
Process Parameters
Item
Min.
Max.
Temperature
Chamber and Door
42°C
50°C
Vacuum Stage
Time
0 minutes
20 minutes
Pressure
300 mTorr
300 mTorr
Injection Stage
Time
6:00 min:sec
6:02 min:sec
Pressure
first 10 seconds
300 mTorr
none
after 6 minutes
6.0 Torr
12.0 Torr
Diffusion Stage
Time
42:00 min:sec
42:02 min:sec
Pressure
6.0 Torr
14.0 Torr
Diffusion Pump Down Phase
Time
2:00 min:sec
2:01 min:sec
Pressure control point
475 mTorr
525 mTorr
Plasma Stage
Delivered power
365 Watt
450 Watt
Pressure
475 mTorr
525 mTorr
Theory of Operation-Overview
System Operation
ASP Service Guide rev. D
STERRAD® 100 Sterilizer
2-5
Summary of Contents for STERRAD 100
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