In this appendix:
Introduction .............................................................................. C-1
Using KCon to add a Keysight LCR Meter to the system ........ C-5
Model 4284A or 4980A test example ...................................... C-6
HP4284ulib user library ........................................................... C-8
Introduction
This section contains information on using the 4200A-SCS with the Keysight Models 4284A and
4980A.
For details on Keysight Model 4284A operation, refer to the
Keysight Model 4284A Operation
Manual
. For details on Keysight Model 4980A operation, refer to the
Keysight Model 4980A
Operation Manual
.
C-V measurement basics
The Keithley Instruments 4200A-SCS can control a Keysight 4284A or 4980A LCR Meter to measure
capacitance versus voltage (C-V) of semiconductor devices. Typically, C-V measurements are
performed on capacitor-like devices, such as a metal-oxide-silicon capacitor (MOS capacitor).
The measurements of MOS capacitors study:
•
The integrity of the gate oxide and semiconductor doping profile
•
The lifetime of semiconductor material
•
The interface quality between the gate oxide and silicon
•
Other dielectric materials used in an integrated circuit
A user-configured voltage sweep allows capacitance measurements that can span the three regions
of a C-V curve: The accumulation region, depletion region, and inversion region.
Appendix C
Using a Keysight 4284/4980A LCR Meter
