal Therefore it affects both the accuracy of the measurements...

Page 330: ...allest AC drive voltage 10 mVRMS and the maximum current range 1 mA or autorange To use the Capacitance Range Estimator 1 Select Configure 2 In the Key Parameters pane click the CVH1 terminal 3 Select...

Page 331: ...g figure Figure 242 AC source applied to CVL1 and DC source applied to CVH1 Another configuration sources AC drive voltage to the CVH1 terminal and sources DC bias voltage to the CVL1 terminal AC curr...

Page 332: ...Step function are identical However in a test where two or more PMUs are used the sweep for one PMU is performed on each step of the pulse step of the other PMU A pulse step requires that at least one...

Page 333: ...36 The voltage size of each step of the sweep The source level changes in equal steps of this size from the start level to the stop level A measurement is made at each source step including the start...

Page 334: ...ing and a sweep point exceeds the source range capability the source outputs the maximum level for that range This range must be equal to or greater than the largest value in the sweep DC Sweep operat...

Page 335: ...weeping and a sweep point exceeds the source range capability the source outputs the maximum level for that range This range must be equal to or greater than the largest value in the sweep Pulse Base...

Page 336: ...art When you clear Dual Sweep the instrument sweeps from start to stop only Force Range on page 6 71 The range that is used when sourcing Select one of the listed ranges The source remains on the rang...

Page 337: ...inks to access additional information Additional parameters are described in Parameters common to PMU operation modes on page 6 69 The parameters are listed in the order in which they appear in the Al...

Page 338: ...ed voltage current versus time in the Analyze graph Report Status on page 6 75 When this option is selected Clarius records measurement status information when the test executes A column of the Analyz...

Page 339: ...made at each source step including the start and stop levels Clarius never steps the force voltage beyond the value specified by the stop parameter even if you specify a step value that is larger tha...

Page 340: ...between a single pulse sweep and a dual pulse sweep This figure illustrates a linear voltage sweep 0 V to 4 V in 1 V steps Figure 248 Single and dual pulse amplitude sweep examples Force Range PMU Th...

Page 341: ...Makes current measurements on the amplitude Available when the Test Mode is set to Pulse I V The next figure shows an example of a spot mean measurement on pulse high amplitude and pulse low base leve...

Page 342: ...anges will be unavailable As shown in the table below available current measurement ranges for the PMU depend on the selected voltage source range The 10 mA measure range for the 10 V source range has...

Page 343: ...easurement range The available ranges are limited by the pulse timing parameters For additional information see PMU minimum settling times versus current measure range on page 5 41 Low Range Available...

Page 344: ...stamp and the waveform is graphed voltage current versus time in the Analyze graph Report Status PMU When this option is selected Clarius records measurement status information when the test executes...

Page 345: ...nt status source and measure ranges whether an RPM is connected and load line effect compensation LLEC status and flags any faults errors If a pulse measurement fault occurs the entire row of data rel...

Page 346: ...asurement overflow use the measurement status code to determine the situation and possible fixes See Basic troubleshooting procedure on page 5 48 for more information Figure 255 Sample measurement ove...

Page 347: ...ltage threshold power threshold and source compliance 0 None 1 Source compliance 2 Current threshold reached or surpassed 4 Voltage threshold reached or surpassed 8 Power threshold reached or surpasse...

Page 348: ...lues are valid with LLEC enabled or disabled It is the maximum output of the PMU The LLEC does not change the maximum output voltage or current of the PMU Threshold Current The current threshold allow...

Page 349: ...options in the Test Settings pane to select the User Library and User Module for the test Refer to Create a custom test on page 6 108 for additional information on settings available for UTMs In the T...

Page 350: ...ed Specifies the A D converter integration time that is used to measure a signal Sweeping Test Mode on page 6 86 Select this mode for tests in which the voltage or current varies with time Sweep Delay...

Page 351: ...owest noise and most accurate measurements Custom Allows you to fine tune the timing parameters With Custom you can configure the A D aperture time and individual delay and filtering factors to produc...

Page 352: ...If Clarius makes and averages multiple readings for a measurement then Clarius records the timestamp at the last of these readings as shown in the following figure Figure 257 Timestamps when Clarius...

Page 353: ...ual applied delay time is 0 7 ms 1 ms x 0 7 The following table summarizes the Delay Factor settings Speed Mode Delay Factor Fast 0 7 Normal 1 0 Quiet 1 3 Custom 0 to 100 When typing a custom Delay Fa...

Page 354: ...Filter Factor of 0 nullifies the SMU internal filtering When the Filter Factor and Delay Factor are set to zero the internal pre programmed values are ignored Auto A D Aperture When Auto A D Aperture...

Page 355: ...rcing constant voltages or currents The sampling test mode is used for tests in which the forced voltage and frequency are static with measurements made at timed intervals For example you could use sa...

Page 356: ...ts at completion SMU If Disable Outputs at Completion is cleared the SMU outputs remain at their last programmed levels when the test is completed To prevent electrical shock that could cause injury o...

Page 357: ...dition options None The run continues This is the default setting Test The 4200A SCS exits the test that is presently being run If there are additional tests operation continues to the next test Devic...

Page 358: ...d only if Auto A D Aperture is cleared Specifies the A D converter integration time that is used to measure a signal Sweeping Test Mode on page 6 86 Select this mode for tests in which the voltage or...

Page 359: ...owest noise and most accurate measurements Custom Allows you to fine tune the timing parameters With Custom you can configure the A D aperture time and individual delay and filtering factors to produc...

Page 360: ...If Clarius makes and averages multiple readings for a measurement then Clarius records the timestamp at the last of these readings as shown in the following figure Figure 260 Timestamps when Clarius...

Page 361: ...ual applied delay time is 0 7 ms 1 ms x 0 7 The following table summarizes the Delay Factor settings Speed Mode Delay Factor Fast 0 7 Normal 1 0 Quiet 1 3 Custom 0 to 100 When typing a custom Delay Fa...

Page 362: ...Filter Factor of 0 nullifies the SMU internal filtering When the Filter Factor and Delay Factor are set to zero the internal pre programmed values are ignored Auto A D Aperture When Auto A D Aperture...

Page 363: ...rcing constant voltages or currents The sampling test mode is used for tests in which the forced voltage and frequency are static with measurements made at timed intervals For example you could use sa...

Page 364: ...ance as a function of time 4 Observe the settling time from the graph 5 Use this time for the hold time for the initial applied voltage or for the sweep delay time applied at each step in the sweep Th...

Page 365: ...2017 To select output values 1 In the project tree select the test 2 Select Configure 3 In the right pane select Test Settings 4 Select Output Values The Output Values dialog box is displayed 5 Select...

Page 366: ...The rise transition time for the pulse output Fall Time on page 6 103 The fall transition time for the pulse output Pulse Delay on page 6 103 The pulse delay is the time interval between the start of...

Page 367: ...measure window is 1500 ns to 1800 ns For waveform capture measurement samples are acquired on pulse rise pulse amplitude pulse fall and a small portion before the rise pre data and after the fall post...

Page 368: ...se specified by the number of pulses When Discrete Pulses is selected for Pulse IV the measured value of each pulse is acquired Refer to the Pulse IV Discrete pulses measurement example on page 6 100...

Page 369: ...For the example shown in the next figure the readings are the result of a pulsed IV sweep from 2 V to 5 V in 1 V steps with the discrete number of pulses set to three This test yields the spot mean of...

Page 370: ...autorange load line effect compensation LLEC or thresholds the number of pulses is output multiple times for each step in a sweep Timing Sweep You can only step the timing parameters if the Operation...

Page 371: ...vels on page 5 35 Period The pulse period is the time interval between the start of the rising transition edge of consecutive output pulses as shown in the following figure To minimize self heating ef...

Page 372: ...he fall transition time for the pulse output Pulse Delay The pulse delay is the time interval between the start of the rising pulse edge of the trigger output pulse and the output pulse You can set th...

Page 373: ...hen using autorange with an RPM connected use the timing values on the top row or longer slower values If using limited autorange start with the timing values for that range If pulse width or period t...

Page 374: ...up a project with devices and tests for those devices However if your system includes wafers external equipment or custom tests you need to add additional items to your project tree to accommodate th...

Page 375: ...ny predefined user modules organized into user libraries Refer to User library descriptions on page 6 305 for descriptions of the pre built user libraries and modules You can also use KULT to create y...

Page 376: ...s tab 5 In the Test Library select Custom Test 6 Select Add a blank test that can be configured into a DC Pulse or CV test ITM 7 Drag Custom Test to the project tree The test has a red triangle next t...

Page 377: ...to a user modules stop the following procedure after renaming the test To create a UTM 1 Choose Select 2 Select the Tests tab 3 For the Custom Test select Choose a test from the pre programmed library...

Page 378: ...important or the most commonly used parameters If you do not define the user interface Clarius creates one automatically The parameters are placed in groups around a default image of the device under...

Page 379: ...onment Settings 3 Select Allow access to UTM UI editor After making edits you can clear Allow access to UTM UI editor to prevent accidental modifications to the UTM UI definitions Open the UTM UI edit...

Page 380: ...ach group is shown in a tab in the UTM UI Editor The All tab contains all parameters If no group is displayed in the Group column these parameters are not displayed in the Configure pane Display only...

Page 381: ...o the UI image bitmap Select a clock hour from the Group Position list The number of parameters in each group defines the final layout For example if two groups next to each other have a lower number...

Page 382: ...change the following group level items see the example in Add a group on page 6 112 Group name Group position Parameter order Select a parameter row and then click Move Up or Move Down to change the p...

Page 383: ...irectory of the user library For example an image for a UTM in the VLowFreqCV user library is stored in C s4200 kiuser usrlib VLowFreqCV src To add an image 1 In the UTM UI Editor select the Image tab...

Page 384: ...isting value comes from KULT but you can change it here as needed 6 Set the Displayed Units These are the units of measure for the value Note that no conversions are made so these must be the same uni...

Page 385: ...Section 6 Clarius Model 4200A SCS Parameter Analyzer Reference Manual 6 116 4200A 901 01 Rev C February 2017 Figure 278 GUI Configuration for the voltsSourceRng parameter ListBox...

Page 386: ...he Minimum Maximum and Default Values are defined in the KULT user module To change the Minimum and Maximum Values you must use KULT You can edit the Default Value in Clarius Control types You can set...

Page 387: ...yed Units field does not affect the test or parameters You can enter a tooltip to assist the user in understanding the parameter values Enter text in the Displayed Tooltip field with a short informati...

Page 388: ...entInSystem Used for 4200A SCS instrument card SMU CVU PMU PGU This condition must be alone in the Use Case Condition field Cannot be combined with other conditions or operators below HasPA smuid True...

Page 389: ...the first line means If voltsSourceRng is equal to 40 then display 800 mA in the list This effectively allows the 800 mA range to display and be selected when the voltage range is set to 40 V Note the...

Page 390: ...when the voltage range is 10 V and there is an RPM on the chosen channel variable name chan 5 100 A 0 0001 HasRPM PMU_ID Ch chan OR voltsSourceRng 40 Display this name in 2 cases if there is an RPM o...

Page 391: ...ximum of two operators for each row Comparison operators Can compare constants or values of parameters If the argument to the right of the operator is a parameter it must be enclosed in curly brackets...

Page 392: ...asurement in the Displayed Units field for reference by the UTM UI programmer When finished click OK to exit this dialog box Figure 283 CheckBox UTM parameter UI configuration The Minimum Maximum and...

Page 393: ...parameter the Acquisition Type group is an option button control Using an option button permits different values to be returned for each choice in the same way as a list box a check box control only r...

Page 394: ...the parameter variable types using the Parameters tab in KULT see Parameters tab area on page 8 4 For this control type the example uses the vlfcv_measure_sweep_freq user module which is in the VLowF...

Page 395: ...le does not provide support for the minimum maximum or default values for the arrays only the UTM UI provides this capability The minimum and maximum values are single values that provide bounds for e...

Page 396: ...LPT commands seg_arb_sequence on page 13 125 and seg_arb_waveform on page 13 128 There are two dialog boxes that configure the Segment Arb UI Key Parameters The UTM UI Parameter Configuration dialog...

Page 397: ..._ExampleFull SegARBConfig multiple parameters In addition to the settings that are configured like the other control types such as displayed group displayed units and displayed tooltip text the SegARB...

Page 398: ...gger output state for each segment SegMeasType MeasType Integer array or Integer 1 No Measurement Type None spot mean or waveform SegMeasStart MeasStart Double array or Double 1 No Start point for mea...

Page 399: ...the SegARBConfig control are required for multi sequence tests These three parameters are SeqList SeqStartSeg and SeqStopSeg They are used both by the SegARBConfig control and the user module to defin...

Page 400: ...4200A SCS Parameter Analyzer Reference Manual Section 6 Clarius 4200A 901 01 Rev C February 2017 6 131 Figure 290 Segment Arb UI UTM configuration for channel 1 Figure 291 Two sequence Segment Arb wav...

Page 401: ...SeqStartSeg SeqStartSeg SeqStopSeg SeqStopSeg Assigning SegARBConfig to a group As with other Control Types to appear in the UTM Key Parameters pane the SegARBConfig must be assigned to a group If a u...

Page 402: ...the seg_arb_sequence command supports a maximum of 512 sequence definitions for each channel the SegARBConfig control only supports 64 unique sequences for each channel For the definition of the Segm...

Page 403: ...can use the created defaults to get started with a new UTM without having to input any parameter values Figure Segment Arb Defaults Configuration below shows the created blank Segment Arb Default dial...

Page 404: ...lts Configuration after pressing Load Simple Pulse Defaults for this example The following figures show the defaults for this example user module PMU_SegArb_ExampleFull When creating default waveforms...

Page 405: ...rrors correct any errors before the configuration can be accepted Since it is not possible to catch all potential missed assignments of parameters the correct configuration relies on the selection of...

Page 406: ...ection 6 Clarius 4200A 901 01 Rev C February 2017 6 137 Complete a change Select OK to save any changes Select Cancel to exit the dialog box without saving any changes UTM UI Editor An example of the...

Page 407: ...Make sure the UTM UI Editor is enabled See Allow access to the UTM UI editor on page 6 110 2 Open the pmu dut examples project from the Project Library 3 Select the pmu 1ch wfm test 4 Select Configur...

Page 408: ...tory file has the file name user_module_name_GUI_Config xml For example one factory UTM UI file is PMU_examples_ulib_GUI_Config xml The user UI file name format is user_module_name_User_GUI_Config xml...

Page 409: ...tiple instances of test or action in the project tree When ITMs are linked Clarius automatically keeps the configurations of the linked ITMs identical This allows you to have multiple tests that perfo...

Page 410: ...ch as beepers and dialog boxes and change switching options You can add existing actions or create actions based on user modules When you create an action you select a user module from a user library...

Page 411: ...ir associated tests You can work with devices and tests as you do in a project that does not include a subsite You need to use actions to initiate prober movement between subsites and close matrix cha...

Page 412: ...are available in the center pane when Key Parameters is selected Additional common test settings are available in the right Terminal Settings pane Less commonly used terminal settings are available in...

Page 413: ...ant to apply multiple steps to multiple device terminals such as when stepping the biases on two transistor terminals and sweeping voltage or current on the third terminal In this setup Clarius automa...

Page 414: ...Model 4200A SCS Parameter Analyzer Reference Manual Section 6 Clarius 4200A 901 01 Rev C February 2017 6 145 Figure 307 Master list sweeps versus subordinate list sweeps...

Page 415: ...terminal has a total number of steps equal to the number of steps in the master terminal For example if the master terminal is set to measure ten points the subordinate dual sweep will measure five po...

Page 416: ...ammed in the prober controller Each execution of the action advances the probe to the next site in this programmed sequence Site numbers are not communicated between the prober and Clarius Therefore i...

Page 417: ...subsite See Output Values on page 6 176 for details The subsite cycling stress types are Cycle Mode on page 6 154 The subsite test is repeated a specified number of times This mode performs tests but...

Page 418: ...01 Rev C February 2017 6 149 Connect devices for stress measure cycling Devices that are stress measure cycled in parallel are connected through a switching system The following figure shows an exampl...

Page 419: ...6 Clarius Model 4200A SCS Parameter Analyzer Reference Manual 6 150 4200A 901 01 Rev C February 2017 Connections for matrix card Figure 309 AC Pulse stress measure hardware matrix card simplified sch...

Page 420: ...2017 6 151 Connections for pulse card to device under test Connect the pulse generator to the DUT during stress as shown in the following figures Figure 310 AC pulse stress measure hardware setup blo...

Page 421: ...Section 6 Clarius Model 4200A SCS Parameter Analyzer Reference Manual 6 152 4200A 901 01 Rev C February 2017 Connections for system hardware Figure 312 AC Pulse stress measure hardware connections...

Page 422: ...mode is similar to the Stress Measure Mode except device stressing is provided by pulse cards using the Segment Arb pulse mode You can use SMUs to provide bias voltage and current limit for the devic...

Page 423: ...Stress Measure Cycles 5 Select Cycle Mode 6 Enter the Number of Cycles This is the fixed number of times that you want the subsite to execute 7 Enter the Cycle Delay in seconds 8 Select Save Figure 3...

Page 424: ...an example of a basic testing sequence The components for stressing percent change and target evaluation are shown in blue When subsite cycling is started the first pass through the subsite is a pre s...

Page 425: ...s and a unique drain stress bias voltage Vd Stress can be applied to each evaluated device within the source limitations of the system Each unique gate or drain stress bias condition requires a dedica...

Page 426: ...pin of one device Figure 317 AC voltage stressing Six devices stressed at the gates with six pulse outputs AC and DC voltage stress measure system with a switch matrix A switch matrix is supported for...

Page 427: ...AC Voltage stressing on page 6 157 Similar operations apply to other types of stress measure studies For information about AC stress for wafer level reliability refer to Wafer Level Reliability Testin...

Page 428: ...inue stress and test cycles until another device degrades to all target values or goes into compliance 19 Stop testing this second device but continue stress and test cycles until one of the folowing...

Page 429: ...the subsite This is the total amount of stress time that will have passed when the last stress is complete 4 In Number of Stresses set the total number of stresses You can set up to 128 stresses 5 If...

Page 430: ...r decade There can be up to 128 for all decades combined 5 If needed enter the Stress Measure Delay in seconds This is the delay after each stress cycle It allows the device to reach equilibrium befor...

Page 431: ...ou set up your list To set timing for list mode 1 Select List 2 If needed enter the Stress Measure Delay in seconds This is the delay after each stress cycle It allows the device to reach equilibrium...

Page 432: ...bsite Stress Properties for stress measure mode 1 In the project tree select the Subsite 2 Select Configure The Configure pane displays the Subsite Stress Properties as shown in the figure below 3 If...

Page 433: ...you may see in the Stress Conditions area include the following The options that are available depend on the device that is selected Enter the voltage or current stress values for each terminal Activ...

Page 434: ...the channel of the VPU For example assign value 1 to the device terminal that is connected to channel 1 of the VPU Assign 2 to the device terminal that is connected to VPU channel 2 Matrix card syste...

Page 435: ...gs are defined the SMUs power off from the lowest number to the highest SMU1 SMU2 SMU3 and so on For example if you have set the terminals to the settings in the following table on stress source is po...

Page 436: ...lated as follows Change ABS Post Stress Reading Pre Stress Reading Pre Stress Reading x 100 Abs The value of the absolute change of the post stress output value reading compared to its pre stress outp...

Page 437: ...n all targets are reached or the last subsite cycle is completed The testing process for target evaluation is shown in the following flowchart As a simple example assume all the targets for both devic...

Page 438: ...ess properties data for the displayed device It Sets all voltage and current values to 0 Sets device pin number assignments to 0 Sets Stress Measurements to Do Not Measure Disables all Targets clears...

Page 439: ...welve seconds In a typical stress measure test system that uses a switch matrix to automate the stress and measure phases of the test During a measure phase the switch matrix connects the instruments...

Page 440: ...DUT They are set to 0 V to effectively ground the terminals Figure 331 Segment stressing Stress phase example Set up segment stress measure counts In this mode Clarius runs stress measure cycles for...

Page 441: ...will stress the device This is the total number of stress pulses that will be generated during all stress cycles 4 In Number of Stresses set the total number of stress cycles This value must be less t...

Page 442: ...Segment Arb waveform will stress the device This is the total number of stress pulses that will be generated during all stress cycles 4 In of Stresses Decade set the total number of stresses per decad...

Page 443: ...re Delay in seconds This is the delay after each stress cycle It allows the device to reach equilibrium before the next measurement 3 In the Stress Count box type a stress count in number of segment s...

Page 444: ...de is the same as the test sequence for the basic Stress measure mode on page 6 189 Figure 335 Segment stress measure properties Import KPulse Segment Arb waveform files If you exported a Segment Arb...

Page 445: ...nting or aborting a test run and reporting the condition in the message area of the Clarius window If the condition occurs when a test is attempted Clarius prohibits execution If the condition occurs...

Page 446: ...Open a project on page 6 16 2 Make sure the check boxes are selected for all items in the project tree 3 Highlight the project name as shown in the figure below Figure 336 Run a project 4 Select Run T...

Page 447: ...ecution stops immediately The following example uses the Demo Project to demonstrate how to run tests for a device To run tests for a device 1 Open the Demo Project Refer to Open a project on page 6 1...

Page 448: ...for the test is selected 2 Highlight the test 3 Select Run The Run icon changes as shown below The active test is listed to the left of Run The Stop icon changes to red Figure 340 Run icon while a te...

Page 449: ...e check boxes are selected for all items in the subsite that you want to include 2 Highlight the subsite name 3 Select Run The Run icon changes as shown below The active action or test is listed to th...

Page 450: ...ubsite Subsite cycling allows you to repeatedly cycle through the subsite tests The data for every repeated test is acquired and placed in its Analyze Stress tab Measured readings output values can be...

Page 451: ...ct Configure 3 Set Start Execution at Site and Finish Execution at Site to the sites you want to run In the following example executing the site will run sites 3 4 and 5 Figure 345 Multi site test seq...

Page 452: ...dsheet and graph You can change the display to be only the spreadsheet or only the graph using the View buttons in the upper right of the pane While a test is running you can watch the data populate t...

Page 453: ...ly Run worksheet In the Analyze pane the Run worksheet numerically displays data for a test in a worksheet that is compatible with Microsoft Excel There is a Run worksheet for every run of every test...

Page 454: ...u can display the equation that was used to get the results The REF notation in a cell indicates that the Formulator could not calculate a valid value This can occur if a Formulator function needs mul...

Page 455: ...with the use of spreadsheets However if you are unfamiliar with spreadsheets Keithley Instruments suggests that you review one of the many excellent manuals available on the subject Before performing...

Page 456: ...Use the Fill Down command to fill a selected range of cells with the contents of the top cell in the column Select the cells you want to use as the original and the cells below that cell Right click a...

Page 457: ...st cycle is 0 0 seconds This is the no stress cycle for HCI testing Column C The measured readings for the first output value IDOFF reading for the ID 1 test Column D Starting with the second cycle li...

Page 458: ...traces are for Output Values IDOFF IDLIN and IDSAT The options at the bottom of the graph allow you to change which device and test data is graphed The options are Device Select the device for which t...

Page 459: ...e mode is shown in the figure below Figure 351 Analyze Subsite Settings sheet for Cycle mode An example of the Settings sheet for the Stress Measure mode is shown in the following figure It is similar...

Page 460: ...CVU1S CVU status code indicates the I measure range for each impedance measurement and flags any errors When a measurement error occurs the entire row of data related to the measurement is highlighte...

Page 461: ...low 16 xx0B00mr CVL1 ABB not locked I and V measurement overflow As shown in this table the mr value is the last two digits of each code mr value 00 Lowest range 1 A used for the impedance measurement...

Page 462: ...pane If you ran the test the latest test is displayed at the top of the Run History pane The data and graph from this test is displayed in the Analyze pane You can have up to 10 000 run histories for...

Page 463: ...ete All To select specific run histories highlight a run history right click and select Select To select a range highlight another run history and right click and select End Select To delete the selec...

Page 464: ...Model 4200A SCS Parameter Analyzer Reference Manual Section 6 Clarius 4200A 901 01 Rev C February 2017 6 195 Figure 355 cv cap test results...

Page 465: ...s results The graph provides you with flexible plot data selection formatting annotation and numerical coordinate display using precision cursors The graph displays the data from the Run and Calc shee...

Page 466: ...amily of curves graph example Define data to be graphed The Graph Definition dialog box displays the data series that you can show on the graph The names of the data series are from the first row of t...

Page 467: ...raph An example of the Graph Definition dialog box is shown in the following figure Figure 358 Graph Definition tab for vfd test 3 For each data series select the axis on which to plot the parameter T...

Page 468: ...u select a data point on any graph using the mouse or other pointing device Clarius displays the following information about the point Data series Row worksheet row number Coordinates to four decimal...

Page 469: ...s Auto Scale Automatically scales all axes one time To change how axes are scaled refer to Define the axis properties on page 6 200 Define the axis properties To change the properties of the graph axe...

