ANNEX
LSM
510
DuoScan
Carl Zeiss
Configurations Overview
LSM 510 META
DuoScan
8-12
B 45-0021 e
03/06
Configuration
Main beam
splitter (HFT)
Secondary beam
splitter 1 (NFT 1)
Secondary beam
splitter 2 (NFT 2)
Secondary beam
splitter 3 (NFT 3)
28 NT
80/20
405/488/543/633
405/488
405/514/594
458
458/514
488/594
488/543
empty
mirror
515
545
595
635 VIS
KP 545
plate
mirror
490
515
545
empty
plate
empty
mirror
28 META
NT 80/20
405/488/543/633
405/488
405/514/594
458
458/514
488/594
488/543
empty
mirror
515
545
595
635 VIS
KP 545
plate
mirror
490
515
545
empty
plate
empty
mirror
29 NT
80/20
405/488/633
405/488/561
405/514/633
458/514
458/561
488/561/633
488
empty
mirror
490
515
565
635 VIS
KP 560
plate
mirror
490
515
565
empty
plate
empty
mirror
29 META
NT 80/20
405/488/633
405/488/561
405/514/633
458
458/514
488/561
488
empty
mirror
490
515
565
635 VIS
KP 560
plate
mirror
490
515
565
empty
plate
empty
mirror