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ELYRA 7
Left Tool Area and Hardware Control Tools
ZEISS
03/2019 V_02
000000-2262-999
103
If the projected pattern is detectable but too weak,
or the signal peak is not completely captured within
the range of the Definite Focus the
Status:
line will
display
- Error -
in red letters alike the situation,
when the
Find Surface
procedure is interrupted
(Fig. 150).
If however the grid cannot be unambiguously
identified within the signal, the Status: line will
display
- Reflex not found -
in grey letters
(Fig. 151). In either way, the Definite Focus will
resume normal operation the next time it will be
used.
If a reflection is not found, the system will re-
scan the whole Z-range several times before
reporting
- Error -
or
- Reflection not found -
upon which the operation will end. If you want
to disrupt the process, you have to press the
pressed
Find Surface
button during operation.
In this case
- Error -
will immediately be
reported on the
Status:
line and the run will
end.
When a reflection is found the Definite Focus will
have its focus at the reflection position. This does not
necessarily mean that the sample is in focus. If you
want to have the system focus on the sample after
reflex finding, you for once in your session have to
determine the offset between Definite Focus reflex
and the focus position of the sample.
To this end perform
Find Surface
until
- Reflex
found -
is displayed in the
Status:
line and then
manually set the
Z-Position
to zero by pressing the
Manually
button in the
Zero Position
field of the
Focus
tool display window (Fig. 152).
Fig. 150
Definite Focus tool: Find Surface
pressed and reflex not found
because of insufficient signal
strength.
Fig. 151
Definite Focus tool: Find Surface
pressed and reflex not found due
to insufficient grid recognition.
Fig. 152
Focus tool: Zero focus