Page 470: ...The labels are in simple decimal notation such as 30 0 Scientific The labels are in scientific notation for example 3 0E 01 instead of 30 0 Engineering The axis labels are in engineering notation for...

Page 471: ...atically calculates and implements the major tick spacing for the axis Settings for all axes The All Axes tab includes options that affect all axes The options are described in the following table Opt...

Page 472: ...To display cursors 1 Select Analyze 2 On the graph right click and select Cursors The dialog box shown below opens Figure 361 Graph Cursors dialog box 3 In the Cursor list select Visible for the curs...

Page 473: ...ou selected a Closest Point in Series option select Series and choose the plot to which you want the attach the cursor 7 Select the Color for the cursor 8 If you do not want the cursor to display imme...

Page 474: ...o the position of the next cursor For example the next cursor is cursor 3 if the first is 2 The cursor tracks the movement of the next cursor and the relative X distance between the two cursors remain...

Page 475: ...T REGFITYINT REGFITSLP REGFITXINT Exponential EXPFIT EXPFITA EXPFITB Not applicable Log LOGFIT LOGFITA LOGFITB Not applicable Tangent TANFIT TANFITYINT TANFITSLP TANFITXINT However the Graph and Formu...

Page 476: ...ed lines and fit parameter and cursor coordinate displays indicate appropriate numerical values Fit 1 is always associated with cursors 1 and 2 Fit 2 is always associated with cursors 3 and 4 Line fit...

Page 477: ...erties next to the cursor The Cursor dialog box for the selected cursor opens as shown below Figure 365 Cursor dialog box 5 Select Fit On 6 Select Properties under Fit On The Line Fits dialog box is d...

Page 478: ...rm y a ebx for a graphically defined range of data points Log Regression line of the form y a b log10 x for a graphically defined range of data points Tangent Tangent to the plot at a graphically defi...

Page 479: ...box for the selected cursor opens as shown below Figure 367 Cursor dialog box 2 Select Fit On 3 Select Properties under Fit On 4 Refer to Perform line fits on page 6 207 for information on the options...

Page 480: ...nts as listed in the Run sheet hold the Ctrl key and use the arrow keys You can select cursors using the Tab key Press the Tab key to select the next cursor if more than one cursor is displayed If you...

Page 481: ...n area of the graph results To make the graph smaller right click the graph and select Zoom Out Zooms are temporary characteristics of the graph and cannot be saved Add a comment You can add a comment...

Page 482: ...e corresponding names Data variables are extracted parameters or other values from the second row of a Run or Calc worksheet For example you can display calculated single value extracted parameters su...

Page 483: ...the box Width must be set to a value other than 0 in order for the border to be displayed Width The width of the display border 0 to 20 Visible Select to display the data variables Clear to hide the d...

Page 484: ...the legend is hidden Advanced Properties This button opens a dialog box that allows you to change the names of the Series in the legend To change the names enter the new names in the Custom Name colum...

Page 485: ...4 Click OK 5 If needed drag the test conditions to a new location on the graph Description Text The text that will be displayed You cannot change this text Foreground The color of the text Background...

Page 486: ...drag the title to a new location on the graph Option Description Title The name of the graph Foreground The color of the text Background The background color Transparent Select to display the title wi...

Page 487: ...color from the Foreground list 3 To change the color of the background select a color from the Background list 4 To remove the time and date display from the graph select Remove Time Date 5 Click OK...

Page 488: ...Graphs identically configures graphs for the Site 1 2 3 4 and 5 Run worksheets If the project contains multiple instances of a same named test you must apply the feature separately each such instance...

Page 489: ...rease the size of a graph and save it as a property of the graph To set the size of the graph and save it 1 Select Analyze 2 On the graph select Graph Settings 3 Select Resize The cursor changes to a...

Page 490: ...put values versus the cycle index Each data point in the graph represents an output value reading for each subsite cycle The following figure explains how to display the various graphs This figure sho...

Page 491: ...combination of the following Test data Secondary data created by other Formulator formulas Standard constants from the list of constants Formulator functions may be limited to specific sets of data F...

Page 492: ...4200A 901 01 Rev C February 2017 6 223 Open the Formulator To open the Formulator 1 In the project tree select a test 2 Select Configure 3 In the Test Settings pane select Formulator The Formulator d...

Page 493: ...ormulas List and removes it from the Data Series list Data Series Lists the names of all columns in the Run tab of the Analyze sheet When you select a data series the data series is added to the Edit...

Page 494: ...and units of constants in the constants list Place your cursor in the cell to edit and make changes as needed Changes are automatically saved for all tests To add a new constant to the constants list...

Page 495: ...ert 1 Keithley Instruments recommends using the function FIRSTPOS as the argument for the first value in a vector format FIRSTPOS DataWorksheetColumn Similarly use the function LASTPOS for the last va...

Page 496: ...ormula is defined The results of a post test only formula may be viewed in the Analyze Run worksheet or plotted at the end of a test The post test only functions are listed in the following table AT o...

Page 497: ...e Data Series list or any operand Details You can use this function to do calculations in real time while a test is executing Example F2 ABS GateI Returns the absolute value of the gate current Also s...

Page 498: ...s You can use this function to do calculations in real time while a test is executing Example NEWCURRENT CURRENT EXP ANODEV Also see LN Formulator function on page 6 230 LOG Formulator function Return...

Page 499: ...Details You can use this function to do calculations in real time while a test is executing Example DIODEV LN ANODEI 0 026 Also see EXP Formulator function on page 6 229 DELTA Formulator function This...

Page 500: ...d operands Details Returns one of two user defined expressions EXP3 or EXP4 depending on the comparison of two other user defined expressions EXP1 and EXP2 If EXP1 EXP2 then EXP3 is returned If EXP1 E...

Page 501: ...e number of data points in a group If N 3 and V contains the 12 values X1 X2 X3 X4 X5 X10 X11 X12 then MAVG returns a column vector that contains the following values REF X1 X2 X3 3 X2 X3 X4 3 X3 X4 X...

Page 502: ...a Series list Also see None MIN Formulator function Searches all values in a column vector and returns the minimum value Usage MIN Value Value The name of any column vector in the Data Series list Exa...

Page 503: ...under Columns or any operand Usage ACOS Value Value The name of any column vector in the Data Series list or any operand Details Returns the value in radians Example F1 ACOS DRAINI Also see None ASIN...

Page 504: ...ns or any operand Usage ATAN Value Value The name of any column vector in the Data Series list or any operand Details Returns the value in radians Example F1 ATAN DRAINI Also see None COS Formulator f...

Page 505: ...G Value Value The name of any column vector in the Data Series list or any operand Details Returns the value in degrees Example F1 DEG ANGLE Also see None RAD Formulator function The RAD function conv...

Page 506: ...alue Value The name of any column vector in the Data Series list or any operand Details Returns the value in radians Example F1 SIN DRAINI Also see None TAN Formulator function Returns the tangent of...

Page 507: ...on For all of the values in two selected columns vectors returns a third column vector that contains the difference coefficients Usage DIFF V1 V2 V1 The name of any column vector listed under Columns...

Page 508: ...ng at START Then it returns the row number index of that value Usage FINDD V X START V The name of any column vector listed under Columns X Any value which may be the result of another calculations ST...

Page 509: ...INDD V X START V The name of any column vector listed under Columns X Any value which may be the result of another calculation START The row number index of the starting value for the search Example 1...

Page 510: ...ector listed under Columns X Any value which may be the result of another calculation STARTPOS The row number index of the starting value for the search Details If FINDU does not find an exact match f...

Page 511: ...cified number of points starting with a specified value and consecutive values incremented by one Usage INDEX START N START The starting value N The number of data points to be included Example INDEX2...

Page 512: ...Columns VY The name of any column vector listed under Columns Details Each integral approximates the area under the parametric curve created by plotting the first n values in VY against the first n v...

Page 513: ...You can use this function to do calculations in real time while a test is executing Example QBD INTEG TIME GATEI Also see None LASTPOS Formulator function Returns the row number index of the last val...

Page 514: ...the minimum value Usage MINPOS V V The name of any column vector listed under Columns Example LOCATION MINPOS DRAINI Also see None SUBARRAY Formulator function Returns a new column vector containing a...

Page 515: ...s a column vector VY that consists of moving summation of a column vector V Usage SUMMV V V The name of any column vector listed under Columns Details The nth value in VY Yn is the sum of the nth and...

Page 516: ...POS ENDPOS VX The name of any column vector listed under Columns VY The name of any column vector listed under Columns STARTPOS For the range of X and Y values to be exponentially fitted the row numbe...

Page 517: ...e EXPFITA VX VY STARTPOS ENDPOS VX The name of any column vector listed under Columns VY The name of any column vector listed under Columns STARTPOS For the range of X and Y values to be exponentially...

Page 518: ...e relationship above Usage EXPFIT VX VY STARTPOS ENDPOS VX The name of any column vector listed under Columns VY The name of any column vector listed under Columns STARTPOS For the range of X and Y va...

Page 519: ...from two sets of X and Y values selected from two columns vectors VX and VY This equation corresponds to a line drawn through two points on a curve that is created by plotting the values in VY against...

Page 520: ...inds a linear equation of the form Y a bX from two sets of X and Y values selected from two columns vectors VX and VY This equation corresponds to a line drawn through two points on a curve that is cr...

Page 521: ...lows Finds a linear equation of the form Y a bX from two sets of X and Y values selected from two columns vectors VX and VY This equation corresponds to a line drawn through two points on a curve that...

Page 522: ...Finds a linear equation of the form Y a bX from two sets of X and Y values selected from two columns vectors VX and VY This equation corresponds to a line drawn through two points on a curve that is c...

Page 523: ...row number index of the ending values Details Performs a base 10 log linear fit as follows Fits the following logarithmic relationship to a specified range of values in two columns vectors one column...

Page 524: ...garithmically fitted the row number index of the ending values Details Performs a base 10 log linear fit as follows Fits the following logarithmic relationship to a specified range of values in two co...

Page 525: ...garithmically fitted the row number index of the ending values Details Performs a base 10 log linear fit as follows Fits the following logarithmic relationship to a specified range of values in two co...

Page 526: ...NDPOS The row number index of the second set of X and Y values Details Enables quadratic regression line fitting It allows a set of data to best fit an equation of the parabola Y aX2 bX c The a b and...

Page 527: ...POS The row number index of the second set of X and Y values Details Enables quadratic regression line fitting It allows a set of data to best fit an equation of the parabola Y aX2 bX c The a b and c...

Page 528: ...first set of X and Y values ENDPOS The row number index of the second set of X and Y values Details Enables quadratic regression line fitting It allows a set of data to best fit an equation of the pa...

Page 529: ...tails Performs a linear regression fit as follows Fits the following relationship of the form Y a bX to a specified range of values in two columns vectors column VX containing X values and column VY c...

Page 530: ...dex of the ending values Details Performs a linear regression fit as follows Fits the following relationship of the form Y a bX to a specified range of values in two columns vectors column VX containi...

Page 531: ...index of the ending values Details Performs a linear regression fit as follows Fits the following relationship of the form Y a bX to a specified range of values in two columns vectors column VX contai...

Page 532: ...mber index of the ending values Details Performs a linear regression fit as follows Fits the following relationship of the form Y a bX to a specified range of values in two columns vectors column VX c...

Page 533: ...ear equation of the form Y a bX from two columns vectors VX and VY This equation corresponds to a tangent of the curve that is created by plotting the values in VY against the values in VX The value a...

Page 534: ...be found Details Finds a linear equation of the form Y a bX from two columns vectors VX and VY This equation corresponds to a tangent of the curve that is created by plotting the values in VY against...

Page 535: ...be found Details Finds a linear equation of the form Y a bX from two columns vectors VX and VY This equation corresponds to a tangent of the curve that is created by plotting the values in VY against...

Page 536: ...o be found Details Finds a linear equation of the form Y a bX from two columns vectors VX and VY This equation corresponds to a tangent of the curve that is created by plotting the values in VY agains...

Page 537: ...es between 1 V and 3 V The line generated by REGFIT when co plotted with the existing curve should depart from the plateau at the point of curvature The following topics apply the REGFIT function to t...

Page 538: ...the same as a Function name Each time that you create an equation with F the Formulator adds a sequential numerical suffix to the F when you click Add That is the left side of the first equation is F1...

Page 539: ...click the Add button You are given the option to replace the same named formula in the lower box or to rename and add it to the collection of formulas Refer also to Editing formulas and constants on...

Page 540: ...result of the DIFF function is a difference coefficient that is calculated as the ratio DValues1 DValues2 where DValues1 and DValues2 are differences between values in the present row and values in t...

Page 541: ...o as to create an additional new formula Nothing happens to either of the formula boxes Edit the name of the result variable then click Add again Yes if you edited the formula to update it The replace...

Page 542: ...ative sign Example ABS 1 ABS 1 Both return a value of 1 0000E 0 Also see SIGN on page 6 291 ACOS Calc worksheet function This command returns the arc cosine of a value Usage ACOS Value Value The cosin...

Page 543: ...7627E 0 Also see ASINH on page 6 275 ATAN on page 6 275 COSH on page 6 278 ASIN Calc worksheet function This command returns the arcsine of a value Usage ASIN Value Value The sine of the resulting an...

Page 544: ...age 6 274 ASIN on page 6 274 ATANH on page 6 276 SINH on page 6 292 ATAN Calc worksheet function This command returns the arctangent of a number Usage ATAN Value Value The tangent of the resulting ang...

Page 545: ...ts The origin 0 0 The point at the coordinates x y The angle is returned in radians ranging between and is excluded Example ATAN2 3 6 ATAN2 1 0 1 Returns 1 1071E 0 Returns 3 0419E 0 Also see ATAN on p...

Page 546: ...values are used including 0 The result of AVERAGE is also known as the arithmetic mean Example AVERAGE 5 6 8 14 AVERAGE C15 C17 Returns 8 2500E 0 AVERAGE C15 C17 returns the average of the values in c...

Page 547: ...lc worksheet function This command returns the day of the month component of the supplied date and time serial number Usage DAY Serial_number Serial_number A date represented as a serial number or tex...

Page 548: ...the number in decimal format and returns the result as text Usage FIXED Value FIXED Value Precision FIXED Value Precision No_commas Value Any number Precision The number of digits that appear to the...

Page 549: ...by the NOW function Example HOUR 34259 4 HOUR 34619 976 HOUR NOW Returns 9 000E 0 Returns 23 000E 0 Returns the present hour of the present day Also see DAY on page 6 278 MINUTE on page 6 287 MONTH on...

Page 550: ...0 09 Returns 2 4997E 0 Returns 3 0002E 0 Also see EXP on page 6 279 LOG on page 6 281 LOG10 on page 6 282 LOG Calc worksheet function This command returns the logarithm of a value to the specified bas...

Page 551: ...1 01 Rev C February 2017 LOG10 Calc worksheet function This command returns the base 10 logarithm of a value Usage LOG10 Value Value Any positive real number Example LOG10 260 LOG10 100 Returns 2 4149...

Page 552: ...he search is not case sensitive Result_range Range of one row or one column that is the same size as the Lookup_range Details If Lookup_value does not have an exact match in Lookup_range the largest v...

Page 553: ...is not case sensitive When Comparison is 0 the first value that is equal to Lookup_value is matched When using this comparison method the values in Lookup_range can be in any order When using comparis...

Page 554: ...e_list can contain numbers logical values text representations of numbers or a reference to a range containing those values Error values or text that cannot be translated into numbers return errors If...

Page 555: ...ist can contain numbers logical values text representations of numbers or a reference to a range that contains those values Error values or text that cannot be translated into numbers return errors If...

Page 556: ...s a serial number the decimal portion of the number represents time as a fraction of the day Details The result is an integer ranging from 0 to 59 You need to extract minutes from the serial number cr...

Page 557: ...umber The date as a serial number or as text for example 06 21 15 or 21 Jun 15 Details MONTH returns a number ranging from 1 January to 12 December You need to extract the month from the serial number...

Page 558: ...e the DAY HOUR MINUTE MONTH SECOND and YEAR functions to extract the information in the serial number created by the NOW function These other functions can operate on the NOW function in a nested form...

Page 559: ...rence is included in the list logical expressions and empty cells in the range are ignored Example PRODUCT 1 2 3 4 Returns 24 0000E 0 Also see SUM on page 6 294 ROUND Calc worksheet function This comm...

Page 560: ...umber created by the NOW function Example SECOND 0 259 SECOND 34657 904 SECOND NOW Returns 58 0000E 0 Returns 46 0000E 0 Returns the present second of the present minute Also see DAY on page 6 278 HOU...

Page 561: ...ils If the angle is in degrees convert the angle to radians by multiplying the angle by PI 180 Example SIN 1 5 SIN 4 8 Returns 997 4950E 3 Returns 996 1646E 3 Also see ASIN on page 6 274 PI on page 6...

Page 562: ...Returns 12 6491E 0 Also see None STDEVP Calc worksheet function This command returns the standard deviation of a population based on an entire population of values Usage STDEVP Value_list Value_list...

Page 563: ...ignored Example SUM 1000 3500 500 SUM A10 D10 Returns 5 0000E 3 Returns 6 0000E 3 if each cell in the range contains 1500 Also see AVERAGE on page 6 277 PRODUCT on page 6 290 SUMSQ on page 6 294 SUMS...

Page 564: ...ees convert the angle to radians by multiplying the angle by PI 180 Example TAN 1 5 TAN 45 PI 180 Returns 14 1014E 0 Returns 1 0000E 0 Also see ATAN on page 6 275 PI on page 6 289 TANH on page 6 295 T...

Page 565: ...0 3 5 2 5 4 0 3 5 Returns 265 3061E 3 Also see STDEVP on page 6 293 YEAR Calc worksheet function This command returns the year component of the supplied date and time serial number or text formatted...

Page 566: ...open and short connections and connections to a device under test DUT Refer to Confidence Check on page 4 19 for instructions PMU Connection Compensation Corrects errors caused by the connections betw...

Page 567: ...the Select pane 5 Drag the test from the project tree to the library You will see a copy of the test and a checkmark as shown in the figure below The test is automatically added to the Tests library r...

Page 568: ...The following example provides specifics on how to add a project to the library To add a project to the library 1 In Clarius set up the project so that it contains the settings you want the new libra...

Page 569: ...To change information for a library object 1 In the Basic tab complete the information as needed Refer to the table below for the options 2 Select the Filters tab These options set the filters that wi...

Page 570: ...rent image Images should be 400x400 pixels in png format Larger images display but anything larger than 400x400 is cut off in the library display To re use an image from an older project you may need...

Page 571: ...ing stress test Select this option to track sites during the stress test When this option is selected during the subsite stress test The site identification box in the project tree is automatically up...

Page 572: ...00A SCS interlock circuit is disconnected or otherwise open Clarius continues to execute tests However Clarius automatically limits the output voltage to a safe level even if a test specifies a higher...

Page 573: ...y select Auto cycle through colors Custom GPIB Abort Options These options allow you to set the operations that occur when a GPIB abort is sent You can select that a RST and DCL occur when an abort oc...

Page 574: ...output regardless of what the SMU is sourcing and measuring Depending on the voltage that the AVM is set to the SMU clamps the output voltage to one of the built in voltage limits Refer to the Help pa...

Page 575: ...terminals FallTimeLinearSweep Performs a linear sweep of the falling transition time of the pulse Charge pumping current ICP is measured and graphed as a function of the fall time FreqFactorSweep With...

Page 576: ...he open short and load compensations of the CVU instrument as selected It generates a file that contains the open short and load compensation values to apply to the CVU readings that are returned from...

Page 577: ...d be used before running a DC test when the pulse and DC signals are connected together at each DUT terminal pmu_double_pulse_flash Defines and outputs 1 to 8 waveforms that consist of two pulses that...

Page 578: ...ge and the other SMU applies an offset DC bias Hotchuck_Temptronics3010B user library This user library controls the temperature of Temptronics 3010B hotchucks The user module in this library sets the...

Page 579: ...enCal4294 Performs OPEN calibration PhaseCal4294 Performs PHASE calibration ShortCal4294 Performs SHORT calibration A Keysight 4294 measurement is valid only if proper calibrations are performed befor...

Page 580: ...110 on page E 8 pgu trigger Specifies pulse count and trigger start of output ki340xulib user library Used with the Keithley Instruments Series 3400 pulse pattern generators ki340xulib user modules Us...

Page 581: ...lay cap file in the ivcvswitch project Places capacitance source values in a spreadsheet LoadCableCorrectionConstants on page B 33 n a Reads the cable compensation parameters for the range and frequen...

Page 582: ...82 and CTsweep82 modules It is not normally used as a stand alone module QTsweep82 on page D 38 qtsweep Performs quasistatic measurement sweep SaveCableCompCaps82 on page D 41 save cap file savecablec...

Page 583: ...V2 and V2 to 0 The sweeps are generated on PMU1CH1 Channel PMU1CH2 is kept at 0 V and measures current and charge doubleSweepSeg Creates a waveform that consists of two voltage sweeps 0 to V1 V1 to 0...

Page 584: ...itive pulses from 0 V to user specified Vp followed by two negative pulses to Vp reramEndurance The reramEndurance routine performs a series of double sweeps using the same parameters used for the sin...

Page 585: ...s measurements that are similiar to the vds id test in the Demo project for 4 terminal MOSFETs vgsid1 This test makes measurements that are similiar to the vgs id test in the Demo project for 4 termin...

Page 586: ...change in pulse base or amplitude while the drain channel outputs a swept pulse amplitude PMU_SegArb_Example This module configures multi segment waveform generation Segment Arb on two channels using...

Page 587: ...ented in the characterization of PRAM elements The routine allows specification of four pulses in one waveform RESET MEASURE SET and MEASURE The parameters of these pulses are determined by the user a...

Page 588: ...13 prober ss move In learn mode the PrSSMovNxt command causes the prober to move to the next subsite after inking QSCVulib user library The QSCVulib user library provides a user module to do quasistat...

Page 589: ...bias sweep The routine uses the maximum DC bias voltage expected_C and expected_R to determine the maximum current for the test and uses this current to set the current measure range for the test vlf...

Page 590: ...scription AbortRetryIgnoreDialog on page 6 322 abortretryignoredialog This user module creates a dialog box with Abort Retry and Ignore decision prompts InputOkCancelDialog on page 6 323 inputokcancel...

Page 591: ...lines to display Message1Text The text to display on the first line of the dialog box this line must be less than 40 characters Message2Text The text to display on the second line of the dialog box th...

Page 592: ...mpt char Input3 char Input4Prompt char Input4 status Returned values see Details NumberOfInputs The number of text lines to display Input1Prompt The text to display on the first line of the dialog box...

Page 593: ...message for each input An example of the entry in Clarius and the resulting dialog box are shown in the following graphics Returned values are placed in the Analyze sheet and can be 1 The OK button w...

Page 594: ...s NumberOfMessages The number of text lines to display Message1Text The text to display on the first line of the dialog box this line must be less than 40 characters Message2Text The text to display o...

Page 595: ...module This user module creates a dialog box that pauses the test sequence to make an announcement for example Test finished or prompt for an action for example connection change Usage status OkDialog...

Page 596: ...in the following graphics Returned values are placed in the Analyze sheet and can be 1 The OK button was selected 10050 WINULIB_ILLEGAL_NUM_MSG An illegal number of messages was specified 10051 WINUL...

Page 597: ...text to display on the first line of the dialog box this line must be less than 40 characters Message2Text The text to display on the second line of the dialog box this line must be less than 40 char...

Page 598: ...Also see None YesNoCancelDialog user module This user module creates a dialog box that contains up to four lines of text and Yes No or Cancel decisions Usage status YesNoCancelDialog int NumberOfMessa...

Page 599: ...he Cancel button was selected 6 The Yes button was selected 7 The No button was selected 10050 WINULIB_ILLEGAL_NUM_MSG An illegal number of messages was specified 10051 WINULIB_ILLEGAL_STRING_LEN The...

Page 600: ...ssages The number of text lines to display Message1Text The text to display on the first line of the dialog box this line must be less than 40 characters Message2Text The text to display on the second...

Page 601: ...4 Line one Line two Line three Line four Also see None Demo Project overview The Demo Project includes common DC I V C V and pulse I V tests for MOSFETs BJTs resistors diodes and capacitors These test...

Page 602: ...Analyzer Reference Manual Section 6 Clarius 4200A 901 01 Rev C February 2017 6 333 The top portion of the project tree for the Demo project is shown in the following graphic Figure 391 Demo project de...

Page 603: ...as a function of the sweeping gate voltage The test determines the gate leakage resistance using a linear line fit cv nmosfet Measures the capacitance as a function of the gate voltage between the gat...

Page 604: ...nd measures the resulting current of a diode This test uses two SMUs on either side of the diode You can also use one SMU and GNDU if they are set properly in the Configure pane For very low current m...

Page 605: ...ded parts for flash memory testing Recommended interconnect parts for flash memory testing Qty Description Comment Keithley Model Number 6 SMA tee female male female Trigger combine SMU and pulse chan...

Page 606: ...nection as it is assembled Always connect and torque adapter cable assemblies before attaching the assembly to the instrument cards Non axial stress on the bulkhead connectors on the SMU or pulse card...

