LSM 510
OPERATION IN EXPERT MODE
LSM 510 META
Maintain Menu
Carl Zeiss
03/06
B 45-0021 e
4-231
•
If necessary slightly reposition the sample and
click on the
Next
button.
•
Do not focus or change scan parameters during
calibration procedure!
•
After calibration of X-axis the orientation of the
calibration grid in the calibration window
changes from horizontal to vertical orientation.
The second grid of the calibration sample has to
be selected and again positioned as indicated in
Fig. 4-228. Click on the
Next
button and
continue with Y-scanner calibration.
•
If the calibration for all speeds and scanners has
finished successfully, quit the scanner
calibration window by pressing the
Close
button.
•
If the
Auto Calibration
procedure can not be
performed successfully after several tries,
calibrate the scanner manually.
•
If the
Auto Calibration
box is disabled, the
speed index and the scanner (
X-axis
or
Y-axis
)
has to be chosen manually. The calibration cycle
only contains one speed index and one scanner.
For calibration of all speeds (11-13) and both
scanners, the manual calibration procedure has
to be repeated several times with changing axis
and index parameters (Start with scanner X and
speed 11, continue with scanner X and speed
12, then X and speed 13, ...). The position of
the calibration standard has to be controlled at
each new speed index. A repositioning of the
calibration sample is required after scanner
change (for X-scanner calibration horizontal
grid, for Y-scanner vertical grid).
Fig. 4-228
Scanner Calibration window