Model 4200A-SCS Parameter Analyzer Reference Manual
Appendix H: Using a Micromanipulator 8860 Prober
4200A-901-01 Rev. C / February 2017
H-15
11. Lower the platen to the point where you see good clean probe marks.
12. Click the
Set 2nd Pt
button.
13. Click the
OVD
button in pcNav to ensure that the overdrive will be used. Test the settings by
pressing the UP and DN buttons in pcNav.
Figure 699: Down pushbutton
14. Click
Done
.
Align the wafer
To align the wafer:
1. Click the
Align Wafer
button on the Tools panel of the pcNav window. The Prb8860 Alignment
window opens.
Figure 700: Align wafer button
Figure 701: Prb8860 Alignment window
2. Select
Ref Axis X
in the Prb8860 Alignment dialog box.
3. Select
Auto adjust other devices
.
4. Move prober chuck to extreme left of the wafer. Look through the microscope and ensure the pins
are over the pads.
5. Click
Set Base Pt
.
6. Move to a die on the extreme right of the wafer.
7. Use the joystick (low mode) and theta adjustment to align the pins to the same pads as the first
die (both along the same row of die).
8. Click
Set 2nd Pt
.
9. Repeat this process until the Angle (rad) is as close to zero as possible.
10. When the alignment is complete, click
Done
.