Page 607: ...fferent methods to move charge 1 Tunneling 2 Hot charge injection HCI The tunneling method is commonly known as Fowler Nordheim FN tunneling or quantum tunneling and is a function of the electric pote...

Page 608: ...rix is more complicated but provides flexibility for certain tests and test structures that use arrays The second method uses the on card isolation relays on both the SMUs and the pulse cards to confi...

Page 609: ...up without using a switch matrix direct connect The pulse waveforms are a program pulse an erase pulse or a waveform made up of both program and erase pulses All of these waveforms are implemented by...

Page 610: ...Erase pulse waveforms for a floating gate DUT with separate pulse waveforms for the DUT gate drain source and bulk The block diagram for the flash setup is shown in the following figure To reconfigure...

Page 611: ...from connected to disconnected or open states for either the program or erase condition The following connection configuration does not require a switch matrix It provides four channels of pulse and f...

Page 612: ...meter Analyzer Reference Manual Section 6 Clarius 4200A 901 01 Rev C February 2017 6 343 Figure 402 Flash connections program erase and endurance testing using direct connection to a single stand alon...

Page 613: ...umber of applied program erase cycles increases Figure 403 Example results of voltage threshold shift in an Endurance test on a NOR flash cell Connections for endurance testing no switch matrix For a...

Page 614: ...meter Analyzer Reference Manual Section 6 Clarius 4200A 901 01 Rev C February 2017 6 345 Figure 404 Flash connections program erase and endurance testing using direct connection to a single stand alon...

Page 615: ...6 346 4200A 901 01 Rev C February 2017 Connections for endurance testing switch matrix A switch matrix is recommended for testing array test structures for endurance or disturb Figure 405 4200 900_Fl...

Page 616: ...ion at the top of array to the flash memory cells SMU2 and SMU3 are set to output 0 V This ensures that only the Cell 2 is turned on during pulse stressing Pulse stressing The output relay for SMU1 is...

Page 617: ...Section 6 Clarius Model 4200A SCS Parameter Analyzer Reference Manual 6 348 4200A 901 01 Rev C February 2017 Figure 406 Flash direct DUT connections Disturb testing...

Page 618: ...trix the number of adjacent cells that can be measured is limited Therefore it is recommended that a switch matrix be used for disturb testing Using a switch matrix allows the flexibility of routing p...

Page 619: ...nels 7 Note that the trigger is set to 1 in the first and fifth segments These are the first segments in the program and erase pulses in a typical two pulse program erase waveform It is recommended th...

Page 620: ...n import waveforms into the Subsite Stress Properties Note that if the same waveform is required in the test and the Subsite Stress Properties you must make sure the waveform information is the same f...

Page 621: ...insert the LEMO triaxial connector into the Force connector on the SMU in slot 4 8 Route the BNC cable from SMU4 to the DUT terminal bulk connection Connect a triaxial to BNC adapter if necessary 9 C...

Page 622: ...acent cards There should be three SMA tees used to connect the triggering across the four cards Make SMA to BNC connections to the DUT arrays 1 Connect an SMA to BNC adapter to a 1 5 m 5 ft black BNC...

Page 623: ...EL 1 of the pulse card in the right most slot the pulse card in the slot with the lowest number 19 Carefully insert the LEMO triaxial connector into the Force connector on the SMU in slot 1 20 Route t...

Page 624: ...the configuration of the Keithley Instruments 4200A SCS and all external system components supported by the Clarius applications You can add configure and remove supported switch matrices external GP...

Page 625: ...e view of all instruments and equipment in the 4200A SCS system configuration To expand or minimize the tree select the plus and minus symbols respectively The KCon work area displays information abou...

Page 626: ...tion Navigator contains each component in the system configuration Selecting a component in the Configuration Navigator displays the properties associated with the selected component in the Work Area...

Page 627: ...Generator Probe Station Test Fixture General Purpose Test Instrument Supported external instrumentation and equipment are controlled by Clarius user test modules UTMs Keithley Instruments provides li...

Page 628: ...igure shows the relationship between internal and external instrumentation and illustrates each instrument category Figure 411 Example system connections To add an external instrument 1 Select Add Ext...

Page 629: ...ng a Keysight 4284 4980A LCR Meter on page C 1 Keysight Model 4294 LCZ Meter HP4294ulib HP4294ulib user library reference on page 6 310 Pulse generator 3 Keithley Instruments Model 3402 Pulse Generato...

Page 630: ...s up to eight general purpose instruments GPIs Two terminal and four terminal types may be present in the system configuration simultaneously but the total number of GPIs must be less than eight Conta...

Page 631: ...ystem See the documentation for the instrument to determine the GPIB Address The address for some instruments is briefly displayed during the power on sequence To set the GPIB address for an instrumen...

Page 632: ...ate Configuration tests the system configuration to determine if there are configuration conflicts or communication problems between the instrumentation and the 4200A SCS This test can validate most o...

Page 633: ...connect the PMU SMUs and CVU to the RPM update the RPM configuration in KCon When you then open Clarius the system will detect the instrument connections to the RPM When an ITM is run Clarius will au...

Page 634: ...urns to the last saved configuration when you exit System Configuration Summary System Configuration Summary displays the system configuration From this display you can save the configuration or print...

Page 635: ...0A SCS Properties When you select KI 4200A SCS in the Configuration Navigator the Work Area displays the system configuration as shown in the figure below Figure 413 KI System Configuration informatio...

Page 636: ...uration tends to exhibit unstable characteristics such as oscillations or unstable device readings For the high resolution autorange method the SMU ranges at 100 percent of range This is the slowest a...

Page 637: ...to a switch matrix card column Make sure the number of pins assigned is appropriate for your system For supported external instruments the 4200A SCS provides user libraries that contain preconfigured...

Page 638: ...ibraries that are independent of the configuration For more information refer to Keithley User Library Tool KULT on page 8 1 To set the GPIB address 1 Select the instrument in the Configuration Naviga...

Page 639: ...a GPIB or RS 232 general purpose instrument in a Clarius project create a user library with KULT and use the LPT library I O functions kib and ksp to communicate with the general purpose instrument re...

Page 640: ...int symbol is displayed next to the selected address 4 Set the Reading Delimiter to determine the output data delimiter characters that are added to the end of each KXCI output message Select String T...

Page 641: ...B Source measure units SMUs 2 to 9 4 fixed Voltage monitor VM You can configure any SMU to function as a VM Up to 9 VMs are possible 2 fixed Voltage source VS You can configure any SMU to function as...

Page 642: ...s used for the device in your 4145B program Figure 417 KXCI Settings for 4145B emulation Command Set The Command Set option chooses the control mode through which KXCI runs the 4200A SCS 4200A Normal...

Page 643: ...ported SMUs only Custom A D control Not supported IT4 command options 200 V 1 A capability Supported 1 0 pA source measure range capability with preamplifer on SMU Supported KXCI always starts in the...

Page 644: ...onstant select the constant and select Edit Generate Technical Support Files The Technical Support Files option analyzes your 4200A SCS KCon stores the analysis results to a USB flash drive You can th...

Page 645: ...22 4200A 901 01 Rev C February 2017 KCon Learning Center The Learning Center provides access to all 4200A SCS information such as Instructions in text files and videos The 4200A SCS Technical Data Sh...

Page 646: ...nstrumentation analyze data or perform any other system automation task programmatically Once a user library has been successfully built using KULT its user modules can be executed using the Clarius s...

Page 647: ...derstanding the module identification area The module identification area is directly below the menu bar and defines the presently open user library and user module The components of this area are as...

Page 648: ...eters tab area and the return code data type The include and define statements that are specified in the Includes tab Understanding the module code entry area The module code entry area is below the m...

Page 649: ...for the Rdson42XX user module from the KI42XX library You can right click anywhere in the Parameters tab area to access the Add Delete and Apply options To add a parameter 1 Click Add 2 Enter the inf...

Page 650: ...r array type D_ARRAY_T Double precision array type I O field The I O field defines whether the parameter is an input or output type Click the arrow to the right of the I O field to select from the inp...

Page 651: ...ring h include math h include windows h In most cases it is not necessary to add items to the Includes tab area because keithley h provides access to the most common C functions However in some cases...

Page 652: ...esignators or in the Description tab area When the user module code is compiled KULT also evaluates the text in this area C code comment designators in the Description tab area can be misinterpreted c...

Page 653: ...ea Select All Selects everything in the Description tab area Build tab area The Build tab area displays any error or warning messages that are generated during a code compilation or build operation of...

Page 654: ...rary dialog box opens 2 Name the new user library 3 Click OK This initializes and opens the new user library in place of the presently open library Open Library Opens an existing user library in place...

Page 655: ...le Creates a copy of the open user module The name of the new module must not duplicate the name of any existing user module or user library in the entire collection of user libraries To copy the user...

Page 656: ...tion To import a c file 1 Click Include The Include Other File dialog box opens 2 Place the cursor where you want to place the new information 3 Browse and select a file or enter a file name and path...

Page 657: ...Library Dependencies refer to descriptions below and to details in the Working with interdependent user modules and user libraries on page 8 54 Otherwise the Build Library function will fail For exam...

Page 658: ...g the Keithley User Library Tool KULT A user module is a C language function that 1 Typically calls functions from the LPT library and ANSI C functions 2 Is developed using the Keithley User Library T...

Page 659: ...All of the user modules in the presently open user library and any libraries on which the presently open user module depends are linked together A DLL is created that is accessible using UTMs in Clari...

Page 660: ...the user library to include the new user module Finding build errors Checking the user module Tutorial 2 Creating a user module that returns data arrays on page 8 28 Naming a new user library and new...

Page 661: ...anguage This section contains a tutorial that shows you how to create a new user library and new user module A hands on example is provided that illustrates how to create a user library that contains...

Page 662: ...ibrary Continue with Creating a new user module on page 8 17 Creating a new user module When naming a user module conform to case sensitive C programming language naming conventions Do not duplicate n...

Page 663: ...ter display area use the scroll bar Continue with Entering the return type on page 8 18 Entering the return type If your user module generates a return value select the data type for the return value...

Page 664: ...Hz Duration of beep is long integer in units of milliseconds Beep Freq1 500 Beep at first frequency for 500 ms Beep Freq2 500 Beep at second frequency Beep Freq1 500 Beep Freq2 500 Sleep 500 NOTE del...

Page 665: ...values limit the choices the user sees For the TwoTonesTwice user module enter 1000 800 and 1200 respectively 7 For the TwoTonesTwice module add one more parameter with the values Parameter name Freq...

Page 666: ...User Library Tool KULT 4200A 901 01 Rev C February 2017 8 21 In the module parameter display area the function prototype now includes the declared parameters as shown here Figure 432 KULT window code...

Page 667: ...Documenting the user module on page 8 22 Documenting the user module To document the user module 1 Click the Description tab at the bottom of the dialog box to open the Description tab area 2 Enter an...

Page 668: ...ODULE TwoTonesTwice DESCRIPTION Execution results in sounding of four beeps at two alternating user settable frequencies Each beeps sounds for 500 ms INPUTS Freq1 double is the frequency in Hz of the...

Page 669: ...compilation was unsuccessful the error messages that were displayed in the KULT Compile message box are also displayed in the Build tab area True compilation errors errors that prevent the user module...

Page 670: ...Add the missing semicolon at the end of the code Sleep 500 and delete the comment about the missing semicolon 3 Select File Save Module 4 Compile the user module again The KULT Compile message box sh...

Page 671: ...e Build tab area displays either of the following If the compilation was successful this message appears No Errors Warnings Reported Library Build was Successful If the compilation was unsuccessful er...

Page 672: ...r now You can experiment later after you establish that the user module executes correctly Figure 438 Configured UTM 17 Select Help to verify that the HTML in the Description tab is correctly formatte...

Page 673: ...complete Tutorial 1 Creating a new user library and user module on page 8 16 Naming new user library and new VSweep user module To name new user library and new VSweep user module 1 Start KULT by dou...

Page 674: ...mVPoints double vstep v Declaration of module internal variables int i if Vstart Vstop Stops execution and returns 1 if return 1 sweep range is zero if NumIPoints NumVPoints Stops execution and return...

Page 675: ...name To enter the required parameters for the code 1 Click the Parameters tab 2 Enter the information for the two voltage input parameters as shown in the following table Click the Add button before...

Page 676: ...efault voltage array size When executing the VSweep user module in a UTM the current and voltage array sizes must match NumIPoints must equal NumVPoints If the sizes do not match the second return sta...

Page 677: ...the Options menu click Compile The user module compiles If the code and parameters were entered as specified you should not see error messages If you do see error messages check for typographic error...

Page 678: ...v_sweep_chk user module A default schematic and group of parameters are displayed for the UTM 15 For Vforce select Enter Values and enter the sweep values 16 Select Run 17 Select Analyze At the concl...

Page 679: ...evious tutorials Tutorial 1 Creating a new user library and user module on page 8 16 and Tutorial 2 Creating a user module that returns data arrays on page 8 28 The VSweep user module in the my_2nd_li...

Page 680: ...p 1 In the File menu click Copy Module The Copy Module list shown in the following figure opens Figure 443 Copy Module list box 2 Select my_2nd_lib in this case the user library for the copy is the sa...

Page 681: ...s the VSweepBeep user module Continue with Calling independent user module from VSweepBeep user module on page 8 36 You can also create a copy of the presently open user module in the same user librar...

Page 682: ...ULT 4200A 901 01 Rev C February 2017 8 37 3 Click Apply The Freq1 and Freq2 parameters are added to the function prototype as shown in the following figure Figure 445 Completed VSweepBeep user module...

Page 683: ...er modules that are called The VSweepBeep user module depends on the my_1st_lib user library To specify this dependency 1 In the Options menu click Library Dependencies The Library Dependencies list o...

Page 684: ...n page 8 26 The text of the tutorial specific guidelines below are almost identical to the text of the Tutorial 2 guidelines Also the data produced should be the same as the Tutorial 2 data However fo...

Page 685: ...measurements may not be representative of the actual drain current Therefore the calculated resistance may be incorrect In this example the user module is modified in KULT so that ten current measurem...

Page 686: ...ference Manual Section 8 Keithley User Library Tool KULT 4200A 901 01 Rev C February 2017 8 41 Open KULT From the desktop open the KULT tool by double clicking the KULT icon The KULT main window is sh...

Page 687: ...CS Parameter Analyzer Reference Manual 8 42 4200A 901 01 Rev C February 2017 Open the KI42xxulib user library 1 From the File menu select Open Library 2 From the Open Library dialog box select KI42xxu...

Page 688: ...ry Tool KULT 4200A 901 01 Rev C February 2017 8 43 Open the Rdson42XX user module 1 From the File menu select Open Module 2 From the Open Module window select Rdson42XX c as shown in the following fig...

Page 689: ...conform to case sensitive C programming language naming conventions Do not duplicate names of existing user modules or user libraries To create the new module 1 From the File menu select Copy Module 2...

Page 690: ...ol KULT 4200A 901 01 Rev C February 2017 8 45 Open and modify the RdsonAvg user module To open the user module 1 From the File menu select Open Module 2 Select RdsonAvg c from the Open Module dialog b...

Page 691: ...ing Id1 The 0 01 parameter is the delay between measurements 10 ms The source code for the module is in the module code area of the window In this area make the following changes Under Force the first...

Page 692: ...o MODULE RdsonAvg as shown in the following figure 3 Replace all occurrences of Rdson with RdsonAvg Figure 453 User module description Save compile and build the modified library You must save and com...

Page 693: ...ab 6 For the Custom Test select Choose a test from the pre programmed library UTM 7 Drag Custom Test to the project tree The test has a red triangle next to it to indicate that it is not configured 8...

Page 694: ...Managing user libraries This section addresses the following topics Updating and copying user libraries using KULT command line utilities on page 8 49 describes in more detail two command line utilit...

Page 695: ...the user library that is specified by the Start In user library directory which is the directory in which you start the kultcopy command To successfully copy a user library to the active user library...

Page 696: ...these subcommands new_lib del_lib add_mod compile_mod bld_lib The item library_name specifies the name of the library involved in the commanded action The item options includes one or more of these op...

Page 697: ...nd The add_mod subcommand lets you add or copy a user module from one user library source to another library target Its action is equivalent to the following KULT steps Starting KULT Selecting File Op...

Page 698: ...command lets you compile a user module in an existing user library Its action is equivalent to the following KULT steps Starting KULT Selecting File Open Library Selecting library_name the library tha...

Page 699: ...n the module that you are creating calls a module in another user library you must 1 Select Options Library Dependencies 2 Specify each called library from the list that is displayed You must select u...

Page 700: ...fier for example liba_ModuleName for user modules in liba This avoids duplicate user module names and prevents confusion with similarly named modules that are in other user libraries and source files...

Page 701: ...ence Manual 8 56 4200A 901 01 Rev C February 2017 A user module in liba calls a user module in libal In turn a user module in liba1 calls a user module in liba2 Finally a user module in liba2 calls a...

Page 702: ...s the correct reverse build order for the dependencies shown in the table and figure in Structuring dependencies hierarchically on page 8 55 This is a general procedure based on the assumption that ea...

Page 703: ...that another user has locked the module For example if two users attempt to access the VSweep user module in the my_2nd_lib user library created in Tutorial 2 Creating a user module that returns data...

Page 704: ...all lock files in both of the following directories KI_KULT_PATH lock KI_KULT_PATH library_name lock Execute the kultcleanlocks utility as follows 1 Click the Command Prompt icon on the desktop or in...

Page 705: ...ject file These files are placed in the KIPGM subdirectory KIPGM specifically and NAME generally are environment variables Each such environment variable is a string variable that stores a directory p...

Page 706: ...page 8 28 Checking the VSweep user module on page 8 32 This generates the file UTMname ktm at C s4200 Projects projectname tests which includes the necessary call to your user module Open UTMname ktm...

Page 707: ...ers Create a second level heading Place under a line to bold the line You can use any number of characters To create list Insert a blank line before the start of the list then use 1 2 and so on to num...

Page 708: ...g Pause test sequence with a prompt to continue OK RetryCancelDialog Pause test sequence with a prompt to Retry or Cancel YesNoCancelDialog Pause test sequence with a Yes No or Cancel decision prompt...

Page 709: ...If there are input parameters the entries for the input parameters are placed in the Analyze sheet for the action You can pass a parameter value into a user created routine To pass parameters the dial...

Page 710: ...ent 1 In the Clarius project tree select the last test The announcement will occur after this test 2 Choose Select 3 Select the Tests tab 4 For the Custom Test select Choose a test from the pre progra...

Page 711: ...l KULT Model 4200A SCS Parameter Analyzer Reference Manual 8 66 4200A 901 01 Rev C February 2017 14 Select Save When you run the test sequence the end of test dialog box is displayed as shown in the g...

Page 712: ...over the general purpose instrument bus GPIB or ethernet You define the type of communications in KCon in the KXCI Settings options When controlled by an external computer the 4200A SCS functions lik...

Page 713: ...raries remotely Describes the set of KXCI commands available to make use of KULT user libraries from a remote interface KXCI ethernet client driver Describes the supplied driver DLL used to control KX...

Page 714: ...to connect to the 4200A SCS as shown in the figure in Communications connections on page 9 2 Using KCon to configure KXCI You use the Keithley Configuration Utility KCon to configure KXCI Use KCon to...

Page 715: ...n select the Keithley 4200A Normal the default or Keysight 4145 Emulation In many cases test programs developed for use with a 4145B Parameter Analyzer run without modification when they are used with...

Page 716: ...all internal and external instruments When KXCI is running the 4200A SCS is a subordinate to a controlling computer over GPIB or ethernet To start KXCI 1 Close Clarius 2 Select the KXCI icon on the d...

Page 717: ...ptional graphics commands the right side of the KXCI user interface displays a graph of the test results To hide the graph select the Hide Graph button which provides a larger display area for command...

Page 718: ...and message display area displays each command as it is received as shown in the figure below Figure 463 Command and message display area If Console Logging Enabled is selected KXCI also logs each com...

Page 719: ...the graph display area graphs the test data Refer to Graphing the test results on page 9 9 section Understanding the log file If the Log Console Messages check box is selected lower left of the user i...

Page 720: ...sults If you have sent the graphics commands the DM1 command followed by the X axis and Y axis configuration commands KXCI displays a graph of the generated data See the example graph and graphics com...

Page 721: ...operating mode These commands are summarized in Commands common to system and user modes on page 9 12 4200A only commands These commands are specific to the 4200A mode cannot be used if 4145 Emulation...

Page 722: ...age or current setup on page 9 26 SC command Constant VS setup on page 9 27 HT command Set sweep hold time on page 9 27 DT command Set sweep delay time on page 9 28 SM page command strings The measure...

Page 723: ...mmands Triggering on page 9 42 Commands common to system and user modes Some commands are common to the system and user modes as listed below Descriptions of these commands are provided in Commands co...

Page 724: ...example 0 1234 or floating decimal format for example 123 4e 3 Maximum number of characters for the value is 12 The maximum number of digits for an exponent is 2 System mode commands Most system mode...

Page 725: ...function VAR1 VAR2 constant or VAR1 When the source mode D is set to common 3 the source function E must be set to constant 3 The VAR1 source function performs a linear or logarithmic sweep The VAR1 f...

Page 726: ...nd VS9 For example in a system containing four SMUs you can use SMU2 as VS5 For each voltage source that is used you must specify a name and select the source function The VAR1 function performs a vol...

Page 727: ...not define one of the 4200A SCS SMUs to emulate a VM attempts to measure voltages through the nonexistent VM result in data values of 9 000e 37 If nothing is specified after the prefix and channel nu...

Page 728: ...1050 A Current source 4210 SMU 1 0500 A to 1 0500 A For a log sweep do not set a step value steps are determined by the setting for B FFF FFFF Compliance value also see Details Voltage source 210 00 V...

Page 729: ...9 18 4200A 901 01 Rev C February 2017 When VAR1 is a selected source function it does a sweep that is synchronized to the steps of the VAR2 step function The VAR1 sweep is repeated whenever VAR2 goes...

Page 730: ...art to 5 V stop in 1 V steps With a logarithmic sweep mode selected log base 10 25 or 50 only specify the start and stop values Step size is automatically set to provide a symmetrical sweep on the log...

Page 731: ...U only BBB BBBB Start value Voltage source 210 00 V to 210 00 V Current source 4200 SMU 0 1050 A to 0 1050 A Current source 4210 SMU 1 0500 A to 1 0500 A CCC CCCC Step value Voltage source 210 00 V to...

Page 732: ...1 VS9 is being used the source mode must be voltage for configuration details refer to Keithley Configuration Utility on page 7 1 If the source stepper index FF is omitted the default is 1 first stepp...

Page 733: ...ntrols auto standby Usage ST A B A SMU channel number 1 to 9 B Enable or disable auto standby 0 Disable auto standby 1 Enable auto standby Details For a SMU the ST command controls auto standby When a...

Page 734: ...RT FS The VAR1 sweep shown in the example in VR and IR on page 9 17 has five steps 1 V 2 V 3 V 4 V and 5 V The corresponding VAR sweep has the following steps when RT 3 and FS 2 VAR1 step 1 1 V 3 2 5...

Page 735: ...FS The VAR1 sweep shown in the example in VR and IR on page 9 17 has five steps 1 V 2 V 3 V 4 V and 5 V The corresponding VAR sweep has the following steps when RT 3 and FS 2 VAR1 step 1 1 V 3 2 5 V...

Page 736: ...cted source function it does a list sweep with arbitrary sweep points in order of the defined sweep parameters If the source that is being used is a SMU the source mode for the sweep can be voltage or...

Page 737: ...Current source 4200 SMU 0 1050 A to 0 1050 A Current source 4210 SMU 1 0500 A to 1 0500 A DDD DDDD Compliance value Voltage source 210 00 V to 210 00 V Current source 4200 SMU 0 1050 A to 0 1050 A Cu...

Page 738: ...ixed constant voltage level If nothing is specified after the channel number the channel is turned off The range of possible values for A depends on how instruments are mapped in KCon The parameter A...

Page 739: ...it takes to make a measurement You typically use the delay time to allow the source to settle before making a measurement For example assume a delay time of 1 s At each step of the sweep the source i...

Page 740: ...ence by setting a wait time The test sequence starts after the wait time period expires Example WT 0 1 This command string sets the wait time to 100 ms Also see None IN This command sets the time inte...

Page 741: ...f sample measurements that can be made The readings are stored in the buffer Example NR 200 This command string sets up the 4200A SCS to make 200 sample measurements Also see None DM This command sele...

Page 742: ...d the LI command enables functions to be measured in a test sequence To enable a function include the SMU channel name as assigned by the CH command voltage source name as assigned by the VS command o...

Page 743: ...Volts 9999 Amps 999 DDDD DDD X axis maximum value Volts 9999 Amps 999 Example XN V1 1 5 5 This command string Specifies that values from SMU channel V1 are to be plotted on the X axis Sets up the X a...

