Keithley 4200A-SCS, Reference Manual

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Appendix F: Set up a probe station Model 4200A-SCS Parameter Analyzer Reference Manual
F-10 4200A-901-01 Rev. C / February 2017
Figure 628: Clarius: Example of site coordinates: Analyze Sheet
PRBGEN user library
The
PRBGEN
user library provides test modules to initialize the prober, move to the next site or subsite
in the wafer map of the prober, make or break contact between the probes and the wafer, and get the
X position and Y position of the prober. It allows Clarius to control all supported probers in the same
manner. Clarius projects that use
PRBGEN
work with any prober supported by Keithley Instruments.
The user modules in the
PRBGEN
user library are provided as actions in Clarius.
PRBGEN user modules
User module Clarius action Description
PrChuck (on
page F-12)
prober-contact
Directs the prober to have the probe pins make contact with the
wafer or separate the pins from the wafer.
PrInit (on page
F-11)
prober-init Initializes the prober with die size, first coordinate (X and Y),
units (mm or mils), and mode information.
PrMovNxt (on
page F-14)
prober-move In learn mode, the
PrMovNxt
command causes the prober to
move to the next site after inking.
PrSSMovNxt
(on page F-13)
prober-ss-move In learn mode, the
PrSSMovNxt
command causes the prober to
move to the next subsite after inking.