ASP STERRAD 100, Service Manual, Page: 278 / 309

Action
F
Verify opening of throttle valve.
F
Verify opening of vent valve.
F
Verify smooth opening of door at atmosphere.
F
Press
LONG CANCEL.
Corrective Action
F
Replace vent valve assembly.
F
Adjust vacuum switch if door does not open smoothly.
Display
VAC_RF W/ START or
NEXT W/ LONG CANCEL
Action
F
Allow machine to cool down for 5 minutes with door open.
F
Press START and repeat the leak test without running plasma.
Record the final leak rate.
F
Press
CANCEL
and then
START
to exit the test
Corrective Action
Locate and repair (when practical) chamber leak if leak rate is 125
mTorr/5:00 minutes. If a repair cannot be made, it may be necessary to
replace one or more of the system assemblies.
Cassette Adjustments
Display
CASSETTE ADJ W/ START or
NEXT Menu W/ LONG CANCEL
Action
Press
START.
Cassette Adjustments AutoTest
ASP Service Guide rev D STERRAD® 100 Sterilizer B-39