Page 744: ...t be one of the SMU channel names that you specify on the channel definition DE page B Y1 axis scale type Linear scale 1 Log scale 2 Log scale absolute value 3 CCCC CCC Y1 axis minimum value Volts 999...

Page 745: ...DE page B Y2 axis scale type Linear scale 1 Log scale 2 Log scale absolute value 3 CCCC CCC Y2 axis minimum value Volts 9999 Amps 999 DDDD DDD Y2 axis maximum value Volts 9999 Amps 999 Example YB I2...

Page 746: ...ogrammed number of measurements The measured readings are stored in the buffer Note that the buffer is cleared before readings are stored The ME3 command also triggers the test but does not clear the...

Page 747: ...uter To access the timestamp data that was acquired along with voltage or current measurements or both use the command DO CHnT where n Absolute channel number Unlike V and I name strings this label ca...

Page 748: ...I You specify the name for the file The get command string is used to acquire the saved file Example SV P Setup1 This command string saves the command sequence as a program file named Setup1 Also see...

Page 749: ...and with any system mode page It maps channel n to a given VS SMU or VM function MP This command maps channel n to a given VS SMU or VM function Usage MP A BBBC A The channel to be mapped a value betw...

Page 750: ...B Range Auto 0 Best fixed range determined by maximum sweep parameters 2 Fixed range 0 to 1 0 Details The default setting is autorange for backward compatibility If you specify a range that is below t...

Page 751: ...V range 5 only with a preamplifier Current source range Autorange 0 1 nA range only with a preamplifier 1 10 nA range only with a preamplifier 2 100 nA range 3 1 A range 4 10 A range 5 100 A range 6 1...

Page 752: ...minimum allowable value 1 pA with a preamplifier installed and 100 nA without a preamplifier KXCI sets it to the minimum allowable value Example DV1 1 10 10E 3 This command string configures SMU1 to...

Page 753: ...I These commands trigger a measurement Usage AABB AA Type of measurement Voltage TV Current TI BB Measure channel for voltage measurements SMU1 1 SMU2 2 SMU3 3 SMU4 4 VM1 5 VM2 6 SMU5 7 SMU6 8 SMU7 9...

Page 754: ...ng the command string to trigger a measurement and addressing the 4200A SCS to talk the output data string is sent to the computer in the following format X Y Z N NNNN E NN Where X The status of the d...

Page 755: ...speed KXCI provides three preconfigured integration time settings that are equivalent to the Fast Normal and Quiet settings available in Clarius Short is equivalent to the Clarius Fast setting Medium...

Page 756: ...fixed Voltage source VS You can configure any SMU to function as a VS Up to 9 VSs are possible 2 fixed Also see None DR This command enables or disables service request for Data Ready Usage DRA A Set...

Page 757: ...mber of digits 4200A command set 3 to 7 4145 Emulation command set 3 to 5 Example RS 7 This command string provides full SMU resolution when the 4200A command set is selected Also see None RI This com...

Page 758: ...1 A Details The default autoranged ranges are 100 nA without a preamplifier and 1 nA with a preamplifier Example RG 2 10E 12 This command string sets the lowest range of SMU2 with a preamplifier to 10...

Page 759: ...liance Off do not exit if compliance is reached 0 On exit if compliance is reached 1 Example EC 1 This command enables exit on compliance Also see None EM This command switches between 4145 Emulation...

Page 760: ...n VSn or VMn where n is the channel number 1 to 9 and SMU Medium power SMU without a preamplifier HPSMU High power SMU without a preamplifier SMUPA Medium power SMU with a preamplifier HPSMUPA High po...

Page 761: ...commands do not affect the KXCI configuration settings Use either of the following C programming commands GPIB address 17 to return the SMUs to their power on default settings transmit UNL LISTEN 17 S...

Page 762: ...rom the setup DE CH1 CH2 CH3 CH4 VM1 VM2 VS1 VS2 The above shows the method for a system with eight SMUs A system with only four SMUs would not require the last four definitions DE CH1 CH2 CH3 CH4 Cha...

Page 763: ...string and addressing the 4200A SCS to talk the output data string is sent to the computer in the following format X N NNNNE NN X N NNNNE NN X N NNNNE NN Data status The hierarchy for data status is...

Page 764: ...string is sent to the computer in the following format XYZ N NNNN E NN Data status The hierarchy for data status is L V X C T N where X is N Normal L Interval too short V Overflow reading A D convert...

Page 765: ...atus byte and serial polling Status byte The status byte is an 8 bit register that provides status information on instrument operation When a particular operating condition occurs one or more bits of...

Page 766: ...device clear command DCL or SDC command is sent to the 4200A SCS When bit B6 sets the SRQ service request indicator on the KXCI user interface turns on It turns off when B6 is cleared Serial polling T...

Page 767: ...ate system control using an external computer communicating through GPIB For these programs configure KXCI as follows GPIB address 17 Delimiter Comma EOI Off Program 1 VAR1 and VAR2 sweep system mode...

Page 768: ...following program demonstrates how to program the 4200A SCS to perform a basic source measure operation It assumes that channels 1 and 2 of the KXCI are configured for the SMU function The measured c...

Page 769: ...G1 status Output data IC is the measure channel SMU3 used by Program 1 send addr DO IC status Obtain data enter recv MAXLEN len addr status GPIB error messages KXCI error messages and numbers are show...

Page 770: ...ons for PGUs and PMUs on page 13 91 for details on pulsing functions PD This command sets the output impedance pulse load Usage PD A BBB BBBB A Pulse card channel number 1 to 8 the largest value is th...

Page 771: ...fault 1 Corresponding LPT library functions pulse_trig on page 13 152 pulse_burst_count on page 13 138 Details The trigger mode setting affects both channels of a pulse card For example setting channe...

Page 772: ...1 C Output mode Normal 0 default Complement 1 Corresponding LPT library functions pulse_output on page 13 146 pulse_output_mode on page 13 147 Example PO 1 1 1 This command string turns on channel 1 o...

Page 773: ...fault 100e 9 EEE EEEE Fall time in seconds floating point number High speed 10e 9 to 33e 3 High voltage 50e 9 to 33e 3 Default 100e 9 Corresponding LPT library functions pulse_period on page 13 148 pu...

Page 774: ...ltage 20 0 to 20 0 Default 0 0 CCC CCCC Pulse low in volts 5 V range high speed 5 0 to 5 0 20 V range high voltage 20 0 to 20 0 Default 0 0 DDD DDDD Pulse range in volts 5 V range 5 20 V range 20 Defa...

Page 775: ...Default 1 rising edge Corresponding LPT library functions pulse_delay on page 13 141 pulse_trig_polarity on page 13 154 pulse_output on page 13 146 Details This command sets pulse delay and trigger po...

Page 776: ...ng using channel 1 or 2 sets the card to the specified source card 1 Similarly channel 3 or 4 sets the source for card 2 With an external trigger source selected the PG command will select the trigger...

Page 777: ...urn the entire buffer of test data Many of the CVU commands are valid in both user and system mode In user mode the command is processed immediately and sent directly to the card In system mode the pa...

Page 778: ...None CVU SWEEP FREQ This command configures the CVU to sweep frequency and sample Z measurements for the selected CVU card Usage CVU SWEEP FREQ fstart fstop CVU SWEEP FREQ fstart fstop order fstart Th...

Page 779: ...EEP ACV This command configures the CVU to sweep AC voltage and sample Z measurements for the selected CVU card Usage CVU SWEEP ACV acvstart acvstop acvstep acvstart Start AC voltage acvstop Stop AC v...

Page 780: ...t CVU BIAS DCV SAMPLE Also see None CVU SAMPLE HOLDT This command sets the hold time for a sampling mode test on the selected card Usage CVU SAMPLE HOLDT holdt holdt Hold time 0 to 999 s Details This...

Page 781: ...commands Valid voltage levels are 30 V to 30 V Also see None CVU TEST RUN This command starts a CVU test on the specified card Usage CVU TEST RUN Details Use the serial poll byte to determine when not...

Page 782: ...le the DCV output 1 Leave the state active 0 Also see None CVU DATA Z This command queries the Z measurement of the CVU when a test is complete Usage CVU DATA Z Details Z measurements are returned as...

Page 783: ...ce a test is complete Usage CVU DATA TSTAMP Also see None Modeless commands CVU CHANNEL chan This command selects the CVU card on which subsequent CVU commands will act Usage CVU CHANNEL chan chan CVU...

Page 784: ...E This command sets User or System mode Usage CVU MODE mode mode The mode 0 User Mode 1 System Mode Also see None CVU RESET This command sends a soft reset to the specified card Usage CVU RESET Detail...

Page 785: ...Normal 2 Quiet 3 Custom delay_factor 0 to 100 filter_factor 0 to 100 aperture 0 006 to 10 002 PLCs Details The parameters delay_factor filter_factor and aperture are only used if speed is set to custo...

Page 786: ...le Also see None CVU ACZ RANGE This command sets the AC measurement range for the specified CVU card Usage CVU ACZ RANGE range range Range 0 Auto 1e 6 1 A 30e 6 30 A 1e 3 1 mA Also see None CVU FREQ T...

Page 787: ...CVIV cable with 0 75 m CVIV to DUT cable 4 wire mode 7 0 Blue 1 5 m CVU to CVIV cable with 0 61 m CVIV to DUT cable 4 wire mode Also see None CVU CORRECT This command enables or disables open short a...

Page 788: ...erforms load compensation and collects the load compensation cable data for the CVU Usage CVU CABLE COMP LOAD Also see Connection compensation on page 4 10 CVU CABLE COMP MEASCUSTOM This command perfo...

Page 789: ...Also see None Code examples Example 1 The following code segment sets CVU1 to perform a system mode sweep of DC voltage from 5 V to 10 V in 1 V steps After the test completes the Z DCV F timestamps an...

Page 790: ...tus Start the test send addr CVU TEST RUN status Monitor the spoll byte for test completion WaitForTestCompletion Query all the data send addr CVU DATA Z status enter recvstr MAXLEN len addr status se...

Page 791: ...d send addr CVU RESET status Set measurement model to Cs Rs send addr CVU MODEL 3 status Set speed to Quiet send addr CVU SPEED 2 status Set AC drive level to 30 mV at 10MHz send addr CVU ACV 0 030 st...

Page 792: ...t parameter The parameter is specified by name GP get parameter by number on page 9 84 Returns the parameter value or values for the specified input or output parameter The parameter is specified by n...

Page 793: ...mpty see example below When used before the GN or GP commands you may need to add a delay to allow the execution of the module to finish Example EX my_2nd_lib VSweep 0 5 11 11 Assume that the followin...

Page 794: ...y If NumValues is not used one value is returned Arrays are returned as a list of values separated by semicolons The value returned for an input parameter is the given value The values returned for an...

Page 795: ...t is an array If NumValues is not used one value is returned Arrays are returned as a list of values separated by semicolons The value returned for an input parameter is the given value The values ret...

Page 796: ...dule The name of the User Module to be run Details Example GD my_2nd_lib VSweep This command queries the description of the user module in the example in EX execute on page 9 82 The description is dis...

Page 797: ...The result string contains the following information for each instrument card in the 4200A SCS chassis Slot number Instrument card ID Model number Serial number Hardware version Firmware version Cali...

Page 798: ...l number System software version System platform version Clarius application version The results are comma separated Example Example system info output serialno 1209478 swver 4200A 852 1 0 platformver...

Page 799: ...17 PortNum IP Port assigned in KXCI tab of KCon err Socket error code returned by WSAGetLastError int SendKXCICommand_C char cmdstr char ReturnString int err cmdstr KXCI command string for example DE...

Page 800: ...he card tab All other card types are identified as VPU Starting KPulse To open KPulse double click KPulse on the desktop The following example shows one PMU installed in the system From the user inter...

Page 801: ...eference Manual 10 2 4200A 901 01 Rev C February 2017 Figure 469 KPulse GUI KPulse setup and help The KPulse menus include File Use this menu to load and save KPulse setups and exit KPulse By default...

Page 802: ...10 3 for more information Figure 470 KPulse Options dialog box Help Use this menu to access the Learning Center information and to open the About KPulse dialog box Triggering With a Keithley pulse ca...

Page 803: ...veforms for each enabled channel Each waveform previewer shows the high and low levels and timing for the waveform In the next figure the configuration shown in the waveform previewer for Channel 1 us...

Page 804: ...settings are changed Select Apply Settings the button with the light blue arrow to manually apply settings Select Reset All to return the pulse card to the Standard Pulse waveform type and its default...

Page 805: ...in the last segment Start stop and time restrictions The start level of the first segment and the stop level of the last segment must be the same In the following figure Segment 1 start and Segment 7...

Page 806: ...ges Immediately to enable automatic update for pulse output After the outputs are turned on the pulse output updates immediately when the settings are changed Select Apply Settings the button with the...

Page 807: ...ols 2 Select Export Segment Arb to open the Segment Arb Export dialog box Figure 473 Segment Arb Export dialog box 3 Select the pulse card and channel for the waveform to be exported 4 Select 5 Locate...

Page 808: ...s on page 10 13 for information about the waveform types available for custom file arb Refer to Custom Arb file operation Select and configure waveforms on page 10 10 for details 2 Copy the waveforms...

Page 809: ...shown in the following figure Figure 475 Custom Arb file operation Select and configure waveforms 3 Select the Waveform Type to be created 4 Configure the Settings for the selected waveform type 5 Sel...

Page 810: ...e Scratch Pad Sequencer previews enabled waveform sequences To preview the waveforms in the Sequencer select Enable Channel 1 or Enable Channel 2 3 Select the scale for the graph Points Scale or Time...

Page 811: ...equencer 8 Set the Time per Point in seconds This is the time interval between each point in the waveforms 9 Save the waveforms as a Keithley Arb File kaf By default kaf files are saved in the folder...

Page 812: ...mode To configure other installed pulse cards for Custom File Arb repeat steps 1 through 6 7 Turn on all enabled channels Select the green triangle to turn on enabled channels for all installed pulse...

Page 813: ...Scratch Pad After changing one or more settings select Preview to display the waveform Select OK to place the waveform in the Scratch Pad Figure 478 Sine waveform Square waveform An example of a squa...

Page 814: ...K to place the waveform in the Scratch Pad Figure 480 Triangle waveform Custom waveform An example of a custom waveform is shown in the following figure The waveform for this example is named CUSTOM1...

Page 815: ...in the below figure commas are not used to separate values csv file format As shown in the below figure commas are used to separate values Only the first column of data is used for the waveform Additi...

Page 816: ...on two selected Scratch Pad waveforms In the below example SINE1 is added to Ramp After selecting the two waveforms and the math operation select Preview to display the result of the calculation Selec...

Page 817: ...in the Scratch Pad After changing one or more settings select Preview to display the waveform Select OK to place the waveform in the Scratch Pad Figure 485 Gaussian waveform Ramp waveform An example...

Page 818: ...w graphic The waveform for this example is named SEQ1 but can be any name that is not already used in the Scratch Pad A sequence waveform consists of the waveforms that are present in the Channel 1 or...

Page 819: ......

Page 820: ...e removed if the instrument is sent in for service Back up the applications and any data related to them before sending the instrument in for service Do not reinstall or upgrade the Microsoft Windows...

Page 821: ...ta protection and privacy because each user can log onto the 4200A SCS using a unique logon name and password Setting up multiple Windows user accounts is an advanced system administration procedure t...

Page 822: ...or multiple users You cannot use multiple directories for the 4200A SCS If you have multiple users that are using one 4200A SCS you can use options in the My Project dialog box and in the Library Info...

Page 823: ...of Reader are displayed 4 Select Toggle Touch Mode as shown in the following graphic The scroll bar and other controls are now available Figure 488 Acrobat Toggle Touch Mode System level backup and r...

Page 824: ...commends backing up the following files and directories where applicable The default user directory When a 4200A SCS is received from the factory the C s4200 kiuser directory contains all installed te...

Page 825: ...drive Refer to the Embedded computer policy on page 1 4 for information about upgrading Microsoft Windows software and installing third party software Protect the system from viruses which can reach...

Page 826: ...the Windows start menu type mmc exe in the search box The results display the Windows Group Policy Editor 3 Press Enter to open the application 4 From the top tool bar select File Add Remove Snap in 5...

Page 827: ...ve account mentioned in the first step of this topic 18 Select Save The policy file will be saved with an msc extension 19 Select and run this file to activate the policy Add Clarius applications to t...

Page 828: ...input of the unit Turn off the power and disconnect the line cord before replacing the fuses Failure to turn off the power and disconnect the line cord before replacing the fuses may result in person...

Page 829: ...e the Front Panel Control option to adjust the brightness of the screen and to enable or disable the touch screen The Front Panel Control option is in the Windows system tray at the bottom right of th...

Page 830: ...ck the entire instrument in its original packing carton or the equivalent and follow these instructions Call Keithley Instruments repair department at 1 800 935 5595 for a Return Material Authorizatio...

Page 831: ...select Start 2 In the Keithley Instruments folder select the Firmware Upgrade tool If your instrument needs to be upgraded the Upgrade button is active and the Status column shows Upgrade Required 3...

Page 832: ...ine recalibrates the current and voltage offsets for all source and measurement functions of all SMUs in the system Before initiating a calibration allow the system to warm up for at least 30 minutes...

Page 833: ...arning dialog box is displayed 6 Select OK The SMU Auto Calibration dialog box opens as shown in the following figure Figure 491 SMU Auto Calibration dialog box 7 Select Start A progress bar is displa...

Page 834: ...ing the 4200A SCS is shut down to prevent system damage from overheating If the system was powered down because of a fan problem and is then powered up another warning message is displayed to indicate...

Page 835: ...ns A SMU that is sourcing voltage is stable when driving capacitive loads up to 10 nF However at the lower current measurement ranges large capacitive loads may increase settling time and may cause ov...

Page 836: ...transistor FET or bipolar junction transistor BJT can aggravate system stability The next figure shows an example of BJT characterization curves determined under stable conditions Figure 493 Effects o...

Page 837: ...frequencies DC to 100 kHz occur when the gain of a transistor under test interacts with the output impedances of the connected SMUs The following ratios of impedance Z determine the gains of the trans...

Page 838: ...kage currents generated currents noise and source impedance and voltage burden Refer to the Keithley Instruments Low Level Measurements Handbook for more information Leakage currents Leakage currents...

Page 839: ...fA Dirty epoxy circuit board 100 pA Offset currents The preamplifier has a small current known as the input offset current that flows at all times As shown in the figure below the input offset curren...

Page 840: ...non vibrating surface such as a wall bench or rigid structure Other solutions to movement and vibration problems include Remove or mechanically decouple vibration sources such as motors pumps and othe...

Page 841: ...sorption in an insulator can occur when a voltage across that insulator causes positive and negative charges within the insulator to polarize When the voltage is removed the separated charges generate...

Page 842: ...ce values based on measurement range The next table summarizes minimum recommended source resistance values for various measurement ranges Minimum recommended source resistance values Range Minimum re...

Page 843: ...fast normal and quiet and a custom setting To achieve a low noise measurement the quiet setting is recommended The trade off is that measurement speed is slower in comparison to the fast and normal se...

Page 844: ...include a shielded room a shielded booth shielding the sensitive circuit test fixture and using shielded cable The shield should usually be connected to a solid connector that is connected to signal...

Page 845: ...earth ground A large ground current flowing in the loop will encounter small resistances either in the conductors or at the connecting points This small resistance results in voltage drops that can a...

Page 846: ...lay matrix and instrumentation for parametric tests This section lists the commands included in the LPT library and describes how to use them The descriptions include A brief description of the comman...

Page 847: ...s the use of the trigXl or trigXg command more than once with different levels in a single test sequence delay on page 13 12 Provides a user programmable delay in a test sequence devint on page 13 13...

Page 848: ...ds data from an instrument connected to a serial port kspsnd on page 13 32 Sends a device dependent command to an instrument attached to a RS 232 serial port PostDataDouble on page 13 33 Posts double...

Page 849: ...user defined forcing array logarithmic sweep or other custom forcing commands avgX on page 13 62 Makes a series of measurements and averages the results bmeasX on page 13 63 Makes a series of readings...

Page 850: ...atus on page 13 96 PMU Used to determine how many readings are stored in the data buffer pulse_conncomp on page 13 96 PMU Enables or disables connection compensation pulse_exec on page 13 98 PGU PMU U...

Page 851: ...rb waveform file devclr on page 13 67 Sets all sources to a zero state devint on page 13 13 Resets all active instruments in the system to their default states getstatus on page 13 70 Returns the oper...

Page 852: ...ile on page 13 165 Used to load a waveform from an existing Segment Arb waveform file CVU commands Command Description adelay on page 13 59 Specifies an array of delay points to use with asweepX comma...

Page 853: ...ed DC bias voltages in real time for a sweep smeasz on page 13 189 Performs impedance measurements for a sweep smeaszRT on page 13 191 Makes and returns impedance measurements for a voltage or frequen...

Page 854: ...cn command because the execut command clears the table The clrscn command is only required when multiple sweeps and multiple sweep measurements are used in a single test sequence Example double res1 1...

Page 855: ...are cleared Then 5 V is forced to the gate and the measurement process is repeated Results from these second measurements are stored in an array called res2 This example gets the measurement data nee...

Page 856: ...age or current levels may be used repeatedly within a command if each is separated by a clrtrg command Example double forcur 11 revcur 11 Defines arrays conpin SMU1 1 0 conpin GND 2 0 trigil SMU1 5 0e...

Page 857: ...ple triggers to be programmed twice in the same test sequence Each result is returned to a separate array Figure 501 Diode conduction characteristics Also see asweepX on page 13 59 bsweepX on page 13...

Page 858: ...Because this type of diode has very high capacitance and low leakage current a 20 ms delay is added After the delay current through SMU1 is measured and stored in the variable IR4 Also see rdelay on p...

Page 859: ...nstruments by sending the string defined with kibdefint 6 Resets the active instrument cards Instrument cards are reset in the following order 1 SMU instrument cards 2 CVU instrument cards 3 Pulse ins...

Page 860: ...Fall of 100 ns Width of 500 ns Voltage high and low of 0 V Load of 50 If in segmented arb mode Start Voltage is 0 V If in arbitrary waveform mode Table Length is 100 Also see clrcon on page 13 199 cl...

Page 861: ...identification code of the timer module TIMERn Details Sending enable TIMERn initializes and starts the timer and allows other measurements to read the timer The time starts at zero 0 at the time of...

Page 862: ...e user modules can be developed in a configuration independent manner Given an instrument identification code and an attribute name string this module returns the specified attribute value string If t...

Page 863: ...MODELNUM KIPMU4225 CVIVx MODELNUM KICVIV GNDU MODELNUM GNDU Also see None getinstid This command returns the instrument identifier ID from the instrument name string Usage int getinstid char instr_na...

Page 864: ...code of the first error encountered since the last call to the devint command Also see devint on page 13 13 imeast This command forces a reading of the timer and returns the result Usage int imeast in...

Page 865: ...tention ATN 2 Sends byte string command buffer 3 De asserts ATN GPIB command list GPIB command Data byte Hex Comments Universal LLO local lockout DCL device clear SPE serial poll enable SPD serial pol...

Page 866: ...GPIBtrigger 5 0x3F 0x2F 0x08 0x3F 0x00 Unlisten 3F UNL Listen address 32 15 2F Group Execute Trigger GET 08 UNL Terminate string with NULL status kibcmd 30 strlen GPIBtrigger GPIBtrigger Use 3s timeou...

Page 867: ...any external GPIB device is cleared with the given string Each call to kibdefclr copies parameters into a data structure within the tester memory These data structures are allocated dynamically After...

Page 868: ...eviously made with the kibdefclr Keithley GPIB define device clear and kibdefint Keithley GPIB define device initialize commands Usage int kibdefdelete void Details Once this command is issued any pre...

Page 869: ...rnal GPIB device is initialized with the rest of the known instruments Each call to kibdefclr copies parameters into a data structure within the tester memory These data structures are allocated dynam...

Page 870: ...eceive buffer size this is the maximum number of bytes that can be read from the device rcv_len The number of bytes that are read from the device on the GPIB interface this variable is returned by the...

Page 871: ...trument device does not support secondary addressing this parameter must be 1 timeout The GPIB timeout for the transfer in 100 ms units for example timeout 40 4 0 s send_len The number of bytes to sen...

Page 872: ...his parameter must be 1 timeout The GPIB polling timeout in 100 ms units for example timeout 40 4 0 s serial_poll_byte The serial poll status byte returned by the device presently being polled Details...

Page 873: ...y device After SRQ is asserted a serial poll sequence is initiated for the device and the serial poll status byte is returned The kibsplw command does the following 1 Waits with timeout for general SR...

Page 874: ...t status status kspcfg 1 19200 8 1 1 1 port 1 19200 baud 8 bits odd parity 1 stop bit and xon xoff flow ctl This example uses kspcfg to set port 1 to 19200 baud 8 data bits odd parity 1 stop bit and X...

Page 875: ...ned using the kspdefclr command The kspdefdelete command can be used to delete any previous definitions The kspdefclr and kspdefint command strings are sent before normal for example a SMU instrument...

