Model 4200A-SCS Parameter Analyzer Reference Manual
Section 4: Multi-frequency capacitance-voltage unit
4200A-901-01 Rev. C / February 2017
4-83
Formula: DEBYEM
Formula name: DEBYEM (
λ
)
Units: m
Description: Debye length (in meters).
Formulator entry:
DEBYEM = SQRT(ES*K*TEMP/(ABS(N90W)*Q^2))*1E-2
Simplified equation:
Formula: DEPTHM
Formula name: DEPTHM (
W)
Units: m
Description: Depletion depth (in meters).
Formulator entry:
DEPTHM = 1E-2*AREA*ES*(1/COND(POX,MINPOS(CADJ),SUBARRAY(CADJ, POX,
MINPOS(CADJ)),SUBARRAY(CADJ, MINPOS(CADJ),POX))-1/COX_CALC))
Simplified equation:
Where:
•
W = depletion depth (m)
•
A = gate area (cm
2
)
•
ε
s
= permittivity of the substrate material (F/cm)
•
C = measured capacitance (F)
•
C
OX
= oxide capacitance (F)
•
1 x E
-2
= units conversion from cm to m
Formula: INVCSQR
Formula name: INVCSQR
Units: 1/F
2
Description: Inverse square of capacitance.
Formulator entry:
INVCSQR = 1/CADJ^2
Simplified equation:
