4
4
4-98
4-98
Parts Replacement and Cleaning > Laser Exposure System > Removing the Laser Scanner Unit > Preparations
Parts Replacement and Cleaning > Laser Exposure System > Removing the Laser Scanner Unit > Preparations
5) Remove the 2 connectors.
x2
CAUTION:
• When pulling out the ITB Unit, be sure not to lower the ITB Pressure Release Lever
below the position where clicky sense is felt. If the ITB Unit is pulled out while
the lever is lowered, the ITB is scraped by the Plate and this may cause to make
scratches on the ITB surface.
Click position
Not to lower the ITB Pressure Releace Lever
below the position where clicky sense is felt.
ITB pressure
release lever
F-4-101
CAUTION:
• When pulling out the ITB Unit, it may drop because it does not click at stop position if
pulled out while lifting it. Thus, be careful of pulling it out.
6) Pull out the ITB Unit up to the stop label position flatly.
• 2 screws
Stop label position
x2
F-4-102