Model 4200A-SCS Parameter Analyzer Reference Manual
Appendix G: Using a Cascade Microtech PA200 Prober
4200A-901-01 Rev. C / February 2017
G-15
2. Place the wafer on the chuck.
3. From the Chuck menu, select
Turn Vacuum ON
.
4. Manually move the wafer to the Home Die.
5. From the Setup menu, select
Home Die
.
Figure 651: Setup menu
6. Choose the home die on the WaferMap. When choosing the home die:
The wafer should be on the chuck and physically in the correct HOME position.
Click the die on the wafer map UI that will be the home die.
A cross-hair appears when a die has been selected as the home die.
Figure 652: WaferMap home die selection
7. From the Chuck menu, select
Align Theta
.
8. Align wafer using the following steps.