Page 876: ...0 s to 600 s buffsize The length of the string to send to the serial device buffer A character string that contains the data to send to the serial device Details This string is sent during the normal...

Page 877: ...o control the maximum number of characters that can be read from the device rcv_len The actual number of characters read from the device this value is returned to the ksprcv command by the software rc...

Page 878: ...surement point is finished and a data value is assigned to the corresponding output variable If you do not need to analyze or manipulate the test data before posting it into the Analyze sheet you can...

Page 879: ...ot posted into the sheet Also see Enabling real time plotting for UTMs on page 8 14 PostDataDoubleBuffer on page 13 94 pulse_fetch on page 13 101 pulse_meas_sm on page 13 108 pulse_measrt on page 13 1...

Page 880: ...able to be transferred For example if DrainI 10 is transferred then you call PostDataString DrainI DrainI 10 Also see None rdelay This command sets a user programmable delay Usage int rdelay double n...

Page 881: ...ogs the force point that the buffer specified by the rtfary command Locate the rtfary command before the sweep The number of data points returned by the rtfary command is determined by the number of f...

Page 882: ...to hold all measurements made before the scan table is cleared The scan table is cleared by an explicit call to the clrscn command or implicitly when the devint or execut command is called When making...

Page 883: ...13 44 smeasX on page 13 45 searchX This command is used to determine the voltage or current required to get a current or voltage It is useful in finding initial threshold points such as junction brea...

Page 884: ...ange is then divided in half for the next iteration A total of 16 iterations can be programmed When all iterations are completed a value of voltage or current is returned as the result of the search o...

Page 885: ...eps and the actual current or voltage range used by the instrument For example assume the minimum and maximum values of the source range are from 0 V to 20 V and the number of iterations is 16 The 20...

Page 886: ...d to generate a drain current of 1 A Eight separate gate voltages within the range of 0 6 V through 1 7 V are specified by the searchv command After the eight iterations complete the drain current is...

Page 887: ...M is used to set operating characteristics of the system The following table describes setmode modifier parameters that are supported for KI_SYSTEM modifier value Comment KI_TRIGMODE KI_MEASX KI_INTEG...

Page 888: ...FAST NORMAL or QUIET modes the delay factor is set internally by these modes so changing the value while using one of the predefined modes corrupts the speed settings or the delay factor KI_LIM_INDCT...

Page 889: ...n table The sintgX command sets up the new scan table entry to make an integrated measurement The measurement results are stored in the array specified by the result parameter Each time a measurement...

Page 890: ...array that stores the results Details This command is used to create an entry in the measurement scan table During any of the sweep commands a measurement scan is done for every force point in the sw...

Page 891: ...the resi array sweepv SMU1 0 0 0 3 12 25 0E 3 Make 13 measurements as the voltage ranges from 0 V to 0 3 V This example determines the measurement data needed to create a graph showing the negative r...

Page 892: ...is either in compliance or out of compliance based on the specified mode Also see None trigXg trigXl This command monitors for a predetermined level of voltage current or time Usage int trigig int in...

Page 893: ...d when a clrtrg execut or devint command is executed Example 1 double res22 vcc8 conpin SMU1 3 0 conpin SMU2 2 0 conpin GND 1 0 forcev SMU2 vcc8 Apply collector voltage to vcc8 trigig SMU2 5 0E 3 Sear...

Page 894: ...il SMU1 4 0E 3 If less than 4 mA stop ramping smeasi SMU1 res1 Measure current at each of the 19 levels return results to the res1 array sweepv SMU1 0 0 0 6 18 1 00E 3 Generate 0 0 V to 0 6 V in 18 st...

Page 895: ...e run The tstdsl command has the same effect as the tstsel 0 command tstdsl is not required for use in a user test module UTM Example tstdsl Disables test station Also see tstsel on page 13 50 tstsel...

Page 896: ...ure SMU1 current store in ares2 kfpabs ares2 ares2 Convert ares2 to absolute value return result to ares2 This example takes the absolute value of a current reading forcev outputs vb1 volts from SMU1...

Page 897: ...nd stores the result in a specified variable Usage int kfpdiv double x double y double z x The dividend y The divisor z A variable where the result of x y is stored Details The value referenced by x i...

Page 898: ...res4 Raise the base of natural logarithms e to the power res4 kfpexp res4 res4e return the result to res4e In this example kfpexp raises the base of natural logarithms to the power specified by the ex...

Page 899: ...nt kfpmul double x double y double z x A variable containing the multiplicand y A variable containing the multiplier z The variable where the result of x y is stored Details The value referenced by x...

Page 900: ...he value is positive it is converted to a negative if the value is negative it is converted to a positive Example double res4 forcev SMU1 10 0 Output 10 V from SMU1 measi SMU1 res4 Measure SMU1 curren...

Page 901: ...the result is stored in the location pointed to by z If an overflow occurs the result is Inf If an underflow occurs the result is zero 0 If x points to a negative number a power of a negative number...

Page 902: ...umber z A variable where the result the square root of x is stored Details The square root of the value referenced by x is stored in the location pointed to by z If x points to a negative number a squ...

Page 903: ...ariable where the result of x y is stored Details The value referenced by y is subtracted from the value referenced by x The result is stored in the location pointed to by z If an overflow occurs the...

Page 904: ...he array is added to the delay specified in the asweepX command For example if the array contains four delays 0 04 s 0 05 s 0 06 s and 0 07 s and the delay specified in the asweepX command is 0 1 s th...

Page 905: ...The maximum number of times data is measured using the smeasX sintgX or savgX command is determined by the num_points argument in the asweepX command A one dimensional result array with the same numb...

Page 906: ...xample double icmeas 10 ifrc 10 ifrc 0 1 0e 10 for i 1 i 10 i Create decade array from 1 0E 10 to 1 0E 1 ifrc i 10 0 ifrc i 1 conpin SMU1 1 0 Base connection conpin SMU2 2 0 Collector connection conpi...

Page 907: ...le After this command executes all closed relay matrix connections remain closed and the sources continue to generate voltage or current This allows additional sequential measurements In general measu...

Page 908: ...easv int instr_id double result long numrdg double delay int timerid double timerdata instr_id The instrument identification code of the measuring instrument result The result name of the array to rec...

Page 909: ...th 100 us delay between readings using TIMER2 with time data labeled timer This example shows how the bmeasX command is used with a timer Each measurement is associated with a timestamp This timestamp...

Page 910: ...the time of trigger or breakdown all sources are shut down to prevent damage to the device under test Typically this termination point is the test current required for a given breakdown voltage Once t...

Page 911: ...ruments when doing sweeps with the bsweepX command Refer to kibdefint on page 13 24 for additional information Example double bvdss conpin SMU1 1 0 conpin GND 2 3 0 limiti SMU1 100e 6 Define the I lim...

Page 912: ...ystem to their default states Usage int devint void Details Resets all active instruments in the system to their default states It clears the system by opening all relays and disconnecting the pathway...

Page 913: ...ion set to 0 m Open Short Load compensation disabled The 4225 PMU or 4220 PGU returns to the following states The pulse mode is maintained For example if the pulse card is in Segment Arb mode it will...

Page 914: ...0 V in relationship to ground When using the limitX rangeX and forceX commands on the same source at the same time in a test sequence call the limitX and rangeX commands before the forceX command See...

Page 915: ...sage int getstatus int instr_id long parameter double result instr_id The instrument identification code parameter The parameter of query see Details result The data returned from the instrument the g...

Page 916: ...or autorange KI_IARANGE The presently active range Current range full scale range value KI_VARANGE Voltage range full scale range value KI_COMPLNC Compliance status of last reading Bitmapped values 2...

Page 917: ...s KI_VPU_CH2_VHIGH Pulse high Channel 2 pulse high level value in volts KI_VPU_CH1_VLOW Pulse low Channel 1 pulse low level value in volts KI_VPU_CH2_VLOW Pulse low Channel 2 pulse low level value in...

Page 918: ...ith the KI_INTGPLC option of setmode The integration time can be set from 0 01 PLC to 10 0 PLC The devint command resets the integration time to the one AC line cycle default value The only difference...

Page 919: ...miti SMU1 2 0E 8 Limits to 20 0 nA rangei SMU1 2 0E 8 Select range for 20 0 nA forcev SMU1 25 0 Apply 25 V to the gate intgi SMU1 idss Measure gate leakage return results to idss This example measures...

Page 920: ...e Use the limitv command to limit the voltage of a current source If the instrument is ranged below the programmed limit value the instrument will temporarily limit to full scale of range This command...

Page 921: ...ltage of a device The limit is set at 150 V This limit is necessary to override the default limit of the SMU which would otherwise be in effect Also see bsweepX on page 13 65 pulseX on page 13 81 devi...

Page 922: ...ing delay for the range change that may be necessary due to this potential range change Once defined the lorangeX command is in effect until a devclr devint execut or another lorangeX command executes...

Page 923: ...sources continue to generate voltage or current For this reason two or more measurements can be made in sequence The rangeX command directly affects the operation of the measX command The use of the r...

Page 924: ...ouble if46 vf47 if46 50e 3 conpin 3 GND 0 conpin SMU1 2 0 forcei SMU1 if46 Forward bias the diode set SMU current limit to 50 mA measv SMU1 vf47 Measure forward bias return result to vf47 In this exam...

Page 925: ...nates i_meas The variable used to receive the current drawn from the instrument this measurement is made simultaneously with the voltage so the combined values are an exact representation of the devic...

Page 926: ...rent and voltage available vary with the instrument type For more detailed information refer to the hardware manuals of the instruments in your system After pulseX is executed the output is turned off...

Page 927: ...ate for 500 ms searchv SMU2 0 0 3 0 7 2 0E 5 res2 Increase voltage until trigger point occurs Return results to res2 This example measures the threshold voltage shift of an FET by calling two searchv...

Page 928: ...alue an instrument temporarily uses the full scale value of the range as the limit This does not change the programmed limit value and if the instrument range is restored to a value higher than the pr...

Page 929: ...rent leakage and returns the results to the variable icer2 Also see asweepX on page 13 59 bsweepX on page 13 65 forceX on page 13 69 pulseX on page 13 81 searchX on page 13 38 sweepX on page 13 88 rtf...

Page 930: ...ed instrument Usage int setauto int instr_id instr_id The instrument identification code Details When an instrument is returned to the autorange mode it will remain in its present range for measuremen...

Page 931: ...s steady delay The delay between points to wait in seconds Details This command is used when the device stability is uncertain It continually reads the instrument until the resulting measurement is st...

Page 932: ...t and the previous measurement are within 0 1 If the measurements are within 0 1 the result of the last measurement is stored and the program continues If the measurements are not within 0 1 the progr...

Page 933: ...he smeasX sintgX savgX or rtfary command The sweepX command causes a sourcing instrument to generate a series of ascending or descending voltages or current changes called steps During this source tim...

Page 934: ...harge the circuit so that the sweepX command will return a stable value for the first measured point without penalizing remaining points in the sweep For example double ires 6 conpin SMU1 10 0 conpin...

Page 935: ...wing the common drain source characteristics of a field effect transistor FET A fixed gate to source voltage is generated by SMU1 A voltage ramp from 0 V to 5 V is generated by SMU2 Drain current appl...

Page 936: ...port external triggering but do not support trigger input from external input signals or instruments The PGU and PMU support the following pulse modes Standard pulse mode For this two level pulse mode...

Page 937: ...Segment Arb Details Use this command to abort a pulse test from in a user module This command is useful during a longer pulse_exec test Note that pulse_exec is nonblocking so it is possible to fetch...

Page 938: ...test Free_Used_Arrays return status loop to fetch data while waiting for test complete abort_sent 0 while pulse_exec_status elapsedt 1 Code to fetch and evaluate data here if abort_sent 0 Code to fetc...

Page 939: ...mand to post the large data sets that are typically generated by PMU waveform measurements The following sequence summarizes the process to post data into the Analyze sheet Run a test Use pulse_fetch...

Page 940: ...DoubleBuffer DrainVmeas Vmeas_sheet 20e3 PostDataDoubleBuffer DrainImeas Imeas_sheet 20e3 PostDataDoubleBuffer Timestamp Tstamp_sheet 20e3 Posts waveform measurement data into the Analyze sheet This e...

Page 941: ...nd is typically called after the sweep is complete to determine the total number of readings stored in the buffer For a long test you can use this command to track the progress of the test A long test...

Page 942: ...connection compensation values The default values provide compensation for simple connection setups that use the supplied cables The custom connection compensated values are generated when connection...

Page 943: ...problems with the test configuration the validation will stop and the test will not be executed The pulse_exec command is nonblocking which means that if this command is called to execute the test the...

Page 944: ...1 1 0 49 Drain_Vmeas Drain_Imeas NULL NULL Code for data handling here This example uses pulse_exec to set the execution type to simple two level pulse operation no analysis and executes the test The...

Page 945: ...ime will be longer than the actual time required on card This command is typically used in a while loop to allow the test to finish before retrieving the data using the pulse_fetch command It is the r...

Page 946: ...ch to retrieve all the test data Also see pulse_exec on page 13 98 pulse_fetch on page 13 101 pulse_fetch This command retrieves enabled test data and temporarily stores it in the data buffer Usage in...

Page 947: ...status NULL can be passed as valid parameters for these fields The return of all readings must be enabled by the pulse_meas_sm command If disabled the arrays will not be retrieved For spot mean measur...

Page 948: ...rement type 1 0001 Spot mean 2 0010 Waveform All other values bit patterns reserved 15 12 Current threshold voltage threshold power threshold and source compliance 0 0000 None 1 0001 Source compliance...

Page 949: ...uffer may not fill with all the requested readings Array entries are designated as zero for test data that is not yet available Wait until the test is complete before retrieving data An effective meth...

Page 950: ...se for 20 seconds pulse_exec 0 Sleep 20000 Retrieve a block of test data pulse_fetch PMU1 1 0 10e3 Drain_Vmeas Drain_Imeas 1 NULL Code for data handling here After retrieving a block of data loop back...

Page 951: ...and executes the test The code pauses the program to monitor the status of the test It uses a while loop to check the returned value of pulse_exec_status When the test is completed the program drops...

Page 952: ...etails This feature differs from a SMU compliance setting in that threshold checking is done after each burst of pulses using the spot mean values to compare to the specified thresholds The thresholds...

Page 953: ...sIAmpl Return amplitude current measurements Disable 0 Enable 1 AcquireMeasIBase Return base current level measurements Disable 0 Enable 1 AcquireTimeStamp Return time stamp readings Disable 0 Enable...

Page 954: ...s Stop location specified as a percentage of the widths for the amplitude and base level see Details Waveform Post data for the amplitude specified as a percentage of the amplitude pulse duration see...

Page 955: ...st data is extra data taken after the fall time Figure 505 Waveform measurements with pre data and post data Use the pulse_sample_rate command to set the sampling rate for pulse measurements Before ca...

Page 956: ...0 Enable 1 AcquireTimeStamp Return time stamp readings must be enabled to measure waveforms Disable 0 Enable 1 LLEComp Load line effect compensation LLEC LLEC disabled 0 LLEC enabled 1 Pulsers 4225 P...

Page 957: ...eet StatusColName Column name for the status data in the Clarius Analyze sheet Pulsers 4225 PMU Pulse mode Standard and Segment Arb Details Use this command to return and display test data in pseudo r...

Page 958: ...measure range in amps see Details ignored if autorange is selected Pulsers 4220 PGU 4225 PMU 4225 RPM Pulse modes Standard Full Arb Segment Arb Details The Vrange_type Vrange Irange_type and Irange pa...

Page 959: ...0 or 40 0 001 n a 10 0 0001 n a 10 or 40 0 00001 n a 10 0 000001 n a 10 0 0000001 n a 10 Auto or limited autoranging is available only when using the advanced mode in the pulse_exec command Ranging is...

Page 960: ...rom a test It is useful when there needs to be one less channel for a pulse test that already exists You can use it to remove a channel from a long term reliability test while allowing other channels...

Page 961: ...r multi card tests set all cards to the same sample rate If a requested sample rate does not match an available rate the next higher rate is used For example if 90E6 samples per second is sent the sam...

Page 962: ...t but for the 200 MSa s rate a pulse delay of 20 ns to 100 ns will allow the rising edge of the pulse to be captured Another internally enforced limit is the minimum off time This is calculated as min...

Page 963: ...age amplitude PULSE_DUAL_DC_SP Dual sweeps DC voltage level start Initial value for stepping stop Final value for stepping step Step size for stepping Pulsers 4220 PGU 4225 PMU Pulse mode Standard Det...

Page 964: ...ence 1 V 2 V 3 V 4 V and 5 V Pulse period The pulse period is the time interval between the start of the rising transition edge of consecutive output pulses see Pulse period on page 6 102 SweepType ex...

Page 965: ...page 6 71 for a diagram of this example Also see pulse_sweep_linear on page 13 120 pulse_vhigh on page 13 157 pulse_vlow on page 13 159 pulse_sweep_linear This command configures the pulse sweeping ty...

Page 966: ...weep PULSE_AMPLITUDE_SP use pulse_vlow to set the base voltage Amplitude and base level The pulse card can step or sweep amplitude with base level fixed or step or sweep base level with amplitude fixe...

Page 967: ...004 s and 0 005 s Pulse width The width of a pulse in seconds is measured at full width half maximum FWHM as shown in Pulse width on page 6 102 SweepType example PULSE_WIDTH_SP stepping or sweeping St...

Page 968: ...evel Vamplitude Voltage level for pulse amplitude Pulsers 4220 PGU 4225 PMU Pulse mode Standard Details The configured pulse train will not change for the selected channel but any sweep or step timing...

Page 969: ...M_CV_4W or 2 Selects 4 wire CVU 4210 CVU KI_RPM_SMU or 3 Selects SMU 4200 SMU Pulsers 4225 PMU with the 4225 RPM Pulse mode Standard two level pulsing Segment Arb and full arb Details The 4225 RPM inc...

Page 970: ...vels Time An array of segment time durations in seconds with 10 ns resolution 20 ns minimum Trig An array of trigger values for trigger output only Trigger low 0 Trigger high 1 SSR An array of values...

Page 971: ...point in a segment must equal the voltage level for the first point of the next segment Note that all segment transitions must be seamless The minimum time per sequence is 20 ns One or more defined se...

Page 972: ...e seg_arb_sequence example Parameter Array Name Value SegNum Seg_Num 1 2 3 4 5 6 7 StartV Start_Volt 0 V 1 V 1 V 1 5 V 1 5 V 0 V 0 V StopV Stop_Volt 1 V 1 V 1 5 V 1 5 V 0 V 0 V 0 V Time Time_Interval...

Page 973: ...to create a voltage segment waveform from the sequences defined by the seg_arb_sequence command The NumSeq parameter defines the number of sequences that make up the waveform The Seq parameter is an...

Page 974: ...of iterations for load line effect compensation LLEC for the PMU Usage int setmode int instr_id long modifier double value instr_id The instrument identification code of the pulse generator PMU1 PMU2...

Page 975: ...to 1000 to be performed LLEC only performs the iterations that are needed to determine the appropriate voltage setting to provide the desired level at the DUT The remaining iterations are not perform...

Page 976: ...A Full Arb waveform can be defined for each pulse card channel A Full Arb waveform is made up of user defined points A time interval is set to control the time between the waveform points This comman...

Page 977: ...each channel of the pulse card Once loaded use pulse_output to turn on the appropriate channel and then use pulse_trig to select the trigger mode and start or arm pulse output When specifying the fnam...

Page 978: ...nt execut and tstdsl For C V testing this command turns off the DC bias voltage Also see clrcon on page 13 199 devint on page 13 13 execut on page 13 16 kibdefclr on page 13 22 tstdsl on page 13 50 de...

Page 979: ...0 PGU devint is implicitly called by execut and tstdsl devclr is implicitly called by clrcon The SMUs return to the following states 100 A and 10 V ranges Autorange on Voltage source 0 V DCV bias The...

Page 980: ...valid for the selected device A list of supported getstatus command values for the parameter parameter for a source measure unit SMU and a pulse card VPU are provided in the following tables No status...

Page 981: ...ds KI_VPU_CH2_WIDTH Pulse width Channel 2 pulse width value in seconds KI_VPU_CH1_VHIGH Pulse high Channel 1 pulse high level value in volts KI_VPU_CH2_VHIGH Pulse high Channel 2 pulse high level valu...

Page 982: ...et the pulse card for the presently selected pulse mode use the pulse_init command Standard pulse defaults Full Arb and Segment Arb pulse defaults Pulse high and pulse low 0 V Source range 5 V fast sp...

Page 983: ...triggered the card outputs the specified number of pulses and then stops The pulse_trig command is used to start or arm the burst sequence Burst or Trig Burst You can set burst count independently fo...

Page 984: ...nge 0 105 Pulse modes Standard Full Arb Segment Arb Details You can set the current limit independently for each pulse card channel Current limit protects the DUT by using the specified DUT load to ca...

Page 985: ...o 20 50 load Default N A Pulse modes Standard Details You can set each pulse card channel to output a fixed DC voltage level instead of pulses The maximum and minimum output voltage is range dependent...

Page 986: ...set the pulse delay time for the 4220 PGU and 4225 PMU Pulse delay can be set independently for each pulse card channel For both speeds pulse delay can be set from 0 ns to Period 10 ns The pulse dela...

Page 987: ...se and fall transitions For the fast speed range the minimum is 362 V s or 1 V 2 7 ms For the high voltage range the minimum slew rate is 1 8 mV s or 1 V 500 s The pulse_range command is used to set p...

Page 988: ...152 pulse_halt This command stops all pulse output from the pulse card Usage int pulse_halt int instr_id instr_id The instrument identification code of the pulse card such as VPU1 or VPU2 Pulse modes...

Page 989: ...d Standard pulse defaults Full Arb and Segment Arb pulse defaults Pulse high and pulse low 0 V Source range 5 V fast speed Pulse period 1 s Pulse width 500 ns Pulse count 1 Rise and fall time 100 ns P...

Page 990: ...when the DUT impedance matches the output impedance of the pulse card For example if the DUT impedance is set to 1 M the voltage output settings will change to account for the higher DUT impedance ens...

Page 991: ...he pulse source when using a PMU with RPMs but it does not close the output relay The rpm_config command establishes the physical connection to the DUT The clrcon command clears the physical connectio...

Page 992: ...e of the pulse card such as VPU1 or VPU2 chan Channel number of the pulse card 1 or 2 mode Pulse output state NORMAL or 0 default COMPLEMENT or 1 Pulse modes Standard Details When a pulse card channel...

Page 993: ...tandard Details This command sets the pulse period for both channels of the pulse card As shown below the pulse period is measured at the median point 50 percent between the high and low pulse values...

Page 994: ...or pulse output For slow speed the minimum pulse width that can be set is 250 ns and the minimum rise and fall times can be set to 100 ns This setting takes effect when the next trigger is initiated T...

Page 995: ...minimum is 362 V s or 1 V 2 7 ms For the high voltage range the minimum slew rate is 1 8 mV s or 1 V 500 s The pulse_range command is used to set pulse speed As shown below the pulse rise time occurs...

Page 996: ...ation code of the pulse card such as VPU1 or VPU2 chan Channel number of the pulse card 1 or 2 state Open 0 Close 1 default ctrl How the HEOR will be controlled Auto the Segment Arb pulse mode control...

Page 997: ...Full Arb Segment Arb Details With the software trigger source selected this command sets the trigger mode continuous burst or trig burst for both pulse card channels and initiates the start of pulse...

Page 998: ...Pulse modes Standard Full Arb Segment Arb Details This command turns the TTL level trigger output pulse on or off The pulse is used to synchronize pulse output with the operations of an external inst...

Page 999: ...equency period as the pulse card output channels but has a 50 duty cycle It is used to synchronize pulse outputs with the operations of an external instrument The external instrument that is connected...

Page 1000: ...will select the trigger mode continuous burst or trig burst and initiate the start of pulse output If an external trigger source selected the pulse_trig command will select the trigger mode and arm p...

Page 1001: ...ing Same as above except the initial falling edge trigger will start and control pulse output External trigger per pulse rising Rising edge trigger pulses applied to TRIGGER IN will start and control...

Page 1002: ...tions Pulse high and pulse low can be set from 20 V to 20 V For a 1 M load 5 V range high speed Pulse high and pulse low can be set from 10 V to 10 V 20 V range high voltage Pulse high and pulse low c...

Page 1003: ...or burst output The pulse_vlow pulse_vhigh and pulse_dc_output commands set the voltage value output by the pulse channel when it is turned on using pulse_output If the output is already enabled thes...

Page 1004: ...sitions Pulse high and pulse low can be set from 20 V to 20 V For a 1 M load 5 V range high speed Pulse high and pulse low can be set from 10 V to 10 V 20 V range high voltage Pulse high and pulse low...

Page 1005: ...or burst output The pulse_vlow pulse_vhigh and pulse_dc_output commands set the voltage value output by the pulse channel when it is turned on using pulse_output If the output is already enabled these...

Page 1006: ...dth Pulse width in seconds Fast speed 5 V 10e 9 to Period 10e 9 Slow speed 20 V 250e 9 to Period 10e 9 Default 500e 9 Pulse modes Standard Details Use the pulse_source_timing command to set the pulse...

