Model 4200A-SCS Parameter Analyzer Reference Manual
Section 4: Multi-frequency capacitance-voltage unit
4200A-901-01 Rev. C / February 2017
4-75
6. The mobile ion charge is calculated as follows:
Where:
•
Q
m
= mobile ion charge (C)
•
V
fb2
= flatband voltage measured second time after temperature stress (V)
•
V
fb3
= flatband voltage measured third time with opposite bias polarity (V)
•
C
OX
= oxide capacitance (F)
•
A = gate area (cm
2
)
The mobile ion concentration is related to the mobile ion charge through the following equation:
Where:
•
N
mi
= mobile ion concentration
•
Q
m
= mobile ion charge (C)
•
q = electron charge
moscap-mobile-ion connections
The next figure shows the basic test configuration. Refer to
(on page 4-5) for
details on connections to a semiconductor wafer. Only use the supplied (red), same length 100 Ω
SMA cables for connections to the 4210-CVU.
After making or changing connections, be sure to use the Confidence Check diagnostic tool and do
connection compensation tests. Refer to
(on page 4-10) for details.
Figure 131: Basic configuration for mobile ion testing
