ASP STERRAD 100, Service Manual, Page: 275 / 309

Corrective Action
F
Check throttle valve harness connections
F
Replace throttle valve.
F
Perform a Leak Back Test.
RF Test Set-Up and Test
RF Test Set-Up
WARNING:- RF power is present during this operation. do not
touch the RF generator or any of the wiring.
F
If peroxide has been injected, run the RF for 15 minutes. Monitor
the reflected power display in mV. The value begins as high as 500
mV then is decreases to a value typically below 100 mV. If the value
begins to climb above 300 mV, there is a potential mismatch in
impedance.
F
After 500 mTorr is reached and is stable, press a
LONG CANCEL
for
the RF Test menu.
F
Set-up a Bird Watt meter on the X10 scale. Reading is on the
Kilowatt scale.
F
Connect the RF generator to the INPUT of the directional coupler on
the Watt.
F
Connect the RF interconnect cable to the OUTPUT of the directional
coupler Watt. The RF element arrow should point towards the RF
match.
RF Test
Display
P= 500 mT,
TURN RF ON W/ START
Action
F
Press
START
.
F
Verify operation of RF by observing RF power measurement using the
Bird Watt meter. Observe for 15 minutes.
F
Clean the electrode, RF feedthrough and chamber using deionized
water and a Scotch Brite-type scrub pad.
AutoTest Vacuum Subsystem Tests
B-36 STERRAD® 100 Sterilizer ASP Service Guide rev D