Page 1007: ...age 13 148 pulse_range on page 13 149 pulse_source_timing on page 13 116 pulse_trig on page 13 152 seg_arb_define This command defines the parameters for a Segment Arb waveform Usage int seg_arb_defin...

Page 1008: ...defined segments Each segment can have a unique time interval start value stop value output trigger level TTL high or low and output relay state open or closed See Segment Arb on page 5 56 for detail...

Page 1009: ...utRelayVals 1 0 startvals 2 1 0 stopvals 2 1 5 timevals 2 20e 9 triggervals 2 1 outputRelayVals 2 0 startvals 3 1 5 stopvals 3 1 5 timevals 3 150e 9 triggervals 3 0 outputRelayVals 3 0 startvals 4 1 5...

Page 1010: ...elect the trigger mode and start or arm pulse output When specifying the file name include the full command path with the file name Existing ksf waveforms are typically saved in the SarbFiles folder a...

Page 1011: ...the array is added to the delay time specified in asweepv For example if the array contained four delays 0 04 s 0 05 s 0 06 s and 0 07 s and the delay time specified in asweepv is 0 1 s then the resu...

Page 1012: ...59 for additional information This command performs a DC voltage sweep using an array of voltage values The number of voltage values in the array must match the numberOfPoints parameter value The dela...

Page 1013: ...the time of trigger or breakdown all sources are shut down to prevent damage to the device under test Typically this termination point is the test current required for a given breakdown voltage Once...

Page 1014: ...truments when doing sweeps with the bsweepX command Refer to kibdefint on page 13 24 for additional information Example double bvdss conpin SMU1 1 0 conpin GND 2 3 0 limiti SMU1 100e 6 Define the I li...

Page 1015: ...m Once this command is run these values are applied if you select a cable length of Custom in Clarius Tools CVU Connection Compensation Possible return values are 0 OK 907 LPOT LCUR fail 908 HPOT HCUR...

Page 1016: ...pulse_exec pulse test see dev_abort devint does the following 1 Clears all sources by calling devclr 2 Clears the matrix crosspoints by calling clrcon 3 Clears the trigger tables by calling clrtrg 4 C...

Page 1017: ...rg on page 13 11 dev_abort on page 13 92 devclr on page 13 67 kibdefint on page 13 24 dsweepf This command performs a dual frequency sweep Usage int dsweepf int instr_id double startf double stopf lon...

Page 1018: ...uency points from start to stop for the first sweep and then repeat in the reverse direction from stop to start for the second sweep For example if the start frequency is 800 kHz and the stop frequenc...

Page 1019: ...arameters The linear step size for the sweep is then calculated as follows StepSize in volts stopv startv numSteps numSteps describes the first half of the sweep For example to do a dual sweep from 1...

Page 1020: ...voltage level 30 V to 30 V Details This command sets a DC bias level for a single impedance measurement and a frequency sweep Use the setfreq and setlevel commands to set the AC drive frequency and AC...

Page 1021: ...en if on auto range KI_CVU_ACV_LEVEL AC voltage level 10 mV to 100 mVRMS KI_CVU_APERTURE A D aperture time 0 006 to 10 002 PLCs KI_INTGPLC Integration NPLC 1 aperture time KI_CVU_DCV_LEVEL DC bias vol...

Page 1022: ...on page 13 185 meast This command returns a timestamp referenced to a measurement or a system timer Usage int meast long timerID double timestamp timerID The instrument identification code CVU1 TIMER1...

Page 1023: ...surement Use the measz command to make a single measurement Use the smeasv or smeasvRT command to return the DC bias voltages used for a sweep Also see measz on page 13 178 smeasv on page 13 188 smeas...

Page 1024: ...ion factor KI_CVU_TYPE_CPD or 4 CsD Series capacitance and dissipation factor KI_CVU_TYPE_CSD or 5 Use the smeasz or smeaszRT command to measure and return the impedance readings for a sweep Also see...

Page 1025: ...return an array of voltage or frequency force values for a sweep Send this command before calling any sweep command To prevent a memory exception error make sure that the array that will receive the...

Page 1026: ...r_id The instrument identification code of the 4210 CVU CVU1 frequency Frequency of the AC drive Details This command sets the frequency of the AC drive The 4210 CVU provides test frequencies from 1 k...

Page 1027: ...0 CVU Usage int setmode int instr_id long modifier double value instr_id The instrument identification code of the 4210 CVU CVU1 modifier Specific operating characteristic to change see table in Detai...

Page 1028: ...RMAL KI_CVU_SPEED_QUIET KI_CVU_SPEED_CUSTOM Fast measurements higher noise Balance between speed and low noise Low noise measurements Custom settings see next modifiers KI_CVU_APERTURE KI_CVU_DELAY_FA...

Page 1029: ...arr Returned array of test frequencies Details This command returns the present test frequencies used for a sweep The frequency values are returned in an array The frequency values are posted to Clari...

Page 1030: ...name character string to pass into Clarius for the data sheet column Details Like the smeasf command the test frequencies for a sweep are returned in an array However the frequency values are posted t...

Page 1031: ...s the frequency values to Clarius in real time The timestamp can be referenced to the 4210 CVU timerID CVU1 or to a system timer for example timerID TIMER1 This command is similar to the meast command...

Page 1032: ...graph in real time Each timestamp appears in the sheet and graph after each measurement is made Note that the values are only available in real time if Clarius is running Otherwise they are stored in...

Page 1033: ...eturned array of DC bias voltages Details This command returns the DC bias voltages used in a sweep The values are returned in an array The voltage values are posted to the Clarius Analyze sheet and g...

Page 1034: ...ng Otherwise they are stored in an array The colname parameter specifies a name for the data sheet column in Clarius Example smeasvRT CVU1 volt_arr volt_arr This command posts the voltage values into...

Page 1035: ...value ZTH Impedance Z and phase in degrees KI_CVU_TYPE_ZTH or 0 RjX Resistance and reactance KI_CVU_TYPE_RJX or 1 CpGp Parallel capacitance and conductance KI_CVU_TYPE_CPGP or 2 CsRs Series capacitan...

Page 1036: ...pass into Clarius for result2 array character string Details This command is similar to the smeasz command both commands return the measured impedance readings for a sweep returned in arrays However...

Page 1037: ...sweep are set using the startf and stopf parameters If an entered value is not a supported frequency the closest supported frequency will be selected for example 15 kHz input will select 20 kHz The sw...

Page 1038: ...V stopv Final force value for the sweep 30 V to 30 V NumSteps Number of steps in the sweep 1 to 4096 delaytime Delay before each measurement 0 to 999 s Details This command is used to perform a stair...

Page 1039: ...and measure CpGp for each step Programming example 3 on page 13 196 Do a voltage array sweep Programming example 4 on page 13 197 Do a voltage array sweeps with an array of delay values used for the...

Page 1040: ...50 ms This example also returns a timestamp for each measurement and measures the execution time of the code double result1 4 result2 4 timeStamp1 4 timeStamp2 enable TIMER1 Start timer at 0 seconds s...

Page 1041: ...Measure range Auto Start frequency 100 kHz Stop frequency 300 kHz Number of frequency steps 3 this value is returned from the command to the NumPts variable and not passed by the user Delay 50 ms doub...

Page 1042: ...Array 0 1 forceArray 1 2 forceArray 2 3 forceArray 3 4 CpGp is measured on each point of the sweep Test parameters AC drive frequency 100 kHz AC drive voltage 15 mVRMS Measure model CpGp Measure range...

Page 1043: ...hout clearing existing connections Usage int addcon int exist_connect int connect1 connectn 0 exist_connect An instrument terminal ID this instrument or terminal may have been but is not required to h...

Page 1044: ...on page 13 67 devint on page 13 13 execut on page 13 16 pulse_output on page 13 146 conpin This command connects pins and instruments together Usage int conpin int InstrTermID int connect1 connectn 0...

Page 1045: ...er or an instrument terminal ID connectn A pin number or an instrument terminal ID Details You can force the system to use a particular pathway by using conpth instead of conpin This might be done to...

Page 1046: ...KI_CVIV_SMU or 1 Connect channel to CVU HI 4210 CVU KI_CVIV_CVH or 2 Connect channel to CVU LO 4210 CVU KI_CVIV_CVL or 3 Connect CV guard to the output connector shell with AC ground to center KI_CVIV...

Page 1047: ...NAME or 0 See Details value A string that defines the name up to 16 characters for a test name or 6 characters for a terminal name Details Sets the name for the channel terminal or test that is displa...

Page 1048: ...or 0 Details This command turns the display of the 4200A CVIV on or off When the display is turned off the 4200A CVIV clears the displays A small green circle is displayed to indicate that the 4200A C...

Page 1049: ...ommand If GND is included in the list all ground connections are removed If a SMU remains connected GND must be reconnected using addcon or an error is generated when the first LPT library command aft...

Page 1050: ...pulse_exec pulse test see dev_abort devint does the following 1 Clears all sources by calling devclr 2 Clears the matrix crosspoints by calling clrcon 3 Clears the trigger tables by calling clrtrg 4 C...

Page 1051: ...mode it will still be in Segment Arb mode after the devint process is complete 5 V and 10 mA ranges If in pulse mode Period of 1 0 s Transition Times Rise and Fall of 100 ns Width of 500 ns Voltage h...

Page 1052: ...rror codes describe the error condition to help the user module programmer or user determine how to address the error Once an error occurs the response of the user module to the error depends on how t...

Page 1053: ...ssociated with these large numbers Customized error texts Key Explanation d Signed decimal number may be a parameter index or GPIB address g Double value i Signed decimal number s String such as SMU1...

Page 1054: ...a previous error was encountered 21 Tester is in a fatal error state 22 Fatal condition detected while in testing state 23 Execution aborted by user 24 Too many arguments 25 s is unavailable because i...

Page 1055: ...Insufficient user RAM for dynamic allocation 129 Timer not enabled 137 Invalid value for modifier 138 Too many points specified in array 139 An error was encountered while accessing the file s 140 s u...

Page 1056: ...ake the measurement 239 Timeout occurred attempting measurement 240 Power Limited to 20 W Check voltage and current range settings 250 IEEE 488 time out during data transfer for addr d 252 No IEEE 488...

Page 1057: ...Driver load error Could not load s 621 Driver configuration function not found Driver is s 640 s serial number s failed diagnostic test d 641 s serial number s failed diagnostic test d with a fatal fa...

Page 1058: ...ase pulse period or reduce amplitude or total time of pulsing 831 Maximum number of samples per channel d exceeded for PMU d CH d 832 Pulse slew rate is too low Increase pulse amplitude or reduce puls...

Page 1059: ...SMU measurement at the maximum SMU voltage or current 7 0000E 22 SMU in real compliance see Compliance limits on page 3 3 1 0000E 23 Measurement aborted or not able to be performed For example if usin...

Page 1060: ...own in the following figure The 4200A SCS supports the Keithley Instruments Series 700 Switching System as external instruments This series includes the 707 707A and 707B which have six slots for matr...

Page 1061: ...12 General Purpose Matrix Card 100 pA offset current Model 7072 8 x 12 Semiconductor Matrix Card 1 pA offset current Model 7136 not available to purchase Model 7174A 8 x 12 Low Current Matrix Card 100...

Page 1062: ...with screw terminals and 38 pin connectors for signal connections The next figure shows a test system using 7071 matrix cards The triaxial and BNC cables are unterminated on one end to allow direct ha...

Page 1063: ...imum signal level is 200 V 1 A The maximum leakage is 0 01 pA V and the 3 dB bandwidth is 5 MHz CV channals The next figure shows a test system using 7072 matrix cards The connection requirements for...

Page 1064: ...3 lug triax connectors for signal connections The following figures show test systems using 7174A matrix cards The supplied triaxial cables connect the 4200A SCS directly to matrix rows The other ins...

Page 1065: ...olumns In this configuration two switch relays are closed to complete a path from an instrument to a device under test DUT With five DUT matrix cards installed in a Series 700 Switching System mainfra...

Page 1066: ...e switch matrix to the 4200A SCS using a 7007 1 or 7007 2 GPIB cable Switch matrix connections A switch matrix enhances the connectivity of the 4200A SCS by allowing any SMU or preamplifier signal to...

Page 1067: ...Appendix A Using switch matrices Model 4200A SCS Parameter Analyzer Reference Manual A 8 4200A 901 01 Rev C February 2017 Figure 525 Typical SMU matrix card connections...

Page 1068: ...onfiguration shown in the previous figure except that preamplifiers are added for low current source measure capabilities The preamplifier FORCE terminals are connected to the matrix card rows while t...

Page 1069: ...Appendix A Using switch matrices Model 4200A SCS Parameter Analyzer Reference Manual A 10 4200A 901 01 Rev C February 2017 Figure 526 Preamplifier matrix card connections...

Page 1070: ...the 7072 Matrix Card for C V testing However you must use rows G and H and local 2 wire sensing The SMA cables and adapters shown in the following drawings are supplied with the CVU or the 4210 CVU Pr...

Page 1071: ...must be used in order to extend SMA shielding through the matrix card The shields of the SMA cables must be connected together and extended as far as possible to the DUT as shown in Typical 4210 CVU...

Page 1072: ...When you set up a matrix you also select the sense You can select Local sense 2 wire conections Connections are only to instrument FORCE terminals Remote sense 4 wire connections Connections are to b...

Page 1073: ...l local sense voltage measurements When local sense is selected only the connection paths specified by the connected action are completed For example in the figure in Switch matrix control on page A 1...

Page 1074: ...rement pathways Figure 531 Instrument Card Remote Sense Connection Scheme example When remote sense is selected rows and columns are paired together as follows Row A paired with row B Column 1 paired...

Page 1075: ...control a switch matrix You specify the instrument terminal and pin pairs For example for the row column connection scheme shown in the figure below you set the parameters TermIDStr2 to SMU2 and Pin2...

Page 1076: ...al path examples from the various test instruments through the matrix switches to a DUT 4200A SCS signal paths The following figure shows remote sensing 4 wire signal paths through a matrix card using...

Page 1077: ...osed For local sensing 2 wire the connections from the SENSE terminals of the 4200A SCS are not used See Connection scheme settings on page A 12 for details on local and remote sensing Connection sett...

Page 1078: ...nlike the configuration shown in 4200A SCS signal paths on page A 17 each FORCE SENSE connector pair is routed through a single 3 pole matrix switch Since row pairing is not required the local sense s...

Page 1079: ...0A SCS signal paths through a 3 pole matrix card using remote sensing C V Analyzer signal paths The next two figures show local sense C V Analyzer signal paths through rows B and H of a 7072 matrix ca...

Page 1080: ...e Manual Appendix A Using switch matrices 4200A 901 01 Rev C February 2017 A 21 Figure 536 590 signal paths through 7072 matrix card using local sensing Figure 537 Keysight Model 4980A signal paths th...

Page 1081: ...ev C February 2017 The next figure shows the remote sense signal paths for the Keysight Model 4980A LCR meter through a 2 pole matrix card Since row pairing is required the remote sense setting must b...

Page 1082: ...matrix card types Note that the pulse generator LO is not routed through the matrix card A separate external return path is required The chassis of the pulse generator is output LO As shown in the ne...

Page 1083: ...Scheme and Switch Cards areas Specify the physical instrument to card and card to prober fixture connections Physically make the specified instrument to card and card to prober fixture connections Aft...

Page 1084: ...the test fixture prefix is TF Figure 540 Add test fixture 5 From the Model list select the appropriate test fixture 6 Enter the number of pins You can enter 2 to 72 pins If you selected the Keithley...

Page 1085: ...ade 12000 Prober Signatone CM500 WL250 Prober Contact Keithley for the most up to date list of supported probers If you are using an unsupported prober you will have to create a user library and modul...

Page 1086: ...tch matrix card column Make sure the number of pins assigned is appropriate for your system Step 3 Add switching system mainframe To add a switching system mainframe 1 Select Add External Instrument 2...

Page 1087: ...tattr allows you to develop user libraries that are independent of the configuration For more information refer to Keithley User Library Tool KULT on page 8 1 Step 5 Configure the instrument connectio...

Page 1088: ...set the card properties If the row column connection scheme is selected instruments are assigned to the rows and the test fixture pins or probe pins are assigned to the columns If the instrument card...

Page 1089: ...op select the Clarius icon Switch matrix control example This example demonstrates how the connectpins action controls a switch matrix You modify the connectpins action to connect SMU2 to a DUT as sho...

Page 1090: ...ction 5 Select Add 6 In the project tree select the connectpins action 7 Select Configure The parameter settings are displayed as shown below 8 Set Pin2 to 6 This connects SMU2 to point 6 9 Select Ope...

Page 1091: ...r2 int Pin2 char TermIdStr3 int Pin3 char TermIdStr4 int Pin4 char TermIdStr5 int Pin5 char TermIdStr6 int Pin6 char TermIdStr7 int Pin7 char TermIdStr8 int Pin8 status Returned values see Details Ope...

Page 1092: ...er when the UTM is run The pin parameter value 0 or 1 indicates that no connection will be made Terminal ID Terminal identification for the most common components used in the system configuration are...

Page 1093: ...ns if OpenAll is 1 then all previous matrix connections are cleared before making the new connections Returned values are placed in the Analyze sheet and can be 0 OK 10000 INVAL_INST_ID The specified...

Page 1094: ...C V measurements are made on capacitor like devices such as a metal oxide silicon capacitor MOS capacitor The measurements of MOS capacitors study The integrity of the gate oxide and semiconductor dop...

Page 1095: ...ified number of capacitance measurements at a specified time interval Voltage is held constant for these capacitance measurements 590 Capacitance Measurements 590 cmeas Makes capacitance and conductan...

Page 1096: ...following figure connect the adapters to the 3 slot triaxial connectors and then use a 7051 BNC cable to make the connections to the 590 See Using Switch Matrices on page A 1 for details on using a s...

Page 1097: ...se a low capacitance source and a high capacitance source The following table lists the Keithley Instruments Model 5909 capacitance sources that can be used for each 590 range 5909 capacitance sources...

Page 1098: ...test system using the Keithley Configuration Utility KCon Refer to Use KCon to add equipment to the 4200A SCS on page 7 7 for instruction For additional detail on KCon refer to Keithley Configuration...

Page 1099: ...Enter and save capacitance source values save cap file To enter and save the capacitance source values 1 Select Configure 2 In the project tree select save cap file The default parameters for the use...

Page 1100: ...ableCompCaps590 default parameters 2 Ensure that the CabCompFile field has the same file directory path that is used in save cap file Enter and save capacitance source values save cap file on page B 6...

Page 1101: ...shows cable compensation enabled for all ranges and test frequencies 5 Click Run to execute the action A series of dialog boxes guides you through the cable compensation process The basic dialog boxes...

Page 1102: ...ance verses voltage CV data from a MOS capacitor In this example the C V Analyzer applies a linear staircase voltage sweep to a capacitor A capacitance measurement is made on every voltage step of the...

Page 1103: ...rs as needed 8 Execute the test by clicking Run This test uses the CvSweep590 user module For details on this test description see CvSweep590 user module on page B 27 If you use the default parameters...

Page 1104: ...Cmeas590 on page B 14 590 cmeas Makes a single capacitance measurement CtSweep590 on page B 17 590 ctsweep Makes a capacitance versus time measurement CvPulseSweep590 on page B 21 590 cvpulsesweep Mak...

Page 1105: ...or CMTR4 depending on your system configuration InputPin The DUT pin to which the 590 input terminal is attached 1 to 72 if a value of less than 1 is specified no switch matrix connection is made see...

Page 1106: ...g the SaveCableCompCaps590 user module Test example 1 demonstrates how to do cable compensation see Model 590 test examples on page B 5 If the file defined for CabCompFile does not exist or there is n...

Page 1107: ...ction measurement and use cable compensation Usage status Cmeas590 char CabCompFile char InstIdStr int InputPin int OutPin int OffsetCorrect int Frequency double DefaultBias double StartTime double Ra...

Page 1108: ...capacitance V Output The bias voltage used G_or_R Output Parallel measurement model G_or_R is the measured conductance Series measurement model G_or_R is the measured resistance Details This user mod...

Page 1109: ...00 pF 200 s 200 pF 2 ms 4 2 nF 2 ms 2 nF 20 ms The reading rates and resolutions for the ReadingRate parameter are described in the following table Reading rate Nominal reading rate per second Display...

Page 1110: ...stem configuration InputPin The DUT pin to which the 590 input terminal is attached 1 to 72 if a value of less than 1 is specified no switch matrix connection is made see Details OutPin The DUT pin to...

Page 1111: ...is the measured conductance When the series measurement model 0 is selected this is the measured resistance G_or_Rsize Set to a value that at minimum is equal to the Count if in doubt set to 1350 T T...

Page 1112: ...y For example if your cable file is in C calfiles 590cal dat you enter the following C calfiles 590cal dat If a switch matrix to route signals is being controlled by a connection action for example co...

Page 1113: ...error occurred 10090 GPIB_ERROR_OCCURRED A GPIB communications error occurred 10091 GPIB_TIMEOUT A timeout occurred during communications 10101 ARRAY_SIZE_TOO_SMALL The specified value for Csize G_or_...

Page 1114: ...nal is attached 1 to 72 if a value of less than 1 is specified no switch matrix connection is made see Details OffsetCorrect Determines if an offset correction measurement should be made Do not make o...

Page 1115: ...ion is called from a Clarius this parameter is fixed at 1350 G_or_R Output When the parallel measurement model 1 is selected G_or_R is the measured conductance When the series measurement model 0 is s...

Page 1116: ...zer 4200A 901 01 Rev C February 2017 B 23 Details This user module performs a capacitance versus voltage pulse sweep The figure below shows the default parameters for the 590 cvpulsesweep UTM which us...

Page 1117: ...ter Analyzer Reference Manual B 24 4200A 901 01 Rev C February 2017 In this example the 590 outputs a series of pulses in 50 mV steps from 4 V to 6 V As shown in the following figure a measurement is...

Page 1118: ...0 s 200 pF 2 ms 4 2 nF 2 ms 2 nF 20 ms The reading rates and resolutions for the ReadingRate parameter are described in the following table Reading rate Nominal reading rate per second Display reading...

Page 1119: ...rocedure 1 You are prompted to open the circuit so that an offset capacitance measurement can be made if needed 2 If a cable compensation file is specified the compensation information in that file fo...

Page 1120: ...connection is made see Details OffsetCorrect Determines if an offset correction measurement should be made Do not make offset measurement 0 Make offset measurement 1 Waveform Selects either the single...

Page 1121: ...put When the parallel measurement model 0 is selected G_or_R is the measured conductance When the series measurement model 1 is selected this is the measured resistance G_or_Rsize When this function i...

Page 1122: ...17 B 29 In general the 590 outputs a linear staircase voltage sweep from 4 V to 6 V in 50 mV steps As shown in the following figure a capacitance measurement is made on each step of the sweep A test e...

Page 1123: ...d resolutions for the ReadingRate parameter are described in the following table Reading rate Nominal reading rate per second Display readings Resolution digits 0 1000 C 3 5 1 75 C G V 3 5 2 18 C G V...

Page 1124: ...Details CabCompFile The complete name and path for the cable compensation file see Details Range Output An 8 element array that receives the nominal range values RangeSize The size of the Range array...

Page 1125: ...low comp value 200 pF low comp value 200E 12 200 pF high comp value 200 pF high comp value 2E 9 2 nF low comp value 2 nF low comp value 2E 9 2 nF high comp value 2 nF high comp value If the file defin...

Page 1126: ...correct constant see Details Details If the file specified by CapCompFile does not exist it is created The path that you specify must exist When entering the path information be sure to use two chara...

Page 1127: ...used for cable compensation for the 20 pF range and 100 kHz frequency 0 F to 9 5E 12 F Lo20p1M The nominal value of the low range capacitor used for cable compensation for the 20 pF range and 1 MHz fr...

Page 1128: ...that can be used for cable compensation You must replace these values with the calibration values of the capacitance sources Figure 569 save cap file action and SaveCableCompCaps590 user module Exampl...

Page 1129: ...e specified ID in your configuration 10001 INVAL_PIN_SPEC An invalid DUT pin number was specified 10003 NO_SWITCH_MATRIX No switch matrix was found 10004 NO_MATRIX_CARDS No matrix cards were found 100...

Page 1130: ...S can control a Keysight 4284A or 4980A LCR Meter to measure capacitance versus voltage C V of semiconductor devices Typically C V measurements are performed on capacitor like devices such as a metal...

Page 1131: ...eysight Models 4284A and 4980A CvSweep4284 C V sweep test Performs a capacitance and conductance measurement at each step of a user configured linear voltage sweep Cmeas4284 C measurement Performs a c...

Page 1132: ...f the coaxial cables is typically connected to a Faraday shield The Model 4284A or 4980A output is typically connected to the wafer backside or well The input is typically connected to the gate of a M...

Page 1133: ...nections The 7078 TRX BNC is a 3 lug triaxial to BNC adapter As shown in the figure connect the adapters to the 3 slot triaxial connectors and then use a 7051 5 BNC cable to make the connections to th...

