Model 4200A-SCS Parameter Analyzer Reference Manual
Appendix K: Using a Signatone CM500 Prober
4200A-901-01 Rev. C / February 2017
K-7
4. Select
Set Point1
.
Figure 801: CM500 Prober 2 Point Alignment 3
5. The Wafer stage moves to the other side as set by the scan distance.
6. Click the
Arrow
buttons on the window to move wafer stage to reference point 2.
7. Select
Set Point2
.
8. The Prober software rotates the theta motor for the proper alignment.
9. Click
Scan Check
to verify that the wafer is aligned correctly.
10. Click
Fine Align
to make a minor alignment.
11. After the wafer is aligned, set the HOME die of the wafer and wafermap.
Set the Home die of the wafer:
1. Move the wafer stage to the actual location that needs to be set as HOME.
2. When completed moving the wafer stage, click the
Set Home
icon on the toolbar.
Figure 802: CM500 Prober Set Home icon
Set the Home die of the wafermap:
1. To set
HOME
on the wafermap, click the
Edit wafermap
icon on the toolbar.
Figure 803: CM500 Prober Editmap function icon
2. Select the
Set Home of Map
function.
Figure 804: CM500 Prober Edit Map Function window
