Zeiss LSM 510, Manual

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LSM 510 OPERATION IN EXPERT MODE
LSM 510 META Display and Analysis of Images Carl Zeiss
03/06
B 45-0021 e 4-323
Calculation of roughness parameters
The following roughness parameters are calculated:
−
Mean height of all surface height values S
c
( )
∑ ∑
= =
⋅ ⋅ ⋅
⋅
= −
y
x
N
j
j i
N
i y x
c
y x z
N N
RS
1 1
1
,
N
x
, N
y
... number of pixels in X- or Y-direction
−
Arithmetic mean deviation of all surface height values R S
a
( )
[ ]
∑ ∑
= =
− ⋅ ⋅ ⋅
⋅
= −
y
x
N
j
c j i
N
i
y x
a
RS y x z
N N
RS
1 1
1
,
−
Quadratic mean deviation of all surface height values R S
q
( )
[ ]
∑ ∑
= =
− ⋅ ⋅ ⋅
⋅
= −
y
x
N
j
c j i
N
i
y x
q
RS y x z
N N
RS
1
2
1
1
,
−
Skewness of the distribution of all surface height values R S
SK
( )
∑ ∑
= =
⋅ ⋅ ⋅
⋅ ⋅
=
y
x
N
j
j i
N
i q y x
SK
y x z
RS N N
RS
1
3
1
3
1
,
−
Kurtosis of the distribution of all surface height values S
KU
( )
∑ ∑
= =
⋅ ⋅ ⋅
⋅ ⋅
=
y
x
N
j
j i
N
i q y x
KU
y x z
RS N N
RS
1
4
1
4
1
,
−
Maximum peak height RS
p
c p
RS z RS
− =
max
−
Maximum valley depth S
V
min
z RS RS
c V
− =
−
Maximum roughness depth R S
t
(= Peak to Valley / PV)
min max
z z RS
t
− = −
maximum height difference of the overall topography.