Page 1134: ...s the Model 4284A or 4980A through the General Purpose Interface Bus GPIB Use the Keithley 7007 1 or 7007 2 GPIB cable to connect the GPIB port of the Model 4284A or 4980A to the GPIB port of the 4200...

Page 1135: ...he Project Library select the ivcvswitch project 2 Select Create 3 At the bottom of the project tree add another capacitor from the Device Library 4 From the Test Library select Custom Test Choose a t...

Page 1136: ...Model 4200A SCS Parameter Analyzer Reference Manual Appendix C Using a Keysight 4284 4980A LCR Meter 4200A 901 01 Rev C February 2017 C 7 Figure 576 CvSweep4284 user module example...

Page 1137: ...this test is shown below Figure 578 Typical C V curve for a MOS capacitor HP4284ulib user library You use the user modules in the HP4284ulib user library to control the Keysight 4284A or 4980A LCR Me...

Page 1138: ...p voltage step size 40 V to 40 V the value of StopV StartV StepV 1 must be less than or equal to the values for Csize Vsize and G_or_Rsize SignalLevel The oscillator output voltage level 5e 3 V to 20...

Page 1139: ...e C 6 If a switch matrix to route signals is being controlled by a connection action UTM for example connect there is no need to connect LoPin and HiPin Set these parameters to 0 Returned values are p...

Page 1140: ...r output voltage level 5 mV to 20 V default 0 045 V Frequency Measurement frequency of the sweep 20 Hz to 1e6 Hz default 100e3 Hz BiasV The DC bias to use for the measurement 40 V to 40 V default 1 0...

Page 1141: ...r Reference Manual C 12 4200A 901 01 Rev C February 2017 10090 GPIB_ERROR_OCCURRED A GPIB communications error occurred 10091 GPIB_TIMEOUT A timeout occurred during communications 10102 ERROR_PARSING...

Page 1142: ...uses a Keithley Instruments 590 C V Analyzer and a Keithley Instruments 595 Quasistatic C V Meter to make simultaneous C V measurements The complete system is shown in the figure below Projects for th...

Page 1143: ...Details on all user modules for the Model 82 are provided in ki82ulib user library on page 6 313 C t measurements A C t sweep performs a specified number of capacitance measurements at a specified tim...

Page 1144: ...Model 4200A SCS Parameter Analyzer Reference Manual Appendix D Using a Model 82 C V System 4200A 901 01 Rev C February 2017 D 3 Figure 580 C t waveform...

Page 1145: ...cy measurements are made on only every other step as represented by the small rectangles in the waveform figure Also the high frequency measurements are not made at exactly the same voltage as the qua...

Page 1146: ...nted capacitances cable compensation should be done before measuring the capacitance of the DUT In general compensate for cables by connecting precisely known capacitance sources in place of the DUT a...

Page 1147: ...Each of the user modules for cable compensation uses a cable compensation file to save and load capacitor source values Therefore these user modules must use the same file directory path Connections...

Page 1148: ...ct the METER INPUT on the back of the Model 595 to the TO 595 INPUT on the Model 5951 2 Use a Model 7051 2 BNC cable to connect the METER COMPLETE port on the back of the Model 595 to the TRIGGER INPU...

Page 1149: ...e connections for the GPIB bus cables Use the GPIB bus cables and connect the Model 590 the Model 595 and the Model 230 1 to the 4200A SCS through the GPIB card Figure 584 System 82 IEEE 488 connectio...

Page 1150: ...he cvsweep test SIMCVsweep82 user module to make simultaneous C V measurements and then uses the ctsweep test CTsweep82 user module to make C t measurements at the condition determined by the cvsweep...

Page 1151: ...r example assume the low capacitance source for the 2 pA range is 0 47773 pF 100 kHz and 0 47786 pA 1 MHz Enter these values using scientific notation Lo2p100k Enter 0 47773e 12 Lo2p1M Enter 0 47786e...

Page 1152: ...here Figure 587 display cap file spreadsheet with capacitor source values Compensate for cable capacitance CableCompensate82 To compensate for cable capacitance 1 In the project tree select cable com...

Page 1153: ...n that case click Cancel to abort the cable compensation process Figure 589 Cable compensation dialog boxes Clicking Cancel in a cable compensation dialog box aborts the cable compensation process To...

Page 1154: ...project tree 4 Select Configure 5 In the Test Settings pane under User Libraries select ki82ulib 6 Under User Modules select QTsweep82 7 Modify the test parameters as needed Refer to QTsweep82 user m...

Page 1155: ...the last reading sample uses a set delay Delay_Max of one second while the first reading sample uses a delay of 70 ms which is the minimum The delay times for the other 18 reading samples are then au...

Page 1156: ...example assumes that the Model 82 is connected directly to the DUT The DUT could be a device installed in a test fixture or a substrate on a wafer To do a simultaneous C V sweep 1 In the project tree...

Page 1157: ...UTM uses the SIMCVsweep82 user module to make simultaneous C V measurements A 595 quasistatic measurement is a two step process that requires at least two charge measurements As shown in the figure be...

Page 1158: ...e The figure below shows a typical graph that is generated by this test The shape of the curves in the following figure indicate that measurements were made with the device in equilibrium If the curve...

Page 1159: ...nstant for this test Details on simultaneous C t measurements are provided in C t measurements on page D 2 This example assumes that the Model 82 is connected directly to the DUT The DUT can be a devi...

Page 1160: ...fer to CtSweep82 user module on page D 33 for definitions of the input parameters If using the parameters shown in C t sweep on page D 18 the 590 performs 100 capacitance measurements using a 100 ms s...

Page 1161: ...citance tests Formulas to calculate data for graphs are in the Formulator for each test To open the Formulator dialog box click Formulator in the Test Settings pane for the selected test The following...

Page 1162: ...y high frequency CV RS AT MAVG G_OR_R 5 WF MAVG CHF 5 MAXPOS MAVG CHF 5 2 1 AT MAVG G_OR_R 5 WF MAVG CHF 5 MAXPOS MAVG CHF 5 2 AT MAVG G_OR_R 5 MAXPOS MAVG CHF 5 AR Intermediate parameter for calculat...

Page 1163: ...or WMS WM WS EBG 2 PHIB QEFF Effective charge in oxide QEFF COX WMS VFB AREA BEST_LO Index from DEPTHM array that is three Debye lengths from the surface BEST_LO FINDD DEPTHM 3 DEBYEM 2 BEST_HI Index...

Page 1164: ...MAVG CHF 5 2 AT MAVG G_OR_R 5 MAXPOS MAVG CHF 5 AR Intermediate parameter for calculation of CC AR G_OR_R G_OR_R 2 WF CHF 2 RS CC Corrected high frequency capacitance by compensating serial resistanc...

Page 1165: ...and step voltages Most C V data is derived from the sweep transition or depletion region of the C V curve For that reason start and stop voltages should be chosen so that the depletion region makes up...

Page 1166: ...compromise results from choosing parameters that will yield a capacitance change per step of approximately ten times the error in the signal Sweep Direction For C V sweeps you can sweep either from a...

Page 1167: ...of quasistatic capacitance and Q t current measurements using different delay times The figure below shows the typical capacitance and Q t curves generated for this test As shown the optimal delay is...

Page 1168: ...the non equilibrium region so data in that region should be considered to be invalid when using corrected capacitance If it is necessary to use corrected capacitance when determining delay time it is...

Page 1169: ...rors The cable correction provides nonlinearity compensation for high frequency measurements even for non ideal configurations such as switching matrices Voltage dependent offset Voltage dependent off...

Page 1170: ...lecomp Performs cable compensation using known capacitance source values CTsweep82 on page D 33 ctsweep Performs C t measurements DisplayCableCompCaps82 on page D 36 display cap file Places capacitanc...

Page 1171: ...k Use compensation for the 100 kHz frequency Skip compensation for this frequency 0 Do compensation for this frequency 1 Freq1M Use compensation for the 1 MHz frequency Skip compensation for this fre...

Page 1172: ...90_NOT_IN_KCON There is no CMTR defined in your system configuration 10090 GPIB_ERROR_OCCURRED A GPIB communications error occurred 10100 INVAL_PARAM An invalid input parameter is specified If CabComp...

Page 1173: ...he selected range The system performs the low capacitor compensation 3 You are prompted to connect the high value capacitor for the selected range The system does the high value capacitor compensation...

Page 1174: ...see Details Num_Points Number of sampling points 1 to 1350 Range590 The measurement range for the 590 1 to 4 see Details for valid range values Model590 The measurement model to use for high frequency...

Page 1175: ...t plot The figure below shows the default parameters for the ctsweep UTM which uses the CtSweep82 user module In this example the Model 82 is set to first stress the DUT at 3 V for three seconds and t...

Page 1176: ...enter C calfiles 82cal dat If you are controlling a switch matrix to route signals using a connection UTM for example connect you do not need connect InputPin and OutputPin Set these parameters to 0...

Page 1177: ...ule are placed into a spreadsheet for viewing Usage status DisplayCableCompCaps82 char CabCompFile double Range int RangeSize double Values100 k int Values100 kSize double Values1M int Values1MSize st...

Page 1178: ...alues1MSize arrays must be set to 8 For details on the procedure to perform cable compensation refer to Cable compensation tests on page D 9 The returned arrays are arranged in the order shown in the...

Page 1179: ...rSize status Returned values are placed in the Analyze sheet see Details Test_Bias Voltage bias for capacitance measurements 120 V to 120 V LeakageCorrection Disable 0 Enable 1 Hold_Time Hold time at...

Page 1180: ...s a function of delay time using the 595 It is used to determine the equilibrium condition Each quasistatic capacitance reading is calculated from charge measurements performed on every two steps of a...

Page 1181: ...system configuration 10090 GPIB_ERROR_OCCURRED A GPIB communications error occurred 10091 GPIB_TIMEOUT A timeout occurred during communications 10020 COMP_FILE_ACCESS_ERR There was an error accessing...

Page 1182: ...the low range capacitor used to perform cable compensation for the 20 pF range and 1 MHz frequency 0 F to 9 5E 12 F Hi20p100k The nominal value of the high range capacitor used to perform cable compe...

Page 1183: ...to perform cable compensation CableCompensate82 can then access the capacitance source values from this file The user must have the proper system permissions in order for this user module to create a...

Page 1184: ...cified compensation file does not exist 10022 KI590_NOT_IN_KCON There is no CMTR defined in your system configuration 10090 GPIB_ERROR_OCCURRED A GPIB communications error occurred 10100 INVAL_PARAM A...

Page 1185: ...ltage on substrate 120 V to 120 V VSub_Stop Stop voltage on substrate 120 V to 120 V VSub_Step Voltage step size 0 V 0 01 V 0 02 V 0 05 V or 0 1 V Range595 The measurement range for the 595 to use 200...

Page 1186: ...ub_Step 1 G_or_R Output the array of measured conductance G or resistance R values G_or_R_ArrSize This must be set to a value equal to the number of voltage steps in the sweep or value VSub_Stop VSub_...

Page 1187: ...cable compensation file 10021 COMP_FILE_NOT_EXIST The specified compensation file does not exist 10023 KI590_MEAS_ERROR A measurement error occurred 10090 GPIB_ERROR_OCCURRED A GPIB communications er...

Page 1188: ...D 65 Analysis methods The following figures show fundamental C V curves for p type and n type materials Both high frequency and quasistatic curves are shown in these figures Note that the high freque...

Page 1189: ...mes more negative with n type materials Nicollian and Brews 372 374 If CH is greater when VGS is negative than VGS when poitive the substrate material is p type If CH is greater with positive VGS than...

Page 1190: ...ries resistance using the simplified three element model shown in the simplified model below In this model COX is the oxide capacitance CA is the capacitance of the accumulation layer The series resis...

Page 1191: ...and capacitance and flatband voltage The Model 82 uses the flatband capacitance method of finding flatband voltage VFB The Debye length is used to calculate the ideal value of flatband capacitance CFB...

Page 1192: ...012 units multiplier S permittivity of substrate material q electron charge 1 60219 10 19 coulombs NBULK bulk doping cm 3 B bulk potential V VFB flatband voltage V Metal semiconductor work function di...

Page 1193: ...licon dioxide heavily doped polysilicon is often used as the gate material The goal is to achieve a minimal work function difference between the gate and the semiconductor while maintaining the conduc...

Page 1194: ...n this case QEFF 2 5 x 10 4 coul cm2 The effective oxide charge concentration NEFF is computed from effective oxide charge and electron charge as follows Where NEFF effective concentration of oxide ch...

Page 1195: ...the reciprocal of the slope of the 1 C2 versus VGS curve and the V intercept point is equal to the flatband voltage caused by surface charge and metal semiconductor work function Nicollian and Brews 3...

Page 1196: ...VGS is calculated with the results placed in the S column of the array Surface potential is calculated as follows Where S 0 surface potential V CQ quasistatic capacitance pF COX oxide capacitance pF V...

Page 1197: ...own below Nicollian and Brews 322 Where CIT interface trap capacitance F DIT interface trap density cm 2 eV 1 CQ quasistatic capacitance F CH high frequency capacitance F COX oxide capacitance F A gat...

Page 1198: ...est DUT The STVS method has proven to be effective in monitoring mobile ion charge in dielectrics to levels down to 109 cm 3 The STVS library can perform the corresponding mobile ion charge analysis I...

Page 1199: ...a voltage at 200 300 to drift mobile ions across the oxide The flatband voltage differential between the two curves is then calculated from which charge density can be determined From Nicollian and B...

Page 1200: ...charges move from one side of the oxide to the other The quasistatic curve will peak during the movement of the mobile charge Calculation of the mobile charge involves taking the difference in the hig...

Page 1201: ...layed simultaneous C V curves Generation velocity and generation lifetime Zerbst plot Zerbst analysis requires two types of data C V and C t Important data taken from the C V measurement includes COX...

Page 1202: ...ce pF nI intrinsic carrier concentration cm 3 tint time interval between C t measurements s i 2 Rdgs 1 w wF computation Where w depletion depth cm wF equilibrium inversion depth cm S permittivity of s...

Page 1203: ...summarizes data symbols in the library including a description of each symbol Data symbols Symbol Description Units A Device gate area cm 2 CFB Flatband capacitance corresponding to no band bending pF...

Page 1204: ...ate with respect to the substrate V VFB Flatband voltage or the value of VGS that results in CFB V VH Voltage reading sent by Model 590 with matching CH and G V VTH The point where the surface potenti...

Page 1205: ...017 Effective charge concentration Flatband capacitance Where extrinsic DeBye length Nx N at 90 WMAX or NA or ND when input by the user Flatband voltage shift Interface trap capacitance and Interface...

Page 1206: ...ces below are cited in this chapter Nicollian E H and Brews J R MOS Physics and Technology Wiley New York 1982 Sze S M Physics of Semiconductor Devices 2nd edition Wiley New York 1985 Snow E H Grove A...

Page 1207: ...ts Solid State Electronics 27 953 1984 Boulin D M Brews J R and Nicollian E H Digital implementation of the Q C Method for MOS Measurements Solid State Electronics 27 977 1984 Derbenwick G F Automated...

Page 1208: ...Phys 44 3228 1973 Gordon B J On Line Capacitance Voltage Doping Profile Measurement of Low Dose Ion Implants IEEE Trans Dev ED 27 12 1980 VanGelder W and Nicollian E H Silicon Impurity Distribution a...

Page 1209: ......

Page 1210: ...or in a semiconductor characterization test system is stress testing The stress is a burst of pulses applied by the pulse generator to a semiconductor device such as a flash memory cell The 4200A SCS...

Page 1211: ...t the pulse generator to equipment that uses triaxial connectors for example the probe station test fixture and matrix card Probe station and test fixture connections The following figure shows connec...

Page 1212: ...ete the return path a separate cable connection from the GNDU to the chassis of the pulse generator is required Remember the chassis of the pulse generator is output LO Figure 617 Connections to switc...

Page 1213: ...r instruction For additional detail on KCon refer to Keithley Configuration Utility on page 7 1 HP8110ulib user library Use the user modules in the HP8110ulib user library to control a Keysight Model...

Page 1214: ...B_TIMEOUT A time out occurred during communications 10100 INVAL_PARAM An invalid input parameter is specified instr_id The PGU pulse generator instrument ID PGUX where X is a number from 1 through 8 c...

Page 1215: ...nstr_id The PGU instrument ID PGUX where X is a number from 1 through 8 configuration dependent the PGU instrument ID effectively corresponds to a single pulse generator channel DelayTime The amount o...

Page 1216: ...8110 user module defines the pulse timing and voltage settings Once defined the pulse can be triggered using the PguTrigger8110 user module The following figure shows the default parameters for pgu1 s...

Page 1217: ...PGU was never initialized 10042 HP8110_PULSE_ERROR There was an error during pulsing 10090 GPIB_ERROR_OCCURRED A GPIB communications error occurred 10091 GPIB_TIMEOUT A timeout occurred during commun...

Page 1218: ...provided with the 4200A SCS to simplify prober control This generic prober user library developed and maintained by Keithley Instruments allows Clarius to control all supported probers in the same ma...

Page 1219: ...connections to the 4200A SCS while the instrument is powered on Turn off the equipment from the front panel or disconnect the main power cord from the rear of the 4200A SCS before handling cables Put...

Page 1220: ...ober You use the prober control software to define a list of wafer locations to be probed The 4200A SCS relies on the prober controller and associated software to maintain this probe list The PRBGEN u...

Page 1221: ...m top to bottom You can also select the starting point for each run For example if you highlight a device only the tests and actions that are selected and under that device will be used when you selec...

Page 1222: ...ce probesites project Configure the probesites project 1 In Clarius select Configure 2 In the project tree select probesites 3 Set the Project Execution Loop Settings as needed for your project The ex...

Page 1223: ...ference Manual F 6 4200A 901 01 Rev C February 2017 Example test execution sequence probesubsites project In this example the probesubsites project is selected When you run the test for the site tests...

Page 1224: ...ober once aligned The physical location of the reference site may be any coordinate that is selected on the wafer and is selected for probing or marked for probing through the prober software The coor...

Page 1225: ...tion Chuck movement Coordinate movements are described using a first quadrant coordinate system and x y coordinates x values move east and y values move north To accommodate this system you must confi...

Page 1226: ...remote prober control real prober The coordinate system is based on the xstart_position and ystart_position parameters of the prober init action The site coordinates change only after a site movement...

Page 1227: ...use PRBGEN work with any prober supported by Keithley Instruments The user modules in the PRBGEN user library are provided as actions in Clarius PRBGEN user modules User module Clarius action Descrip...

Page 1228: ...et by the units parameter x_start_position The x location of the prober position at alignment y_start_position The y location of the prober position at alignment units The units 0 Mils 1 Millimeters s...

Page 1229: ...pins make contact with the wafer or separate the pins from the wafer Usage status PrChuck int chuck_position status Returned values see Details chuck_position The chuck position 0 Separate from the c...

Page 1230: ...e before the move Usage status PrSSMovNxt int ink_number status Returned values refer to Details ink_number The inkers to fire 0 No inker move only 1 1 2 2 3 1 2 4 3 5 1 3 6 2 3 7 1 2 3 8 4 9 1 4 10 2...

Page 1231: ...before the move Usage status PrMovNxt int ink_number status Returned values refer to Details ink_number The inkers to fire 0 No inker move only 1 1 2 2 3 1 2 4 3 5 1 3 6 2 3 7 1 2 3 8 4 9 1 4 10 2 4 1...

Page 1232: ...o test five identical sites or die or reticles on a sample wafer Each wafer site has two subsites or test element groups At each subsite there are two devices or test elements to be tested 4 terminal...

Page 1233: ...tutorial is shown in the following figure The 4200A SCS and probe station are connected to a 7174A matrix card The matrix card is installed in the switch matrix and the switch matrix and probe statio...

Page 1234: ...init initializes the prober driver 2 The test moves to subsite1 4terminal n fet 3 The action prober contact moves the chuck to the wafer 4 The action connect connects the SMUs to the probes for the n...

Page 1235: ...32 Connect SMUs to NPN transistor 8 The test runs vce ic 1x which generates a collector family of curves IC vs VC for the transistor 9 The action prober ss move moves the prober to the next subsite 10...

Page 1236: ...se to move the chuck and select subsites PB GPIB Use to configure the GPIB interface PB RS 232 Use to configure the serial interface Prober Setup in the service programs folder Use to initialize the s...

Page 1237: ...0000 ProberBench Control Box 2 4 Product Name Remote Communicator for ProberBench NT Product Version 3 00 Copyright Karl Suss 1998 All Rights Reserved Kernel 3 000000 ProberBench Kernel Version 3 10 1...

Page 1238: ...Connect the 4200A SCS GPIB port and the ProberBench NT computer s GPIB port using a GPIB cable Model 7007 Refer to the following two graphics and table for a connection diagram connector diagram and c...

Page 1239: ...EN 24 Management 18 Gnd 6 Ground 19 Gnd 7 Ground 20 Gnd 8 Ground 21 Gnd 9 Ground 22 Gnd 10 Ground 23 Gnd 11 Ground 24 Gnd LOGIC Ground Set up communications on the 4200A SCS On the 4200A SCS you need...

Page 1240: ...sent HotchuckPresent HandlerPresent Probe2PadPresent Configuration for PA200 probers PA200 PROBER_1_PROBTYPE PA200 PROBER_1_OPTIONS 0 0 0 0 1 0 PROBER_1_IO_MODE SERIAL PROBER_1_DEVICE_NAME COM1 PROBER...

Page 1241: ...C February 2017 Set up communications on the prober You can configure the PA 200 prober for serial or GPIB communication Ensure that the prober is set up for the type of communications interface that...

Page 1242: ...etup 7 Click Close 8 From the ProberBench NT window double click the PBRS232 file COM2 is used for communications between the 4200A SCS and the ProberBench NT COM1 is used for communications between t...

Page 1243: ...click the ProberBench NT icon shortcut on desktop 2 Double click the Service Programs file 3 Double click the Prober Setup file in the Service Programs directory The Prober Setup window appears see th...

Page 1244: ...Microtech PA200 Prober 4200A 901 01 Rev C February 2017 G 9 7 From the ProberBench NT window double click the PB GPIB file Figure 638 ProberBench NT window 8 From the ProberBench GPIB Interface from t...

Page 1245: ...ator to CR Figure 640 Interface Configuration dialog box 10 GPIB only Ensure that the GPIB address matches the address in the configuration file 11 Click OK Leave the Suss RS232 on COMM2 dialog box op...

Page 1246: ...G Using a Cascade Microtech PA200 Prober 4200A 901 01 Rev C February 2017 G 11 2 From the ProberBench NT window select the Wafer Map file Figure 642 ProberBench NT window 3 From the WaferMap dialog b...

Page 1247: ...Configure menu select Edit Map 5 Enter the wafer geometry values and click Apply 6 Click OK Figure 644 Wafer Edit dialog 7 From the Configure menu select Coordinates Figure 645 Configure pull down 8 F...

Page 1248: ...lves using the software to create a selection of dies to probe If a single subsite per die is to be probed refer to Probesites Clarius project example on page H 17 Creating a site definition for multi...

Page 1249: ...From the ProberBench NT window select the WaferMap file Figure 649 ProberBench NT window 3 From the WaferMap window select and open the appropriate file Load align and contact the wafer Using the Prob...

Page 1250: ...Die 5 From the Setup menu select Home Die Figure 651 Setup menu 6 Choose the home die on the WaferMap When choosing the home die The wafer should be on the chuck and physically in the correct HOME po...

Page 1251: ...s X 13 573 mm and Y 14 818 mm set up to move four die to the left and also the right at 54 292 mm 4 13 573 mm 54 292 mm Figure 653 Aligning the wafer Step a 2 Select Automatically move chuck to each p...

Page 1252: ...5 Manually align pins and pads POINT 2 and select Finish Figure 654 Aligning the wafer Point 2 Verify wafer alignment Confirm that the alignment is correct the alignment procedure is repeated To check...

Page 1253: ...e alignment If the alignment is correct click Finish Figure 656 Aligning the wafer Point 2 Set the chuck heights To set the chuck heights 1 Launch the navigator from the ProberBench NT window icon 2 I...

Page 1254: ...1 Rev C February 2017 G 19 3 Click Set Z The Set Chuck Heights dialog box is displayed Figure 658 Set chuck heights 4 Click Read The contact height value changes to the present height 5 Click Apply 6...

Page 1255: ...ject Save to save the WaferMap configuration Figure 660 PA200 WaferMap Save Clarius probesubsites project example The following is a step by step procedure to configure the PA 200 so the probesubsites...

Page 1256: ...indow from the Mark Dies menu select Mark to Skip Figure 663 Mark Dies menu 4 Use Mark to Skip and Mark to Probe to set dies Click a die in the WaferMap window to either set or clear the die The color...

Page 1257: ...meter Analyzer Reference Manual G 22 4200A 901 01 Rev C February 2017 5 From the View menu select Die Map Figure 664 View menu 6 Set up the die map 7 From the View menu select the Table editor The spr...

