OPERATION IN EXPERT MODE
LSM 510
DuoScan
Carl Zeiss
Display and Analysis of Images
LSM 510 META
DuoScan
4-320
B 45-0021 e
03/06
(4)
Grad. Histo measurement mode in 2D display
•
Click on the
Diagram
button in the
Measure
button bar. Click on the
Grad. Histo
button in the
additional button bar now displayed.
The lower part of the
Image Display
box shows the gradient distribution of the topography. Before
creation of the slope diagram, the image should be filtered at least once using a low-pass filter, since
otherwise the rough height gradation of the image will result in a comb-shaped histogram. The Root-
Mean-Square Slope (RMS Slope) parameter is calculated and displayed below the chart. The following
formula is used for calculation:
( ) (
)
( ) (
)
R
N
N
z x y
z x
y
x
z x y
x y
y
DQ
x
y
i
N
i
j
i
j
i
j
i
j
j
N
x
y
=
− ⋅
−
⋅
⋅ ⋅
−
⎡
⎣
⎢
⎢
⎤
⎦
⎥
⎥
+
−
⎡
⎣
⎢
⎢
⎤
⎦
⎥
⎥
⎧
⎨
⎪
⎩⎪
⎫
⎬
⎪
⎭⎪
=
−
−
=
∑ ∑
1
1
1
1
1
2
1
2
1
(
) (
)
,
,
,
,
Δ
Δ
(5)
Roughness measurement mode in 2D display (Profile display)
•
Click on the
Profile
button in the
Measure
button bar.
•
Click on the
Roughn.
button in the
Measure
button bar.
−
The roughness parameters are calculated and displayed on the left below the image. All roughness
parameters calculated from a 2D profile are named with
R
.
−
The
Copy
button is displayed below the right-hand side of the image. This button permits the
roughness parameters to be copied to the clipboard and imported to another program (e.g.: MS
Word or MS Excel) via the
Paste
function.
2D Amplitude parameters (Profile Roughness):
Mean height z
Rc
Pc
Wc
Dispersion
Arithmetic mean deviation
Ra
Pa
Wa
Root mean square deviation
Rq
Pq
Wq
Asymmetry Skewness
Rsk
Psk
Wsk
Sharpness Kurtosis
Rku
Pku
Wku
Extremes Highest
peak
Rp
Pp
Wp
Lowest valley
Rv
Pv
Wv
Absolute peak to valley
Rt
Pt
Wt
Averaged peak to valley
Rz
Pz
Wz
Maximum peak to valley
Rmax
Pmax
Wmax
If chosen filters are
FFT High
No, M
FFT L