Page 1258: ...10 From the Table menu select Save or Save As An x in the On column defines the subsites that will be probed when using the subsite probing project in other words when using PrSSMovNxt Other subsites...

Page 1259: ...ferMap window to either set or clear the die The color of the die indicates status probes white dies skips blue dies With Mark to Probe selected drag to select multiple dies With Mark to Skip selected...

Page 1260: ...use KCon to add the prober to the configuration 1 Open KCon 2 At the bottom of the Configuration Navigator select Add External Instrument The Add External Instrument dialog box is displayed Figure 67...

Page 1261: ...berBench NT computer 1 After the wafer is set up and alignment is complete select the File Project Save 2 Select File Map Save 3 Select File Table Save The wafer is ready to probe 4 Place the prober i...

Page 1262: ...ure 673 probesubsites project tree 6 Click Run Commands and error symbols The following table contains error and status symbols listed by command Available commands and responses PrChuck PrInit PrMovN...

Page 1263: ...PR_OK Command executed properly 2 PR_MOVECOMPLETE Prober moved to next die confirmed 4 PR_WAFERCOMPLETE Next wafer loaded confirmed 1006 INVAL_MODE Invalid mode 1008 SET_MODE_FAIL Failure setting mod...

Page 1264: ...rober with the Keithley Instruments 4200A SCS pcBridge Used to configure the communications setup icon on the desktop pcLaunch Used to launch various wafer controls and utilities icon on the desktop p...

Page 1265: ...omanipulator 8860 prober and its supporting documentation before attempting setup configuration or operation To set up and configure the 8860 prober for use with the 4200A SCS you will Set up communic...

Page 1266: ...Model 4200A SCS Parameter Analyzer Reference Manual Appendix H Using a Micromanipulator 8860 Prober 4200A 901 01 Rev C February 2017 H 3 Figure 674 Prober setup Serial connections...

Page 1267: ...in pcBridge window 6 Select the Setup menu The pcBridge Communications Setup window is displayed Figure 677 pcBridge window 7 Use the pcBridge Communications Setup to configure the communications sett...

Page 1268: ...indow 10 From the pcLaunch window set the Joystick Mode for Linear Figure 680 Joystick modes Modify the prober configuration file The default prober configuration file is shown below As shown the file...

Page 1269: ...TIONS 1 1 1 1 1 1 OcrPresent AutoAlnPresent ProfilerPresent HotchuckPresent HandlerPresent Probe2PadPresent The PROBER_x_PROBTYPE fields needs to be set to one of the following names Configuration for...

Page 1270: ...figure is displayed Click OK and continue the configuration the device will be initialized when the chuck is homed Figure 683 pcNav Boot warning Since the platen moves to make or break contact betwee...

Page 1271: ...create a selection of the subsites on each die that will be probed If multiple subsites for each die will be probed refer to the Probesubsites Clarius project example on page H 23 Use the following in...

Page 1272: ...ndow 3 Select the file and click OK Load align and contact the wafer The following topics describe how to contact the wafer Home the chuck To home the chuck 1 On the pcBridge computer click the pcLaun...

Page 1273: ...Manual H 10 4200A 901 01 Rev C February 2017 Figure 691 pcNav window The OVD button toggles the state of the overdrive on or off 3 Click the Home button on the Tools panel of the pcNav window The Init...

Page 1274: ...01 Rev C February 2017 H 11 Figure 693 Initialize positioners to Home window 4 From the Initialize positioners to Home window click Home chuck The chuck moves to the back left corner and then to the...

Page 1275: ...s off 2 Click the Load wafer button on the Tools panel of the pcNav window The Load Wafer dialog box appears See the following two figures Figure 694 Load Wafer button Figure 695 Load Wafer window 3 I...

Page 1276: ...X and Y but not Z When changing Z height moving the platen up or down a higher number moves closer to contact while a lower number moves away from contact for example if 300 is contact 200 would be n...

Page 1277: ...are in contact with their respective pad 6 Use the Dial to move the pins to a non contact position this height in the example is 300 7 Click the Set Up button If the pins are not aligned to the same...

Page 1278: ...the Tools panel of the pcNav window The Prb8860 Alignment window opens Figure 700 Align wafer button Figure 701 Prb8860 Alignment window 2 Select Ref Axis X in the Prb8860 Alignment dialog box 3 Sele...

Page 1279: ...die sizes on page H 16 for more information Figure 703 Set X Y die size button Figure 704 4200 901_Set X Y Die Size dialog box Calculate die sizes To calculate die sizes 1 Place pins over pads in uppe...

Page 1280: ...button and Zero C R If you want the columns and rows to be something other than 0 0 1 1 for instance edit values in Set Reference dialog box as needed before clicking Done 11 Click Done Figure 706 Set...

Page 1281: ...diameter a Move the pins to the left edge of the wafer b Click Left on the Setup Options window c Repeat for the top and right edges of the wafer clicking the respective buttons after each movement d...

Page 1282: ...sizes on page H 16 Set spline pattern optional The order of selection of the die the spline pattern change using edit die program and the reference die location determine test order sequence To set s...

Page 1283: ...attern is transferred to the Edit Die Program Parameters dialog box as shown in the following figure Figure 713 Edit Die Program Parameters window 4 Click Save on the Die Program Tools window 5 To ope...

Page 1284: ...o the configuration 1 Open KCon 2 At the bottom of the Configuration Navigator select Add External Instrument The Add External Instrument dialog box is displayed Figure 714 Add a prober in KCon 3 Sele...

Page 1285: ...etermines the pins that are available to assign to a switch matrix card column 7 Select Save Clarius Use Clarius to load and run the probesites project using the new KCon configuration file which allo...

Page 1286: ...xample five dies have been selected for probing On each die two subsites have been selected Use the pcBridge to configure the 8860 1 Move to the first subsite of the first die 2 Add it to the program...

Page 1287: ...t subsite to be tested 3 Click add or ins insert into list The add button adds the description of the present position to the end of the program listing and the ins button inserts the present position...

Page 1288: ...le click the pcIndie open button in the pcIndie window Select the file and click OK Figure 721 pcIndie open button Use KCon to add a prober On the 4200A SCS use KCon to add the prober to the configura...

Page 1289: ...r 8860 Prober as the model 6 Ensure that the Number of Pins Positioners is correct The number of pins defined here determines the pins that are available to assign to a switch matrix card column 7 Sel...

Page 1290: ...Model 4200A SCS Parameter Analyzer Reference Manual Appendix H Using a Micromanipulator 8860 Prober 4200A 901 01 Rev C February 2017 H 27 Figure 724 probesubsites project tree 6 Click Run...

Page 1291: ...ted properly 2 PR_MOVECOMPLETE Prober moved to next die confirmed 4 PR_WAFERCOMPLETE Next wafer loaded confirmed 1006 INVAL_MODE Invalid mode 1008 SET_MODE_FAIL Failure setting mode 1011 BAD_MODE Oper...

Page 1292: ...esponsible for the prober station set up Manual prober overview Use the MANL prober to test without using automatic prober functionality Configuring the environment for a MANL prober replaces all comp...

Page 1293: ...uses the PrssMovNxt command to move to the next subsite 6 Issue PRChuck and PRMovNxt commands until all sites are tested Fake prober overview Use the FAKE prober to test without probing You can use th...

Page 1294: ...Prober The following tag PRBCNFG is used by the engine in order to determine the MAX number of SLOTS and CASSETTES for a given prober at runtime PRBCNFG for OPTIONS NULL max 32 chars in string Example...

Page 1295: ...PROBTYPE fields needs to be set to one of the following names Configuration for serial probers FAKE PROBER_1_PROBTYPE FAKE PROBER_1_OPTIONS 0 0 0 0 1 0 PROBER_1_IO_MODE SERIAL PROBER_1_DEVICE_NAME COM...

Page 1296: ...configuration 1 Open KCon 2 At the bottom of the Configuration Navigator select Add External Instrument The Add External Instrument dialog box is displayed Figure 728 Add a prober in KCon 3 Select Pro...

Page 1297: ...mines the pins that are available to assign to a switch matrix card column 7 Select Save Clarius Use Clarius to load and run the probesites project using the new KCon configuration file which allows y...

Page 1298: ...e to configure the manual prober so the probesubsites Clarius project executes successfully The user is responsible for the probe station set up Use KCon to add a prober On the 4200A SCS use KCon to a...

Page 1299: ...Fake Prober as the model 6 Ensure that the Number of Pins Positioners is correct The number of pins defined here determines the pins that are available to assign to a switch matrix card column 7 Selec...

Page 1300: ...Model 4200A SCS Parameter Analyzer Reference Manual Appendix I Using a manual or fake prober 4200A 901 01 Rev C February 2017 I 9 Figure 733 probesubsites project tree 6 Click Run...

Page 1301: ......

Page 1302: ...CS Nucleus UI ver 2 0 Probe station configuration Make sure that you are familiar with the Cascade Summit 12000 Prober and its supporting documentation before attempting setup configuration or operati...

Page 1303: ...r terminals Contact number GPIB designation Type 1 DI01 Data 2 DI02 Data 3 DI03 Data 4 DI04 Data 5 EOI 24 Management 6 DAV Handshake 7 NRFD Handshake 8 NDAC Handshake 9 IFC Management 10 SRQ Managemen...

Page 1304: ...mmit 12000 Prober 4200A 901 01 Rev C February 2017 J 3 The following figure shows connections between the Cascade Summit 12000 prober to the Keithley Instruments 4200A SCS Figure 735 Connection diagra...

Page 1305: ...n Figure 737 Login window 3 After login is complete the prober initializes the stage Click Proceed when the prober has completed initialization 4 Maximize the system manager Component List and Status...

Page 1306: ...Communications GPIB 6 If the Communications GPIB component is running click the Stop button or proceed to the next step setup Figure 739 Stop button 7 Click the Setup button to open the GPIB configur...

Page 1307: ...ence Manual J 6 4200A 901 01 Rev C February 2017 11 Minimize but do not close the system manager window 12 Click Remote on the Nucleus UI toolbar to display the Remote Window See the following three f...

Page 1308: ...electing boxes on the setup window only affects the DISPLAY properties It will not change the GPIB physical setting Use the dialog box in the GPIB configuration window to make changes to the GPIB addr...

Page 1309: ...1 OcrPresent AutoAlnPresent ProfilerPresent HotchuckPresent HandlerPresent Probe2PadPresent Configuration for direct GPIB probers CC12K PROBER_1_PROBTYPE CC12K PROBER_1_OPTIONS 0 0 0 0 1 0 PROBER_1_IO...

Page 1310: ...Using a Cascade Summit 12000 Prober 4200A 901 01 Rev C February 2017 J 9 2 Log in 3 From the Window menu of the Nucleus toolbar select WaferMap to display the wafer map window See the following two f...

Page 1311: ...Wafer Map wizard Figure 751 Step 1 Wafer Map Wizard 5 Enter the label and wafer diameter in the Wafer Map Wizard window 6 Click Next 7 Select Flat or Notch based on the actual wafer 8 Enter either th...

Page 1312: ...a Cascade Summit 12000 Prober 4200A 901 01 Rev C February 2017 J 11 11 Enter the correct die and street sizes Figure 753 Step 3 Wafer Map Wizard 12 Click Next 13 Select the die position Optionally sel...

Page 1313: ...sitive Y Up would define the coordinate as Quadrant I while setting Define Positive X Right and Define Positive Y Down would define the coordinate as Quadrant IV 17 Select Mark Test Sites You can drag...

Page 1314: ...subsites per die also involves using the software to create a selection of dies to probe but also includes creating a selection of the subsites on each die that will be probed If multiple subsites per...

Page 1315: ...0 Prober Model 4200A SCS Parameter Analyzer Reference Manual J 14 4200A 901 01 Rev C February 2017 4 From the wafer Map Window select File Open Figure 759 Wafer Map window 5 Open the wafer map file Fi...

Page 1316: ...probe station computer 1 From the Nucleus toolbar select Window Motion Control The Motion Control window opens See the following two figures Figure 761 Nucleus toolbar Figure 762 Motion Control windo...

Page 1317: ...toolbar turn on the camera screen by clicking the Video button Figure 766 Video button If the LIGHT is off the video will be blank 7 From the Nucleus UI toolbar turn on the light by clicking the Light...

Page 1318: ...to the present position When choosing the reference die The wafer should be on the chuck and physically in the correct reference position Click the die on the wafer map UI that will be the reference d...

Page 1319: ...right edge of the wafer 7 Make a small adjustment in theta when motion stops 8 Click No when the alignment is correct 9 Set the contact position set the current Z as contact position The Z contact po...

Page 1320: ...ition and slow fine adjustment when close to the Z contact position When setting the Z contact the camera stays focused on the probe needles not on the wafer Probesites Clarius Project example The fol...

Page 1321: ...Cascade prober as the model 6 Make sure the Number of Pins Positioners is correct The number of pins defined here determines the pins that are available to assign to a switch matrix card column 7 Sel...

Page 1322: ...project tree 6 Click Run Probesubsites Clarius Project example The following is a step by step procedure to configure the Summit 12000 so the probesubsites project executes successfully Using the Nucl...

Page 1323: ...Parameter Analyzer Reference Manual J 22 4200A 901 01 Rev C February 2017 2 Log in 3 From the Window menu of the Nucleus toolbar select WaferMap to display the wafer map window See the following two...

Page 1324: ...ry 2017 J 23 4 From the Wafer Map window select File Open to open a wafer map file 5 Click Wafer Sub Die from the Wafer Map menu A subsite dialog box opens See the following figure Figure 781 Open Sub...

Page 1325: ...and y offset 8 Continue to add new subsites until finished Figure 784 Make four new subsites 9 Click the label name and type in a new description to relabel each subsite Figure 785 Relabel the subsite...

Page 1326: ...rober to the configuration 1 Open KCon 2 At the bottom of the Configuration Navigator select Add External Instrument The Add External Instrument dialog box is displayed Figure 786 Add a prober in KCon...

Page 1327: ...are available to assign to a switch matrix card column 7 Select Save 8 Exit KCon Clarius Use Clarius to load and run the probesites or probesubsites project using the new KCon configuration file whic...

Page 1328: ...AM X BAD_MODE X X X UNEXPE_ERROR X X X PR_WAFERCOMPLETE X X Information and error code return values and descriptions Value Constant Explanation 1 PR_OK Command executed properly 2 PR_MOVECOMPLETE Pro...

Page 1329: ......

Page 1330: ...ation applies to all Signatone semi auto prober systems with Interlink controllers Software versions The following software versions on the CM500 prober was used to verify the configuration of the pro...

Page 1331: ...t up properly for the GPIB communications interface To set up communications 1 Double click the CM500 icon on the Windows desktop The prober initializes the wafer XY stage theta and Z chuck Figure 789...

Page 1332: ...00 sys dat Note that the default GPIB address is set to 28 5 If the address does not match enter the new GPIB address then click OK Figure 793 Set GPIB Address Modify the prober configuration file The...

Page 1333: ...OPTIONS NULL max 32 chars in string Example 01234567890 PROBER_1_OPTIONS 1 1 1 1 1 1 OcrPresent AutoAlnPresent ProfilerPresent HotchuckPresent HandlerPresent Probe2PadPresent Configuration for direct...

Page 1334: ...1 Click the Prober Setup icon on the toolbar shown below Figure 794 CM500 Prober Setup icon 2 Select Wafermap Setup tab to set up wafer information such as wafer size scan distance X step size and Y s...

Page 1335: ...M500 Prober wafermap Load align and contact the wafer 1 Click the Load wafer icon on toolbar Figure 798 CM500 Prober load wafer icon 2 Select Start to move the wafer to Home and begin the sequences of...

Page 1336: ...ick Scan Check to verify that the wafer is aligned correctly 10 Click Fine Align to make a minor alignment 11 After the wafer is aligned set the HOME die of the wafer and wafermap Set the Home die of...

Page 1337: ...ap Function window Adjust the Z chuck 1 If an edge sense card is being used as the contact input for Z Chuck you must select the Setup SoftZ Contact option from the Setup menu Figure 805 CM500 Prober...

Page 1338: ...sense is plugged in for contact input turn ON SoftZ A red LED will appear in the motion control panel Figure 808 CM500 Prober Motion Control Panel 5 Move the Z Chuck down using the Separate icon on th...

Page 1339: ...the wafermap and click Enter Click Enter All to test all dies Figure 812 CM500 Prober wafermap includes program sites 4 To step through all the programmed sites select the Run Program Site icon on th...

Page 1340: ...re 816 CM500 Prober Edit Subsite icon 2 Select Wafer as the subsite device Figure 817 CM500 Prober Edit Subsite window 3 Move the wafer stage to the HOME position All data recorded for the subsite is...

Page 1341: ...he CM500 prober is connected to the 4200A SCS by GPIB interface the 4200A SCS is the GPIB master controller and the CM500 is always in listening mode The 4200A SCS will send control commands to the CM...

Page 1342: ...t The number of pins defined here determines the pins that are available to assign to a switch matrix card column 7 Save the configuration 8 Exit KCon Clarius project example To set up a new prober pr...

Page 1343: ...size for your wafer 4 Set units to either 0 for English or 1 for metric 5 Check the subprobtype If the CM500 prober is presently not at its first site set subprobtype to 1 otherwise set it to 0 Set up...

Page 1344: ...d select Promote Action twice so that prober separate is at the site level Figure 822 New prober separate UTM The position of the action in the project tree determines when the action is run during a...

Page 1345: ...test 9 Select Configure 10 For prober move set the inknumber to 1 if you need to trigger inker 1 otherwise set it to 0 Figure 823 prober next in the project tree Probesites Clarius project example On...

Page 1346: ...ence Manual Appendix K Using a Signatone CM500 Prober 4200A 901 01 Rev C February 2017 K 17 Figure 824 Set prober init mode parameters 8 In the project tree select probesites 9 Choose Run to execute t...

Page 1347: ...llow you to execute the project for this prober This project uses a Series 700 Switching System and the connect actions to change the instruments connected to each pin without changing the physical co...

Page 1348: ...K 19 Figure 827 Run probesubsites Commands and error symbols The following list contains error and status symbols listed by command Available commands and responses PrChuck PrInit PrMovNxt PrSSMovNxt...

Page 1349: ...OK Command executed properly 2 PR_MOVECOMPLETE Prober moved to next die confirmed 4 PR_WAFERCOMPLETE Next wafer loaded confirmed 1006 INVAL_MODE Invalid mode 1008 SET_MODE_FAIL Failure setting mode 10...

Page 1350: ...use it maps more easily to device models Incorporating pulsed stress testing provides additional data that permits a better understanding of device performance in frequency dependent circuits The test...

Page 1351: ...e transistor manufacturing process JESD35 A Published Apr 2001 Procedure for Wafer Level Testing of Thin Dielectrics This document is intended for use in the MOS Integrated Circuit manufacturing indus...

Page 1352: ...cts The Hot Carrier Injection HCI projects determine HCI on MOSFETs The hci 1 dut project determines HCI degradation on a single 4 terminal n MOSFET The hci 4 dut project determines HCI degradation on...

Page 1353: ...ecified time before repeating the tests The Stress Properties pane for the hci 1 dut project is shown in the following figure Figure 829 Stress Properties for the hci 1 dut project The hci 4 dut proje...

Page 1354: ...February 2017 L 5 Negative Bias Temperature Instability project The Negative Bias Temperature Instability nbti 1 dut project performs NBTI testing on a p MOSFET with temperature and DC stress The foll...

Page 1355: ...cle to characterize the device subsequent cycles voltage stress the device for a specified time before repeating the tests After the subsite cycling is complete the chuck cooling action cools the chuc...

Page 1356: ...metal line This project includes actions to control the temperature of the chuck The subsite will not start cycling until the chuck reaches the specified temperature After the first pre stress cycle...

Page 1357: ...or each device in the subsite keep in mind that a setting of zero 0 connects the device pin to the ground unit 0 V ground In order to current stress a device the current stress level must be set to a...

Page 1358: ...high enough energy to overcome the semiconductor oxide barrier and are trapped in the oxide Most of the oxide carrier trapping occurs at the drain edge where carrier velocity is maximized These trapp...

Page 1359: ...or lower and ramps linearly from this value until oxide breakdown The J ramp starts at a low current and ramps exponentially until oxide breakdown User modules for these tests are provided in the wlrl...

Page 1360: ...e v_bd double I_bd double t_bd double v_crit double v_box int failure_mode int test_status Input variables status Returned values are placed in the Analyze sheet hi_pin High pin usually the gate pin 1...

Page 1361: ...er previous current level which if exceeded will result in failure 2 5 to 5 recommended value 10 to 100 exit_slope_mult Change of slope failure criteria this is the factor of change in FN slope which...

Page 1362: ...n Catastrophic initial test pass ramp test fail post test pass Others initial test pass ramp test pass post test pass test_status See Details Details Performs a charge to breakdown test using the QBD...

Page 1363: ...35 2 Because of noise considerations the calculated failure current criteria is used only when the measured current is 10 times the user specified noise current For measured currents below this value...

Page 1364: ...al Appendix L Wafer level reliability testing 4200A 901 01 Rev C February 2017 L 15 V Ramp Flow Diagram The following diagram from JESD35 A has been reproduced with permission from JEDEC The flowchart...

Page 1365: ...LoSMUId3 ID string of the SMU connected to ground terminal these three IDs can be same v_use Oxide voltage V under normal operating conditions typically the power supply voltage of the process this v...

Page 1366: ...ails Performs a Charge to Breakdown test using the QBD J ramp test algorithm described in JESD35 A Procedure for Wafer Level Testing of Thin Dielectrics April 2011 This algorithm forces a logarithmic...

Page 1367: ...ry 2017 Notes on output variables test_status 0 No test errors exit due to measured voltage factor of the previous value 1 Failed pre stress test 2 Cumulative charge limit reached 3 Maximum time limit...

Page 1368: ...sting 4200A 901 01 Rev C February 2017 L 19 J ramp flow diagram The following diagram from JESD35 A has been reproduced with permission from JEDEC This flowchart is JEDEC copyright protected material...

Page 1369: ......

Page 1370: ...on 4 77 4 79 MOSFET Project mosfet 4 84 4 85 nanowire tests 4 90 solarcell 4 98 status 6 207 4210 SMU 2 13 4210 SMU sink operating boundaries 3 36 Source or sink 3 4 4210 SMU 4200 PA operating boundar...

Page 1371: ...Tests cvu bjt 4 41 BJT I V and C V Tests Using 4200A CVIV Multi Switch Project 4 45 bld_lib subcommand KULT 8 59 block diagram D 1 Block Measure 13 69 Breakdown Sweep 13 71 build tab area KULT 8 8 Bu...

Page 1372: ...r 13 14 Cmeas4284 user module C 12 Cmeas4980 user module C 12 Cmeas590 user module B 16 code errors finding KULT 8 25 command 13 23 command interpreter KXCI and GPIB 9 5 command line interface KULT 8...

Page 1373: ...yIgnoreDialog user module 6 345 regression formula 6 291 site definition and defining a probe list G 15 user accounts 11 2 user library 8 16 user module 8 16 VSweepBeep user module by copying 8 37 cro...

Page 1374: ...ias characteristics 4 4 debug task loading KULT 8 68 debug user modules with Microsoft Visual C NET 8 65 debug KULT 8 66 default project 6 358 Default Min and Max fields 8 5 define axis properties of...

Page 1375: ...Formula list Data worksheet 6 200 formulas create 6 288 Formulator 6 198 6 200 6 244 6 247 6 249 6 293 7 20 fwd ivsweep test 4 102 G generated currents 12 11 gni w wf test 4 71 gni w wf test procedure...

Page 1376: ...source measure user mode 9 58 sweep system mode VAR1 and VAR2 9 57 Serial polling 9 56 SMU default settings 9 50 Status byte 9 55 Waiting for SRQ 9 57 Keithley Floating Point Exponential 13 59 Kelvin...

Page 1377: ...ap lifetime 4 67 moscap mobile ion 4 77 4 79 MOSFET Project mosfet 4 84 4 85 mosfet cviv 4 74 Multiple SMU stability considerations 12 8 Multiple subsites per die H 23 Multi site test sequence 6 197 M...

Page 1378: ...halt 13 152 pulse_init 13 153 pulse_limits 13 114 pulse_load 13 154 pulse_meas_sm 13 36 13 98 13 114 pulse_meas_timing 13 114 pulse_meas_wfm 13 114 pulse_measrt 13 119 pulse_output 13 155 pulse_output...

Page 1379: ...e I measure I and source V measure V 3 11 Source I measure V or I 3 37 Source or sink 3 4 Source resistance 12 15 Source V measure I or V 3 37 Source delay measure cycle 3 39 Source measure concepts 2...

Page 1380: ...atrix card connections A 7 systems using a switch matrix A 2 Typical configuration with external instruments 7 4 Typical test systems using a switch matrix A 2 U user library KULT 8 17 8 45 8 53 8 55...

Page 1381: ...names are the property of Keithley Instruments All other trademarks and trade names are the property of their respective companies Keithley Instruments Corporate Headquarters 28775 Aurora Road Clevela...

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